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+++ title = "A survey of control issues in nanopositioning" author = ["Thomas Dehaeze"] draft = false +++

Tags :

Reference
(Devasia {\it et al.}, 2007)
Author(s)
Devasia, S., Eleftheriou, E., & Moheimani, S. R.
Year
2007
  • Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
  • Piezoelectric actuators: Creep, Hysteresis, Vibrations, Modeling errors
  • Interesting analysis about Bandwidth-Precision-Range tradeoffs
  • Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls

{{< figure src="/ox-hugo/devasia07_piezoelectric_tradeoff.png" caption="Figure 1: Tradeoffs between bandwidth, precision and range" >}}

Bibliography

Devasia, S., Eleftheriou, E., & Moheimani, S. R., A survey of control issues in nanopositioning, IEEE Transactions on Control Systems Technology, 15(5), 802–823 (2007). ↩