digital-brain/content/zettels/position_sensors.md

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+++ title = "Position Sensors" author = ["Thomas Dehaeze"] draft = false +++

Tags
[Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}})

Reviews of Relative Position Sensors

  • Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Andrew Fleming, 2013) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))

Table 1: Characteristics of relative measurement sensors collette11_review
Technology Frequency Resolution Range T Range
LVDT DC-200 Hz 10 nm rms 1-10 mm -50,100 °C
Eddy current 5 kHz 0.1-100 nm rms 0.5-55 mm -50,100 °C
Capacitive DC-100 kHz 0.05-50 nm rms 50 nm - 1 cm -40,100 °C
Interferometer 300 kHz 0.1 nm rms 10 cm -250,100 °C
Encoder DC-1 MHz 1 nm rms 7-27 mm 0,40 °C
Bragg Fibers DC-150 Hz 0.3 nm rms 3.5 cm -30,80 °C

Table 2: Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) fleming13_review_nanom_resol_posit_sensor
Sensor Type Range DNR Resolution Max. BW Accuracy
Metal foil \(10-500 \mu m\) 230 ppm 23 nm 1-10 kHz 1% FSR
Piezoresistive \(1-500 \mu m\) 5 ppm 0.5 nm >100 kHz 1% FSR
Capacitive \(10 \mu m\) to \(10 mm\) 24 ppm 2.4 nm 100 kHz 0.1% FSR
Electrothermal \(10 \mu m\) to \(1 mm\) 100 ppm 10 nm 10 kHz 1% FSR
Eddy current \(100 \mu m\) to \(80 mm\) 10 ppm 1 nm 40 kHz 0.1% FSR
LVDT \(0.5-500 mm\) 10 ppm 5 nm 1 kHz 0.25% FSR
Interferometer Meters 0.5 nm >100kHz 1 ppm FSR
Encoder Meters 6 nm >100kHz 5 ppm FSR

Strain Gauge

Capacitive Sensor

Description:

Manufacturers Links
Micro Sense link
Micro-Epsilon link
PI link
Unipulse link
Lion-Precision link

Inductive Sensor (Eddy Current)

Manufacturers Links
Micro-Epsilon link
Lion Precision link

Inductive Sensor (LVDT)

Manufacturers Links
Micro-Epsilon link
Keyence link

Interferometers

Manufacturers Links
Attocube link
Zygo link
Smaract link
Qutools link
Renishaw link
Sios link
Keysight link
Table 3: Characteristics of Environmental Units
Temperature (\(\pm\ ^oC\)) Pressure (\(\pm\ hPa\)) Humidity \(\pm\% RH\) Wavelength Accuracy (\(\pm\ \text{ppm}\))
Attocube 0.1 1 2 0.5
Renishaw 0.2 1 6 1
Picoscale 0.2 2 2 1

(Yoon-Soo Jang & Seung-Woo Kim, 2017)

{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}

Fiber Optic Displacement Sensor

Manufacturers Links
Unipulse link

Bibliography

Fleming, A. J., A review of nanometer resolution position sensors: operation and performance, Sensors and Actuators A: Physical, 190(nil), 106126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016

Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., Review of sensors for low frequency seismic vibration measurement (2011).

Jang, Y., & Kim, S., Compensation of the refractive index of air in laser interferometer for distance measurement: a review, International Journal of Precision Engineering and Manufacturing, 18(12), 18811890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y

  • [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
  • [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
  • [Collocated Control]({{< relref "collocated_control" >}})
  • [Inertial Sensors]({{< relref "inertial_sensors" >}})