+++ title = "Positioning Stations" author = ["Dehaeze Thomas"] draft = false category = "equipment" +++ Tags : ## Review {#review} ### Sensors {#sensors} - Capacitive: <&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam> - Fiber Interferometers Interferometers: - Attocube FPS3010 Fabry-Pérot interferometers: <&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann> - Attocube IDS3010 Fabry-Pérot interferometers: <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano> - PicoScale SmarAct Michelson interferometers: <&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls> ### Actuators {#actuators} - Piezoelectric: <&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann> - 3-phase linear motor: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul> - Voice Coil: <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls> ### Bandwidth {#bandwidth} Rarely specificity. Usually slow, so that only drifts are compensated. Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>. ### Degrees of Freedom {#degrees-of-freedom} - Full rotation for tomography: - Spindle bellow YZ stage: <&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls> - Spindle above YZ stage: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii> - Only for mapping: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano> **Stroke**: - > 1mm: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls> ### Payload capabilities {#payload-capabilities} - Micron scale samples - Samples up to 500g <&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano> ### Nano Positioning End-Station without online metrology {#nano-positioning-end-station-without-online-metrology} {{< figure src="/ox-hugo/endstation_id11.png" >}} ### End-Station with integrated online metrology {#end-station-with-integrated-online-metrology}
| Architecture | Sensors and measured DoFs | Metrology Use | Stroke, DoF | Samples | Institute, BL | Ref | |-------------------------------------------------------------------|------------------------------|---------------------|-------------------------|--------------|----------------|----------------------------------------| | Spindle / **XYZ piezo stage** / Spherical retroreflector / Sample | 3 interferometers: \\(YZ\\) | Characterization | XYZ: 100um, Rz: 180 deg | micron scale | PETRA III, P06 | <&schroer17_ptynam;&schropp20_ptynam> | | Spindle / Metrology Ring / **XYZ** Stage / Sample | 3 Capacitive: \\(YZR\_x\\) | Post processing | | micron scale | NSLS, X8C | <&wang12_autom_marker_full_field_hard> | | **XYZ piezo stage** / Spindle / Metrology Ring / Sample | 2 interferometers : \\(YZ\\) | Detector triggering | | micron scale | NSLS, HRX | <&xu23_high_nsls_ii> | {{< figure src="/ox-hugo/endstation_schroer.png" caption="Figure 1: Figure caption" >}} {{< figure src="/ox-hugo/endstation_wang.png" caption="Figure 2: Figure caption" >}} {{< figure src="/ox-hugo/endstation_xu24.png" caption="Figure 3: Figure caption" >}} ### End-Station with integrated feedback loops based on online metrology {#end-station-with-integrated-feedback-loops-based-on-online-metrology} | Architecture | Sensors and measured DoFs | Bandwidth | Stroke, DoF | Samples | Institute, BL | Ref | |----------------------------------------------------------------------|----------------------------------------|-----------|--------------------------------------|------------|-------------------|-------------------------------------------------------------------------------| | **XYZ piezo motors** / Mirrors / Sample | 3 interferometers: \\(XYZ\\) | 3 PID | XYZ: 3mm | light | APS | <&nazaretski15_pushin_limit> | | **Piezo Hexapod** / Spindle / Metrology Ring / Sample | 12 Capacitive: \\(XYZR\_xR\_y\\) | 10Hz | XYZ: 50um, Rx/Ry:500urad, Rz: 180deg | light | ESRF, ID16a | <&villar18_nanop_esrf_id16a_nano_imagin_beaml> | | **Piezo Tripod** / Spindle / Spherical Reference / Sample | 5 Custom interferometers: \\(YZR\_x\\) | PID | XYZ: 400um, Rz: 365 deg | light | PSI, OMNY | <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage> | | **Stacked XYZ linear motors** / Spindle / XY / Cylindrical Reference | 5 interferometers: \\(XYZR\_xR\_y\\) | | XYZ: 400um, Rz: 360 deg | light | Soleil, Nanoprobe | <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul> | | **XYZ piezo** / Spindle / Metrology Ring / Sample | 3 interferometers : \\(XYZ\\) | | XYZ: 100um, Rz: 360 deg | up to 500g | NSLS, SRX | <&nazaretski22_new_kirkp_baez_based_scann> | | **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | XYZ: 3mm | up to 350g | Diamond, I14 | <&kelly22_delta_robot_long_travel_nano> | | Rz / **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | YZ: 3mm, Rz: +-110deg | light | LNLS, CARNAUBA | <&geraldes23_sapot_carnaub_sirius_lnls> | {{< figure src="/ox-hugo/endstation_nazaretski.png" caption="Figure 4: Figure caption" >}} {{< figure src="/ox-hugo/endstation_villar.png" caption="Figure 5: Figure caption" >}} {{< figure src="/ox-hugo/endstation_holler.png" caption="Figure 6: Figure caption" >}} {{< figure src="/ox-hugo/endstation_engblom.png" caption="Figure 7: Figure caption" >}} {{< figure src="/ox-hugo/endstation_kelly.png" caption="Figure 8: Figure caption" >}} {{< figure src="/ox-hugo/endstation_geraldes.png" caption="Figure 9: Figure caption" >}} ## Manufacturers {#manufacturers} | Manufacturers | Country | |------------------------------------------------------------------|---------| | [Kohzu](https://www.kohzuprecision.com/i/) | Japan | | [PI](https://www.physikinstrumente.com/en/) | USA | | [Attocube](https://www.attocube.com/en/products/nanopositioners) | Germany | | [Newport](https://www.newport.com/c/manual-positioning) | | | [LAB](https://www.labmotionsystems.com/products/z-stages/) | Belgium | ## Bibliography {#bibliography} <./biblio/references.bib>