digital-brain/content/zettels/positioning_stations.md

+++
title = "Positioning Stations"
author = ["Dehaeze Thomas"]
draft = false
category = "equipment"
+++

Tags
:


## Review {#review}


### Sensors {#sensors}

-   Capacitive: <&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam>
-   Fiber Interferometers Interferometers:
    -   Attocube FPS3010 Fabry-Pérot interferometers: <&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann>
    -   Attocube IDS3010 Fabry-Pérot interferometers: <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano>
    -   PicoScale SmarAct Michelson interferometers: <&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls>


### Actuators {#actuators}

-   Piezoelectric: <&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann>
-   3-phase linear motor: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>
-   Voice Coil: <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>


### Bandwidth {#bandwidth}

Rarely specificity.
Usually slow, so that only drifts are compensated.
Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>.


### Degrees of Freedom {#degrees-of-freedom}

-   Full rotation for tomography:
    -   Spindle bellow YZ stage: <&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls>
    -   Spindle above YZ stage: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii>
-   Only for mapping: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano>

**Stroke**:

-   &gt; 1mm: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>


### Payload capabilities {#payload-capabilities}

-   Micron scale samples
-   Samples up to 500g <&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano>


### Nano Positioning End-Station without online metrology {#nano-positioning-end-station-without-online-metrology}

{{< figure src="/ox-hugo/endstation_id11.png" >}}


### End-Station with integrated online metrology {#end-station-with-integrated-online-metrology}

<div class="table-caption">
  <span class="table-number">Table 1:</span>
  End-Station with integrated online metrology
</div>

| Architecture                                                      | Sensors and measured DoFs    | Metrology Use       | Stroke, DoF             | Samples      | Institute, BL  | Ref                                    |
|-------------------------------------------------------------------|------------------------------|---------------------|-------------------------|--------------|----------------|----------------------------------------|
| Spindle / **XYZ piezo stage** / Spherical retroreflector / Sample | 3 interferometers: \\(YZ\\)  | Characterization    | XYZ: 100um, Rz: 180 deg | micron scale | PETRA III, P06 | <&schroer17_ptynam;&schropp20_ptynam>  |
| Spindle / Metrology Ring / **XYZ** Stage / Sample                 | 3 Capacitive: \\(YZR\_x\\)   | Post processing     |                         | micron scale | NSLS, X8C      | <&wang12_autom_marker_full_field_hard> |
| **XYZ piezo stage** / Spindle / Metrology Ring / Sample           | 2 interferometers : \\(YZ\\) | Detector triggering |                         | micron scale | NSLS, HRX      | <&xu23_high_nsls_ii>                   |

<a id="figure--fig:endstation-schroer"></a>

{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class=\"figure-number\">Figure 1: </span>Figure caption" >}}

<a id="figure--fig:endstation-wang"></a>

{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class=\"figure-number\">Figure 2: </span>Figure caption" >}}

<a id="figure--fig:endstation-xu24"></a>

{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class=\"figure-number\">Figure 3: </span>Figure caption" >}}


### End-Station with integrated feedback loops based on online metrology {#end-station-with-integrated-feedback-loops-based-on-online-metrology}

<div class="table-caption">
  <span class="table-number">Table 2:</span>
  End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.
</div>

