digital-brain/content/zettels/position_sensors.md

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title = "Position Sensors"
author = ["Thomas Dehaeze"]
draft = false
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Tags
: [Inertial Sensors]({{<relref "inertial_sensors.md#" >}}), [Force Sensors]({{<relref "force_sensors.md#" >}}), [Sensor Fusion]({{<relref "sensor_fusion.md#" >}}), [Signal Conditioner]({{<relref "signal_conditioner.md#" >}}), [Signal to Noise Ratio]({{<relref "signal_to_noise_ratio.md#" >}})
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## Types of Positioning sensors {#types-of-positioning-sensors}
High precision positioning sensors include:
- [Interferometers]({{<relref "interferometers.md#" >}})
- [Capacitive Sensors]({{<relref "capacitive_sensors.md#" >}})
- [LVDT]({{<relref "linear_variable_differential_transformers.md#" >}})
- [Eddy Current Sensors]({{<relref "eddy_current_sensors.md#" >}})
- [Encoders]({{<relref "encoders.md#" >}})
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## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
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- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#org654bd0b)) ([Notes]({{<relref "fleming13_review_nanom_resol_posit_sensor.md#" >}}))
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<a id="table--tab:characteristics-relative-sensor"></a>
<div class="table-caption">
<span class="table-number"><a href="#table--tab:characteristics-relative-sensor">Table 1</a></span>:
Characteristics of relative measurement sensors <a class='org-ref-reference' href="#collette11_review">collette11_review</a>
</div>
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| Technology | Frequency | Resolution | Range | T Range |
|----------------|------------|----------------|--------------|-------------|
| LVDT | DC-200 Hz | 10 nm rms | 1-10 mm | -50,100 °C |
| Eddy current | 5 kHz | 0.1-100 nm rms | 0.5-55 mm | -50,100 °C |
| Capacitive | DC-100 kHz | 0.05-50 nm rms | 50 nm - 1 cm | -40,100 °C |
| Interferometer | 300 kHz | 0.1 nm rms | 10 cm | -250,100 °C |
| Encoder | DC-1 MHz | 1 nm rms | 7-27 mm | 0,40 °C |
| Bragg Fibers | DC-150 Hz | 0.3 nm rms | 3.5 cm | -30,80 °C |
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<a id="table--tab:summary-position-sensors"></a>
<div class="table-caption">
<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a></span>:
Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of 100um and a first order bandwidth of \(1 kHz\) <a class='org-ref-reference' href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>
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</div>
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| Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy |
|----------------|--------------------------------|---------|------------|----------|-----------|
| Metal foil | \\(10-500 \mu m\\) | 230 ppm | 23 nm | 1-10 kHz | 1% FSR |
| Piezoresistive | \\(1-500 \mu m\\) | 5 ppm | 0.5 nm | >100 kHz | 1% FSR |
| Capacitive | \\(10 \mu m\\) to \\(10 mm\\) | 24 ppm | 2.4 nm | 100 kHz | 0.1% FSR |
| Electrothermal | \\(10 \mu m\\) to \\(1 mm\\) | 100 ppm | 10 nm | 10 kHz | 1% FSR |
| Eddy current | \\(100 \mu m\\) to \\(80 mm\\) | 10 ppm | 1 nm | 40 kHz | 0.1% FSR |
| LVDT | \\(0.5-500 mm\\) | 10 ppm | 5 nm | 1 kHz | 0.25% FSR |
| Interferometer | Meters | | 0.5 nm | >100kHz | 1 ppm FSR |
| Encoder | Meters | | 6 nm | >100kHz | 5 ppm FSR |
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Capacitive Sensors and Eddy-Current sensors are compare [here](https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors/).
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<a id="orgff7dc3a"></a>
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{{< figure src="/ox-hugo/position_sensors_thurner15.png" caption="Figure 1: Overview of range and precision of different position displacement sensors. Taken from <sup id=\"53230532ada812541a7cd984b3aa2662\"><a href=\"#thurner15_fiber_based_distan_sensin_inter\" title=\"Thurner, Quacquarelli, Braun, Pierre-Fran\ccois, Dal Savio, Karrai \&amp; Khaled, Fiber-Based Distance Sensing Interferometry, {Applied optics}, v(10), 3051--3063 (2015).\">thurner15_fiber_based_distan_sensin_inter</a></sup>" >}}
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## Bibliography {#bibliography}
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<a id="org654bd0b"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):10626. <https://doi.org/10.1016/j.sna.2012.10.016>.