digital-brain/content/article/butler11_posit_contr_lithog_equip.md

+++ title = "Position control in lithographic equipment" author = ["Thomas Dehaeze"] draft = false +++

Tags

[Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})

Reference

^{(Hans Butler, 2011)}

Author(s)

Butler, H.

Year

2011

Bibliography

Butler, H., Position control in lithographic equipment, IEEE Control Systems, 31(5), 28–47 (2011). http://dx.doi.org/10.1109/mcs.2011.941882 ↩