| Architecture                                                         | Sensors and measured DoFs              | Bandwidth | Stroke, DoF                          | Samples    | Institute, BL     | Ref                                                                           |
|----------------------------------------------------------------------|----------------------------------------|-----------|--------------------------------------|------------|-------------------|-------------------------------------------------------------------------------|
| **XYZ piezo motors** / Mirrors / Sample                              | 3 interferometers: \\(XYZ\\)           | 3 PID     | XYZ: 3mm                             | light      | APS               | <&nazaretski15_pushin_limit>                                                  |
| **Piezo Hexapod** / Spindle / Metrology Ring / Sample                | 12 Capacitive: \\(XYZR\_xR\_y\\)       | 10Hz      | XYZ: 50um, Rx/Ry:500urad, Rz: 180deg | light      | ESRF, ID16a       | <&villar18_nanop_esrf_id16a_nano_imagin_beaml>                                |
| **Piezo Tripod** / Spindle / Spherical Reference / Sample            | 5 Custom interferometers: \\(YZR\_x\\) | PID       | XYZ: 400um, Rz: 365 deg              | light      | PSI, OMNY         | <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage> |
| **Stacked XYZ linear motors** / Spindle / XY / Cylindrical Reference | 5 interferometers: \\(XYZR\_xR\_y\\)   |           | XYZ: 400um, Rz: 360 deg              | light      | Soleil, Nanoprobe | <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>   |
| **XYZ piezo** / Spindle / Metrology Ring / Sample                    | 3 interferometers : \\(XYZ\\)          |           | XYZ: 100um, Rz: 360 deg              | up to 500g | NSLS, SRX         | <&nazaretski22_new_kirkp_baez_based_scann>                                    |
| **Parallel XYZ voice coil stage** / Sample                           | 3 interferometers: \\(XYZ\\)           | 100Hz     | XYZ: 3mm                             | up to 350g | Diamond, I14      | <&kelly22_delta_robot_long_travel_nano>                                       |
| Rz / **Parallel XYZ voice coil stage** / Sample                      | 3 interferometers: \\(XYZ\\)           | 100Hz     | YZ: 3mm, Rz: +-110deg                | light      | LNLS, CARNAUBA    | <&geraldes23_sapot_carnaub_sirius_lnls>                                       |

<a id="figure--fig:endstation-nazaretski"></a>

{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class=\"figure-number\">Figure 4: </span>Figure caption" >}}

<a id="figure--fig:endstation-villar"></a>

{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class=\"figure-number\">Figure 5: </span>Figure caption" >}}

<a id="figure--fig:endstation-holler"></a>

{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class=\"figure-number\">Figure 6: </span>Figure caption" >}}

<a id="figure--fig:endstation-engblom"></a>

{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class=\"figure-number\">Figure 7: </span>Figure caption" >}}

<a id="figure--fig:endstation-kelly"></a>

{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class=\"figure-number\">Figure 8: </span>Figure caption" >}}

<a id="figure--fig:endstation-geraldes"></a>

{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class=\"figure-number\">Figure 9: </span>Figure caption" >}}


## Manufacturers {#manufacturers}

| Manufacturers                                                    | Country |
|------------------------------------------------------------------|---------|
| [Kohzu](https://www.kohzuprecision.com/i/)                       | Japan   |
| [PI](https://www.physikinstrumente.com/en/)                      | USA     |
| [Attocube](https://www.attocube.com/en/products/nanopositioners) | Germany |
| [Newport](https://www.newport.com/c/manual-positioning)          |         |
| [LAB](https://www.labmotionsystems.com/products/z-stages/)       | Belgium |


## Bibliography {#bibliography}

<./biblio/references.bib>
Add content folder 2020-04-20 18:58:10 +02:00			`+++`
			`title = "Positioning Stations"`
Update Content - 2022-03-15 2022-03-15 16:40:48 +01:00			`author = ["Dehaeze Thomas"]`
Add content folder 2020-04-20 18:58:10 +02:00			`draft = false`
Update Content - 2022-03-22 2022-03-22 16:42:13 +01:00			`category = "equipment"`
Add content folder 2020-04-20 18:58:10 +02:00			`+++`

Update all files with new citeproc-org package 2020-08-17 23:00:20 +02:00			`Tags`
			`:`

Update Content - 2020-09-21 2020-09-21 16:00:52 +02:00
Update Content - 2024-06-05 2024-06-05 13:08:36 +02:00			`## Review {#review}`
Update Content - 2022-10-27 2022-10-27 17:57:43 +02:00

