+++
title = "A survey of control issues in nanopositioning"
author = ["Thomas Dehaeze"]
draft = false
+++
Tags
:
Reference
: (Devasia {\it et al.}, 2007)
Author(s)
: Devasia, S., Eleftheriou, E., & Moheimani, S. R.
Year
: 2007
- Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
- Piezoelectric actuators: Creep, Hysteresis, Vibrations, Modeling errors
- Interesting analysis about Bandwidth-Precision-Range tradeoffs
- Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls
{{< figure src="/ox-hugo/devasia07_piezoelectric_tradeoff.png" caption="Figure 1: Tradeoffs between bandwidth, precision and range" >}}
# Bibliography
Devasia, S., Eleftheriou, E., & Moheimani, S. R., *A survey of control issues in nanopositioning*, IEEE Transactions on Control Systems Technology, *15(5)*, 802–823 (2007). [↩](#8ce53b8a612ce8ae3eb616cd1ed05630)