+++
title = "Position control in lithographic equipment"
author = ["Thomas Dehaeze"]
draft = false
+++

Tags
: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})

Reference
: <sup id="6a014e3a2ee3e41d20bd0644654c56f0"><a class="reference-link" href="#butler11_posit_contr_lithog_equip" title="Hans Butler, Position Control in Lithographic Equipment, {IEEE Control Systems}, v(5), 28-47 (2011).">(Hans Butler, 2011)</a></sup>

Author(s)
: Butler, H.

Year
: 2011

# Bibliography
<a class="bibtex-entry" id="butler11_posit_contr_lithog_equip">Butler, H., *Position control in lithographic equipment*, IEEE Control Systems, *31(5)*, 28–47 (2011).  http://dx.doi.org/10.1109/mcs.2011.941882</a> [↩](#6a014e3a2ee3e41d20bd0644654c56f0)