Thomas Dehaeze
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PhDthesis were categorized as articles. Add "fron matter" to specify zettels category
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+++ title = "Position control in lithographic equipment" author = ["Thomas Dehaeze"] draft = true +++
- Tags
- [Multivariable Control]({{<relref "multivariable_control.md#" >}}), [Positioning Stations]({{<relref "positioning_stations.md#" >}})
- Reference
- (Butler 2011)
- Author(s)
- Butler, H.
- Year
- 2011
Bibliography
Butler, Hans. 2011. “Position Control in Lithographic Equipment.” IEEE Control Systems 31 (5):28–47. https://doi.org/10.1109/mcs.2011.941882.