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+++
title = "Stewart Platforms"
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author = ["Dehaeze Thomas"]
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draft = false
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category = "equipment"
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+++
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Tags
:
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## Manufacturers {#manufacturers}
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| Manufacturers | Country |
|------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|---------|
| [PI ](https://www.physikinstrumente.com/en/products/parallel-kinematic-hexapods/ ) | Germany |
| [Newport ](https://www.newport.com/search/?q1=hexapod%3Arelevance%3Acompatibility%3AMETRIC%3AisObsolete%3Afalse%3A-excludeCountries%3AFR%3AnpCategory%3Ahexapods&ajax&text=hexapod ) | USA |
| [Symetrie ](https://symetrie.fr/en/hexapods-en/positioning-hexapods/ ) | France |
| [CSA Engineering ](https://www.csaengineering.com/products-services/hexapod-positioning-systems/hexapod-models.html ) | USA |
| [Aerotech ](https://www.aerotech.com/product-catalog/hexapods.aspx ) | USA |
| [SmarAct ](https://www.smaract.com/smarpod ) | Germany |
| [Gridbots ](https://www.gridbots.com/hexamove.html ) | India |
| [Alio Industries ](https://www.alioindustries.com/ ) | USA |
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| [MOOG ](https://www.moog.com/products/hexapods-positioning-systems.html ) | |
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## Stewart Platforms at ESRF {#stewart-platforms-at-esrf}
| Beamline | Manufacturer | Comments |
|----------|--------------|-----------------------------------|
| ID11 | Symetrie | Small, Piezo based |
| ID31 | Symetrie | Large Stroke, Encoders, DC motors |
| ID01 | PI | |
| ID16a | ESRF | Piezo (PI) |
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## Flexure Jointed Stewart Platforms {#flexure-jointed-stewart-platforms}
Papers by J.E. McInroy:
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- < obrien98_lesson >
- < mcinroy99_precis_fault_toler_point_using_stewar_platf >
- < mcinroy99_dynam >
- < mcinroy00_desig_contr_flexur_joint_hexap >
- < chen00_ident_decoup_contr_flexur_joint_hexap >
- < mcinroy02_model_desig_flexur_joint_stewar >
- < li01_simul_vibrat_isolat_point_contr >
- < lin03_adapt_sinus_distur_cancel_precis >
- < jafari03_orthog_gough_stewar_platf_microm >
- < chen04_decoup_contr_flexur_joint_hexap >
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Main advantage of flexure jointed Stewart platforms over conventional (long stroke) ones:
- Linear behavior
- Constant Jacobian matrices along all stroke
- No singularity
- Easier to decouple the dynamics that works for all the stroke
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## Built Stewart PLatforms {#built-stewart-platforms}
< span class = "org-target" id = "org-target--sec-built" > < / span >
**Actuators**:
- Short Stroke: PZT, Voice Coil, Magnetostrictive
- Long Stroke: DC, AC, Servo + Ball Screw, Inchworm
**Joints**:
- Flexible: usually for short stroke
- Conventional
**Sensors**:
- Force Sensors
- Relative Motion Sensors: Encoders, LVDT
- Strain Gauge
- Inertial Sensors (Geophone, Accelerometer)
- External Metrology
### Short Stroke {#short-stroke}
< span class = "org-target" id = "org-target--sec-built-short-stroke" > < / span >
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| University | Figure | Configuration | Joints | Actuators | Sensors | Application | Link to bibliography |
|----------------|--------------------------------------|-------------------|-------------|--------------------------|------------------------------------------------------------|------------------------------|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| JPL | [5 ](#figure--fig:stewart-jpl ) | Cubic | Flexible | Voice Coil (0.5 mm) | Force (collocated) | | < spanos95_soft_activ_vibrat_isolat > , < rahman98_multiax > Vibration Isolation (Space) |
| Washinton, JPL | [16 ](#figure--fig:stewart-ht-uw ) | Cubic | Elastomers | Voice Coil (10 mm) | Force, LVDT, Geophones | Isolation + Pointing (Space) | < thayer98_stewar > , < thayer02_six_axis_vibrat_isolat_system > , < hauge04_sensor_contr_space_based_six > |
