528 B
528 B
+++ title = "Position control in lithographic equipment" author = ["Thomas Dehaeze"] draft = false +++
- Tags
- [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})
- Reference
- (Butler 2011)
- Author(s)
- Butler, H.
- Year
- 2011
Bibliography
Butler, Hans. 2011. “Position Control in Lithographic Equipment.” IEEE Control Systems 31 (5):28–47. https://doi.org/10.1109/mcs.2011.941882.