2020-06-03 22:43:54 +02:00
+++
title = "Position control in lithographic equipment"
author = ["Thomas Dehaeze"]
2021-09-29 22:30:09 +02:00
draft = true
2020-06-03 22:43:54 +02:00
+++
Tags
2021-09-29 22:30:09 +02:00
: [Multivariable Control ]({{<relref "multivariable_control.md#" >}} ), [Positioning Stations ]({{<relref "positioning_stations.md#" >}} )
2020-06-03 22:43:54 +02:00
Reference
2021-09-29 22:30:09 +02:00
: ([Butler 2011](#org9e15931))
2020-06-03 22:43:54 +02:00
Author(s)
: Butler, H.
Year
: 2011
2020-08-17 23:00:20 +02:00
2021-05-02 20:37:00 +02:00
2020-08-17 23:00:20 +02:00
## Bibliography {#bibliography}
2021-09-29 22:30:09 +02:00
< a id = "org9e15931" ></ a > Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28– < https: // doi . org / 10 . 1109 / mcs . 2011 . 941882 > .