| Wyoming | [17 ](#figure--fig:stewart-uw-gsp ) | Cubic (CoM=CoK) | Flexible | Voice Coil | Force | | < mcinroy99_dynam > , < mcinroy99_precis_fault_toler_point_using_stewar_platf > , < mcinroy00_desig_contr_flexur_joint_hexap > , < li01_simul_vibrat_isolat_point_contr > , < jafari03_orthog_gough_stewar_platf_microm > |
| Brussels | [21 ](#figure--fig:stewart-ulb-vc ) | Cubic | Flexible | Voice Coil | Force | Vibration Isolation | < hanieh03_activ_stewar > , < preumont07_six_axis_singl_stage_activ > |
| SRDC | [2 ](#figure--fig:stewart-naval ) | Not Cubic | Ball joints | Voice Coil (10 mm) | | | < taranti01_effic_algor_vibrat_suppr > |
| SRDC | [18 ](#figure--fig:stewart-pph ) | Non-Cubic | Flexible | Voice Coil | Accelerometers, External metrology: Eddy Current + optical | Pointing | < chen03_payload_point_activ_vibrat_isolat > |
| Harbin (China) | [13 ](#figure--fig:stewart-tang18 ) | Cubic | Flexible | Voice Coil | Accelerometer in each leg | | < chi15_desig_exper_study_vcm_based > , < tang18_decen_vibrat_contr_voice_coil > , < jiao18_dynam_model_exper_analy_stewar > |
| Einhoven | [9 ](#figure--fig:stewart-beijen ) | Almost cubic | Flexible | Voice Coil | Force Sensor + Accelerometer | Vibration Isolation | < beijen18_self_tunin_mimo_distur_feedf > , < tjepkema12_activ_ph > |
| JPL | [4 ](#figure--fig:stewart-geng ) | Cubic (6-UPU) | Flexible | Magnetostrictive | Force (collocated), Accelerometers | Vibration Isolation | < geng93_six_degree_of_freed_activ > , < geng94_six_degree_of_freed_activ > , < geng95_intel_contr_system_multip_degree > |
| China | [10 ](#figure--fig:stewart-zhang11 ) | Non-cubic | Flexible | Magnetostrictive | Inertial | | < zhang11_six_dof > |
| Brussels | [20 ](#figure--fig:stewart-ulb-pz ) | Cubic | Flexible | Piezoelectric, Amplified | Piezo Force | Active Damping | < abu02_stiff_soft_stewar_platf_activ > |
| SRDC | [19 ](#figure--fig:stewart-uqp ) | Cubic | | Piezoelectric (50 um) | Geophone | Vibration | < agrawal04_algor_activ_vibrat_isolat_spacec > |
| Taiwan | [14 ](#figure--fig:stewart-nanoscale ) | Cubic | Flexible | Piezoelectric (120 um) | External capacitive | | < ting06_desig_stewar_nanos_platf > , < ting13_compos_contr_desig_stewar_nanos_platf > |
| Taiwan | [15 ](#figure--fig:stewart-ting07 ) | Non-Cubic | Flexible | Piezoelectric (160 um) | External capacitive (LION) | | < ting07_measur_calib_stewar_microm_system > |
| Harbin (China) | [12 ](#figure--fig:stewart-du14 ) | 6-SPS (Optimized) | Flexible | Piezoelectric | Strain Gauge | | < du14_piezo_actuat_high_precis_flexib > |
| Japan | [6 ](#figure--fig:stewart-furutani ) | Non-Cubic | Flexible | Piezoelectric (16 um) | Eddy Current Displacement Sensors | Cutting machine | < furutani04_nanom_cuttin_machin_using_stewar > |
| China | [11 ](#figure--fig:stewart-yang19 ) | 6-UPS (Cubic?) | Flexible | Piezoelectric | Force, Position | | < yang19_dynam_model_decoup_contr_flexib > |
| Shangai | [8 ](#figure--fig:stewart-wang16 ) | Cubic | Flexible | Piezoelectric | Force Sensor + Accelerometer | | < wang16_inves_activ_vibrat_isolat_stewar > |
| Matra (France) | [3 ](#figure--fig:stewart-mais ) | Cubic | Flexible | Piezoelectric (25 um) | Piezo force sensors | Vibration control | < defendini00_techn > |
| Japan | [7 ](#figure--fig:stewart-torii ) | Non-Cubic | Flexible | Inchworm | | | < torii12_small_size_self_propel_stewar_platf > |
| Netherlands | [1 ](#figure--fig:stewart-naves ) | Non-Cubic | Flexible | 3-phase rotary motor | Rotary Encoders | | < &naves20_desig; & naves20_t_flex> |
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< a id = "figure--fig:stewart-naves" > < / a >
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{{< figure src = "/ox-hugo/stewart_naves.jpg" caption = "<span class= \"figure-number \">Figure 1: </span>T-flex <&naves20_desig>" > }}
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< a id = "figure--fig:stewart-naval" > < / a >
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{{< figure src = "/ox-hugo/stewart_naval.jpg" caption = "<span class= \"figure-number \">Figure 2: </span><&taranti01_effic_algor_vibrat_suppr>" > }}
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< a id = "figure--fig:stewart-mais" > < / a >
