digital-brain/content/article/butler11_posit_contr_lithog_equip.md
Thomas Dehaeze 158dfe302f Update many files
PhDthesis were categorized as articles.
Add "fron matter" to specify zettels category
2021-09-29 22:30:09 +02:00

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title = "Position control in lithographic equipment"
author = ["Thomas Dehaeze"]
draft = true
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Tags
: [Multivariable Control]({{<relref "multivariable_control.md#" >}}), [Positioning Stations]({{<relref "positioning_stations.md#" >}})
Reference
: ([Butler 2011](#org9e15931))
Author(s)
: Butler, H.
Year
: 2011
## Bibliography {#bibliography}
<a id="org9e15931"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):2847. <https://doi.org/10.1109/mcs.2011.941882>.