Update Content - 2024-06-05 2024-06-05 13:08:36 +02:00			`### Sensors {#sensors}`
Update Content - 2022-10-27 2022-10-27 17:57:43 +02:00
Update Content - 2024-06-05 2024-06-05 13:08:36 +02:00			`- Capacitive: <&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam>`
			`- Fiber Interferometers Interferometers:`
			`- Attocube FPS3010 Fabry-Pérot interferometers: <&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann>`
			`- Attocube IDS3010 Fabry-Pérot interferometers: <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano>`
			`- PicoScale SmarAct Michelson interferometers: <&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls>`
Update Content - 2022-10-27 2022-10-27 17:57:43 +02:00

Update Content - 2024-06-05 2024-06-05 13:08:36 +02:00			`### Actuators {#actuators}`
Update Content - 2022-10-27 2022-10-27 17:57:43 +02:00
Update Content - 2024-06-05 2024-06-05 13:08:36 +02:00			`- Piezoelectric: <&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann>`
			`- 3-phase linear motor: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>`
			`- Voice Coil: <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>`


			`### Bandwidth {#bandwidth}`

			`Rarely specificity.`
			`Usually slow, so that only drifts are compensated.`
			`Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>.`


			`### Degrees of Freedom {#degrees-of-freedom}`

			`- Full rotation for tomography:`
			`- Spindle bellow YZ stage: <&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls>`
			`- Spindle above YZ stage: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii>`
			`- Only for mapping: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano>`

			`Stroke:`

			`- > 1mm: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>`


			`### Payload capabilities {#payload-capabilities}`

			`- Micron scale samples`
			`- Samples up to 500g <&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano>`


			`### Nano Positioning End-Station without online metrology {#nano-positioning-end-station-without-online-metrology}`

			`{{< figure src="/ox-hugo/endstation_id11.png" >}}`


			`### End-Station with integrated online metrology {#end-station-with-integrated-online-metrology}`

			`<div class="table-caption">`
			`<span class="table-number">Table 1:</span>`
			`End-Station with integrated online metrology`
			`</div>`

			`\| Architecture \| Sensors and measured DoFs \| Metrology Use \| Stroke, DoF \| Samples \| Institute, BL \| Ref \|`
			`\|-------------------------------------------------------------------\|------------------------------\|---------------------\|-------------------------\|--------------\|----------------\|----------------------------------------\|`
			`\| Spindle / XYZ piezo stage / Spherical retroreflector / Sample \| 3 interferometers: \\(YZ\\) \| Characterization \| XYZ: 100um, Rz: 180 deg \| micron scale \| PETRA III, P06 \| <&schroer17_ptynam;&schropp20_ptynam> \|`
			`\| Spindle / Metrology Ring / XYZ Stage / Sample \| 3 Capacitive: \\(YZR\_x\\) \| Post processing \| \| micron scale \| NSLS, X8C \| <&wang12_autom_marker_full_field_hard> \|`
			`\| XYZ piezo stage / Spindle / Metrology Ring / Sample \| 2 interferometers : \\(YZ\\) \| Detector triggering \| \| micron scale \| NSLS, HRX \| <&xu23_high_nsls_ii> \|`

			`<a id="figure--fig:endstation-schroer"></a>`

			`{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class=\"figure-number\">Figure 1: </span>Figure caption" >}}`

			`<a id="figure--fig:endstation-wang"></a>`

			`{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class=\"figure-number\">Figure 2: </span>Figure caption" >}}`

			`<a id="figure--fig:endstation-xu24"></a>`

			`{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class=\"figure-number\">Figure 3: </span>Figure caption" >}}`


			`### End-Station with integrated feedback loops based on online metrology {#end-station-with-integrated-feedback-loops-based-on-online-metrology}`

			`<div class="table-caption">`
			`<span class="table-number">Table 2:</span>`
			`End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.`
			`</div>`

