Reviews of Relative Position Sensors

Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ^{(Andrew Fleming, 2013)} ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))

Table 1: Characteristics of relative measurement sensors collette11_review

Technology	Frequency	Resolution	Range	T Range
LVDT	DC-200 Hz	10 nm rms	1-10 mm	-50,100 °C
Eddy current	5 kHz	0.1-100 nm rms	0.5-55 mm	-50,100 °C
Capacitive	DC-100 kHz	0.05-50 nm rms	50 nm - 1 cm	-40,100 °C
Interferometer	300 kHz	0.1 nm rms	10 cm	-250,100 °C
Encoder	DC-1 MHz	1 nm rms	7-27 mm	0,40 °C
Bragg Fibers	DC-150 Hz	0.3 nm rms	3.5 cm	-30,80 °C

Table 2: Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) fleming13_review_nanom_resol_posit_sensor

Sensor Type	Range	DNR	Resolution	Max. BW	Accuracy
Metal foil	\(10-500 \mu m\)	230 ppm	23 nm	1-10 kHz	1% FSR
Piezoresistive	\(1-500 \mu m\)	5 ppm	0.5 nm	>100 kHz	1% FSR
Capacitive	\(10 \mu m\) to \(10 mm\)	24 ppm	2.4 nm	100 kHz	0.1% FSR
Electrothermal	\(10 \mu m\) to \(1 mm\)	100 ppm	10 nm	10 kHz	1% FSR
Eddy current	\(100 \mu m\) to \(80 mm\)	10 ppm	1 nm	40 kHz	0.1% FSR
LVDT	\(0.5-500 mm\)	10 ppm	5 nm	1 kHz	0.25% FSR
Interferometer	Meters		0.5 nm	>100kHz	1 ppm FSR
Encoder	Meters		6 nm	>100kHz	5 ppm FSR

Strain Gauge

Capacitive Sensor

Description:

Manufacturers	Links
Micro Sense	link
Micro-Epsilon	link
PI	link
Unipulse	link
Lion-Precision	link

Inductive Sensor (Eddy Current)

Manufacturers	Links
Micro-Epsilon	link
Lion Precision	link

Inductive Sensor (LVDT)

Manufacturers	Links
Micro-Epsilon	link
Keyence	link

Interferometers

Manufacturers	Links
Attocube	link
Zygo	link
Smaract	link
Qutools	link
Renishaw	link
Sios	link
Keysight	link

Table 3: Characteristics of Environmental Units

	Temperature (\(\pm\ ^oC\))	Pressure (\(\pm\ hPa\))	Humidity \(\pm\% RH\)	Wavelength Accuracy (\(\pm\ \text{ppm}\))
Attocube	0.1	1	2	0.5
Renishaw	0.2	1	6	1
Picoscale	0.2	2	2	1

^{(Yoon-Soo Jang & Seung-Woo Kim, 2017)}

{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}

Fiber Optic Displacement Sensor

Manufacturers	Links
Unipulse	link

Bibliography

Fleming, A. J., A review of nanometer resolution position sensors: operation and performance, Sensors and Actuators A: Physical, 190(nil), 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 ↩

Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., Review of sensors for low frequency seismic vibration measurement (2011). ↩

Jang, Y., & Kim, S., Compensation of the refractive index of air in laser interferometer for distance measurement: a review, International Journal of Precision Engineering and Manufacturing, 18(12), 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y ↩

Backlinks

[A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
[Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
[Collocated Control]({{< relref "collocated_control" >}})
[Inertial Sensors]({{< relref "inertial_sensors" >}})

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