5.1 KiB
- Measurements of the dynamics of the station
- Measurements of perturbations
- Other measurements - Instrumentation
- Ressources
#+TITLE:Measurement of the ID31 Micro-Station
This web-page gathers all the measurements done on the ID31 Micro Station.
Measurements of the dynamics of the station
Measurement 1
Notes
| Date | 2017-11-17 |
| Sensors | Accelerometers |
| Excitation | Instrumented Hammer |
| Location | Laboratory |
Dynamics of the station is evaluated using instrumented hammer and accelerometers fixed on each stage.
Goal
- Obtain a first estimation of resonance frequencies
Results
- Resonances have been identified at 45Hz and 75Hz
- However, the quality of the measurements are bad at low frequency
- New measurements should be done with Geophones
Measurement 2
Notes
| Date | 2018-01-12 |
| Sensors | Geophones |
| Excitation | Instrumented Hammer |
| Location | Laboratory |
| Notes | Unglued Granite |
Goal
Obtain better coherence at low frequency.
Results
- Resonances at 42Hz, 70Hz and 125Hz have been identified
- The coherence is much better than when using accelerometers
TODO Measurement 3
Notes
| Date | 2018-10-12 |
| Sensors | Geophones |
| Excitation | Instrumented Hammer |
| Location | Experimental Hutch |
Goal
The station is now installed on the experimental hutch with a glued granite (final location). The station is identified again.
Results
Measurements of perturbations
- Measurement of the vibrations induced by the rotation of the slip-ring and spindle
- Measurement of the electrical noise induced by the slip-ring
- Ground motion measurements
- Static guiding errors
- Disturbance induced by the control system of each stage
- Vibrations due to Ty scans
Noise coming from the control loop of each stage
Notes
| Date | 2018-10-15 |
| Sensors | Geophones |
| Location | Experimental Hutch |
Goal
The objective is to estimate how much perturbation is injected in the system by the control systems of each stages of the micro station.
Geophones are located on the structure. Each stage is turned on and off. The signals of the geophones are then compared when the stage is on and off.
Results
- The translation stage seems to have effect on the tilt stage at 20Hz.
- The Tilt stage and the Hexapod control systems have no effect on the motion of the other stages.
- The spindle stage control system seems to induce a motion of the Hexapod on the Z direction around 20Hz.
Static guiding error estimation
Notes
| Date | 2019-01-09 |
| Sensors | Interferometer |
| Location | Experimental Hutch |
Each stage is statically moved of all its stroke on after the other. A metrology element is located at the sample position and its motion is measured in translations and rotations. For each small displacement, the stage is stopped and the motion of the sample is recorded and averaged.
Goal
The goal is to estimate the guiding errors of each stage.
Results
Spindle Measurements
Notes
| Date | 2017-04-25 |
| Location | PEL Lab |
Goal
The goal is to estimate all the error motions induced by the Spindle