			`\| Architecture \| Sensors and measured DoFs \| Bandwidth \| Stroke, DoF \| Samples \| Institute, BL \| Ref \|`
			`\|----------------------------------------------------------------------\|----------------------------------------\|-----------\|--------------------------------------\|------------\|-------------------\|-------------------------------------------------------------------------------\|`
			`\| XYZ piezo motors / Mirrors / Sample \| 3 interferometers: \\(XYZ\\) \| 3 PID \| XYZ: 3mm \| light \| APS \| <&nazaretski15_pushin_limit> \|`
			`\| Piezo Hexapod / Spindle / Metrology Ring / Sample \| 12 Capacitive: \\(XYZR\_xR\_y\\) \| 10Hz \| XYZ: 50um, Rx/Ry:500urad, Rz: 180deg \| light \| ESRF, ID16a \| <&villar18_nanop_esrf_id16a_nano_imagin_beaml> \|`
			`\| Piezo Tripod / Spindle / Spherical Reference / Sample \| 5 Custom interferometers: \\(YZR\_x\\) \| PID \| XYZ: 400um, Rz: 365 deg \| light \| PSI, OMNY \| <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage> \|`
			`\| Stacked XYZ linear motors / Spindle / XY / Cylindrical Reference \| 5 interferometers: \\(XYZR\_xR\_y\\) \| \| XYZ: 400um, Rz: 360 deg \| light \| Soleil, Nanoprobe \| <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul> \|`
			`\| XYZ piezo / Spindle / Metrology Ring / Sample \| 3 interferometers : \\(XYZ\\) \| \| XYZ: 100um, Rz: 360 deg \| up to 500g \| NSLS, SRX \| <&nazaretski22_new_kirkp_baez_based_scann> \|`
			`\| Parallel XYZ voice coil stage / Sample \| 3 interferometers: \\(XYZ\\) \| 100Hz \| XYZ: 3mm \| up to 350g \| Diamond, I14 \| <&kelly22_delta_robot_long_travel_nano> \|`
			`\| Rz / Parallel XYZ voice coil stage / Sample \| 3 interferometers: \\(XYZ\\) \| 100Hz \| YZ: 3mm, Rz: +-110deg \| light \| LNLS, CARNAUBA \| <&geraldes23_sapot_carnaub_sirius_lnls> \|`

			`<a id="figure--fig:endstation-nazaretski"></a>`

			`{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class=\"figure-number\">Figure 4: </span>Figure caption" >}}`

			`<a id="figure--fig:endstation-villar"></a>`

			`{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class=\"figure-number\">Figure 5: </span>Figure caption" >}}`

			`<a id="figure--fig:endstation-holler"></a>`

			`{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class=\"figure-number\">Figure 6: </span>Figure caption" >}}`

			`<a id="figure--fig:endstation-engblom"></a>`

			`{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class=\"figure-number\">Figure 7: </span>Figure caption" >}}`

			`<a id="figure--fig:endstation-kelly"></a>`

			`{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class=\"figure-number\">Figure 8: </span>Figure caption" >}}`

			`<a id="figure--fig:endstation-geraldes"></a>`

			`{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class=\"figure-number\">Figure 9: </span>Figure caption" >}}`
Update Content - 2022-10-27 2022-10-27 17:57:43 +02:00

Update Content - 2020-09-21 2020-09-21 16:00:52 +02:00			`## Manufacturers {#manufacturers}`

Update Content - 2021-03-14 2021-03-14 16:00:24 +01:00			`\| Manufacturers \| Country \|`
			`\|------------------------------------------------------------------\|---------\|`
			`\| [Kohzu](https://www.kohzuprecision.com/i/) \| Japan \|`
			`\| [PI](https://www.physikinstrumente.com/en/) \| USA \|`
			`\| [Attocube](https://www.attocube.com/en/products/nanopositioners) \| Germany \|`
			`\| [Newport](https://www.newport.com/c/manual-positioning) \| \|`
Update Content - 2022-10-27 2022-10-27 17:57:43 +02:00			`\| [LAB](https://www.labmotionsystems.com/products/z-stages/) \| Belgium \|`
Update Content - 2022-03-15 2022-03-15 16:40:48 +01:00

			`## Bibliography {#bibliography}`

Update Content - 2024-06-05 2024-06-05 13:08:36 +02:00			`<./biblio/references.bib>`