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digital-brain/content/zettels/positioning_stations.md

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+++ title = "Positioning Stations" author = ["Dehaeze Thomas"] draft = false category = "equipment" +++

Tags :

Review

Sensors

  • Capacitive: <&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam>
  • Fiber Interferometers Interferometers:
    • Attocube FPS3010 Fabry-Pérot interferometers: <&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann>
    • Attocube IDS3010 Fabry-Pérot interferometers: <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano>
    • PicoScale SmarAct Michelson interferometers: <&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls>

Actuators

  • Piezoelectric: <&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann>
  • 3-phase linear motor: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>
  • Voice Coil: <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>

Bandwidth

Rarely specificity. Usually slow, so that only drifts are compensated. Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>.

Degrees of Freedom

  • Full rotation for tomography:
    • Spindle bellow YZ stage: <&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls>
    • Spindle above YZ stage: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii>
  • Only for mapping: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano>

Stroke:

  • > 1mm: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>

Payload capabilities

  • Micron scale samples
  • Samples up to 500g <&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano>

Nano Positioning End-Station without online metrology

{{< figure src="/ox-hugo/endstation_id11.png" >}}

End-Station with integrated online metrology

Table 1: End-Station with integrated online metrology
Architecture Sensors and measured DoFs Metrology Use Stroke, DoF Samples Institute, BL Ref
Spindle / XYZ piezo stage / Spherical retroreflector / Sample 3 interferometers: \(YZ\) Characterization XYZ: 100um, Rz: 180 deg micron scale PETRA III, P06 <&schroer17_ptynam;&schropp20_ptynam>
Spindle / Metrology Ring / XYZ Stage / Sample 3 Capacitive: \(YZR_x\) Post processing micron scale NSLS, X8C <&wang12_autom_marker_full_field_hard>
XYZ piezo stage / Spindle / Metrology Ring / Sample 2 interferometers : \(YZ\) Detector triggering micron scale NSLS, HRX <&xu23_high_nsls_ii>

{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class="figure-number">Figure 1: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class="figure-number">Figure 2: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class="figure-number">Figure 3: Figure caption" >}}

End-Station with integrated feedback loops based on online metrology

Table 2: End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.
Architecture Sensors and measured DoFs Bandwidth Stroke, DoF Samples Institute, BL Ref
XYZ piezo motors / Mirrors / Sample 3 interferometers: \(XYZ\) 3 PID XYZ: 3mm light APS <&nazaretski15_pushin_limit>
Piezo Hexapod / Spindle / Metrology Ring / Sample 12 Capacitive: \(XYZR_xR_y\) 10Hz XYZ: 50um, Rx/Ry:500urad, Rz: 180deg light ESRF, ID16a <&villar18_nanop_esrf_id16a_nano_imagin_beaml>
Piezo Tripod / Spindle / Spherical Reference / Sample 5 Custom interferometers: \(YZR_x\) PID XYZ: 400um, Rz: 365 deg light PSI, OMNY <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage>
Stacked XYZ linear motors / Spindle / XY / Cylindrical Reference 5 interferometers: \(XYZR_xR_y\) XYZ: 400um, Rz: 360 deg light Soleil, Nanoprobe <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>
XYZ piezo / Spindle / Metrology Ring / Sample 3 interferometers : \(XYZ\) XYZ: 100um, Rz: 360 deg up to 500g NSLS, SRX <&nazaretski22_new_kirkp_baez_based_scann>
Parallel XYZ voice coil stage / Sample 3 interferometers: \(XYZ\) 100Hz XYZ: 3mm up to 350g Diamond, I14 <&kelly22_delta_robot_long_travel_nano>
Rz / Parallel XYZ voice coil stage / Sample 3 interferometers: \(XYZ\) 100Hz YZ: 3mm, Rz: +-110deg light LNLS, CARNAUBA <&geraldes23_sapot_carnaub_sirius_lnls>

{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class="figure-number">Figure 4: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class="figure-number">Figure 5: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class="figure-number">Figure 6: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class="figure-number">Figure 7: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class="figure-number">Figure 8: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class="figure-number">Figure 9: Figure caption" >}}

Manufacturers

Manufacturers Country
Kohzu Japan
PI USA
Attocube Germany
Newport
LAB Belgium

Bibliography

<./biblio/references.bib>