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{{< figure src = "/ox-hugo/stewart_mais.jpg" caption = "<span class= \"figure-number \">Figure 3: </span><&defendini00_techn>" > }}
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< a id = "figure--fig:stewart-geng" > < / a >
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{{< figure src = "/ox-hugo/stewart_geng.jpg" caption = "<span class= \"figure-number \">Figure 4: </span><&geng94_six_degree_of_freed_activ>" > }}
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< a id = "figure--fig:stewart-jpl" > < / a >
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{{< figure src = "/ox-hugo/stewart_jpl.jpg" caption = "<span class= \"figure-number \">Figure 5: </span><&spanos95_soft_activ_vibrat_isolat>" > }}
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< a id = "figure--fig:stewart-furutani" > < / a >
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{{< figure src = "/ox-hugo/stewart_furutani.jpg" caption = "<span class= \"figure-number \">Figure 6: </span><&furutani04_nanom_cuttin_machin_using_stewar>" > }}
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< a id = "figure--fig:stewart-torii" > < / a >
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{{< figure src = "/ox-hugo/stewart_torii.jpg" caption = "<span class= \"figure-number \">Figure 7: </span><&torii12_small_size_self_propel_stewar_platf>" > }}
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< a id = "figure--fig:stewart-wang16" > < / a >
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{{< figure src = "/ox-hugo/stewart_wang16.jpg" caption = "<span class= \"figure-number \">Figure 8: </span><&wang16_inves_activ_vibrat_isolat_stewar>" > }}
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< a id = "figure--fig:stewart-beijen" > < / a >
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{{< figure src = "/ox-hugo/stewart_beijen.jpg" caption = "<span class= \"figure-number \">Figure 9: </span><&beijen18_self_tunin_mimo_distur_feedf>" > }}
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< a id = "figure--fig:stewart-zhang11" > < / a >
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{{< figure src = "/ox-hugo/stewart_zhang11.jpg" caption = "<span class= \"figure-number \">Figure 10: </span><&zhang11_six_dof>" > }}
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< a id = "figure--fig:stewart-yang19" > < / a >
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{{< figure src = "/ox-hugo/stewart_yang19.jpg" caption = "<span class= \"figure-number \">Figure 11: </span><&yang19_dynam_model_decoup_contr_flexib>" > }}
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< a id = "figure--fig:stewart-du14" > < / a >
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{{< figure src = "/ox-hugo/stewart_du14.jpg" caption = "<span class= \"figure-number \">Figure 12: </span><&du14_piezo_actuat_high_precis_flexib>" > }}
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< a id = "figure--fig:stewart-tang18" > < / a >
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{{< figure src = "/ox-hugo/stewart_tang18.jpg" caption = "<span class= \"figure-number \">Figure 13: </span><&tang18_decen_vibrat_contr_voice_coil>" > }}
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< a id = "figure--fig:stewart-nanoscale" > < / a >
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{{< figure src = "/ox-hugo/stewart_nanoscale.jpg" caption = "<span class= \"figure-number \">Figure 14: </span><&ting06_desig_stewar_nanos_platf>" > }}
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< a id = "figure--fig:stewart-ting07" > < / a >
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{{< figure src = "/ox-hugo/stewart_ting07.jpg" caption = "<span class= \"figure-number \">Figure 15: </span><&ting07_measur_calib_stewar_microm_system>" > }}
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< a id = "figure--fig:stewart-ht-uw" > < / a >
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{{< figure src = "/ox-hugo/stewart_ht_uw.jpg" caption = "<span class= \"figure-number \">Figure 16: </span>Hood Technology Corporation (HT) and the University of Washington (UW) have designed and tested a unique hexapod design for spaceborne interferometry missions <&thayer02_six_axis_vibrat_isolat_system>" > }}
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< a id = "figure--fig:stewart-uw-gsp" > < / a >
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{{< figure src = "/ox-hugo/stewart_uw_gsp.jpg" caption = "<span class= \"figure-number \">Figure 17: </span>UW GSP: Mutually Orthogonal Stewart Geometry <&li01_simul_fault_vibrat_isolat_point>" > }}
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< a id = "figure--fig:stewart-pph" > < / a >
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{{< figure src = "/ox-hugo/stewart_pph.jpg" caption = "<span class= \"figure-number \">Figure 18: </span>Precision Pointing Hexapod (PPH) <&chen03_payload_point_activ_vibrat_isolat>" > }}
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< a id = "figure--fig:stewart-uqp" > < / a >
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{{< figure src = "/ox-hugo/stewart_uqp.jpg" caption = "<span class= \"figure-number \">Figure 19: </span>Ultra Quiet Platform (UQP) <&agrawal04_algor_activ_vibrat_isolat_spacec>" > }}
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< a id = "figure--fig:stewart-ulb-pz" > < / a >
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{{< figure src = "/ox-hugo/stewart_ulb_pz.jpg" caption = "<span class= \"figure-number \">Figure 20: </span>ULB - Piezoelectric <&abu02_stiff_soft_stewar_platf_activ>" > }}
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< a id = "figure--fig:stewart-ulb-vc" > < / a >
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{{< figure src = "/ox-hugo/stewart_ulb_vc.jpg" caption = "<span class= \"figure-number \">Figure 21: </span>ULB - Voice Coil <&hanieh03_activ_stewar>" > }}
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### Long Stroke {#long-stroke}
< span class = "org-target" id = "org-target--sec-built-long-stroke" > < / span >
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| University | Figure | Configuration | Joints | Actuators | Sensors | Link to bibliography |
|----------------|-----------------------------------|---------------|--------------|-------------------------|--------------------------|---------------------------------------------------------------------------------------------------------------------------------------------------------|
| Japan | [22 ](#figure--fig:stewart-cleary ) | 6-UPS | Conventional | DC, gear + rack pinion | Encoder, 7um res | < cleary91_protot_paral_manip > |
| Seoul | [23 ](#figure--fig:stewart-kim00 ) | Non-Cubic | Conventional | Hydraulic | LVDT | < kim00_robus_track_contr_desig_dof_paral_manip > |
| Xidian (China) | [24 ](#figure--fig:stewart-su04 ) | Non-Cubic | Conventional | Servo Motor + Screwball | Encoder | < su04_distur_rejec_high_precis_motion > |
| Czech | [25 ](#figure--fig:stewart-czech ) | 6-UPS | Conventional | DC, Ball Screw | Absolute Linear position | < brezina08_ni_labview_matlab_simmec_stewar_platf_desig > , < houska10_desig_implem_absol_linear_posit > , < brezina10_contr_desig_stewar_platf_linear_actuat > |
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< a id = "figure--fig:stewart-cleary" > < / a >
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{{< figure src = "/ox-hugo/stewart_cleary.jpg" caption = "<span class= \"figure-number \">Figure 22: </span><&cleary91_protot_paral_manip>" > }}
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< a id = "figure--fig:stewart-kim00" > < / a >
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{{< figure src = "/ox-hugo/stewart_kim00.jpg" caption = "<span class= \"figure-number \">Figure 23: </span><&kim01_six>" > }}
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< a id = "figure--fig:stewart-su04" > < / a >
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{{< figure src = "/ox-hugo/stewart_su04.jpg" caption = "<span class= \"figure-number \">Figure 24: </span><&su04_distur_rejec_high_precis_motion>" > }}
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< a id = "figure--fig:stewart-czech" > < / a >
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{{< figure src = "/ox-hugo/stewart_czech.jpg" caption = "<span class= \"figure-number \">Figure 25: </span>Stewart platform from Brno University (Czech) <&brezina08_ni_labview_matlab_simmec_stewar_platf_desig>" > }}
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## Bibliography {#bibliography}
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< . / biblio / references . bib >
