digital-brain/content/article/butler11_posit_contr_lithog_equip.md

+++
title = "Position control in lithographic equipment"
author = ["Thomas Dehaeze"]
draft = false
+++

Tags
: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})

Reference
: ([Butler 2011](#org338ffef))

Author(s)
: Butler, H.

Year
: 2011


## Bibliography {#bibliography}

<a id="org338ffef"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.
-												Update many posts

											
										
										
											2020-06-03 22:43:54 +02:00
+								+++
 								title = "Position control in lithographic equipment"
 								author = ["Thomas Dehaeze"]
 								draft = false
 								+++
 								Tags
 								: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})
 								Reference
-												bibliography: => #+BIBLIOGRAPHY: here

											
										
										
											2021-05-02 22:18:30 +02:00
+								: ([Butler 2011](#org338ffef))
-												Update many posts

											
										
										
											2020-06-03 22:43:54 +02:00
 								Author(s)
 								: Butler, H.
 								Year
 								: 2011
-												Update all files with new citeproc-org package

											
										
										
											2020-08-17 23:00:20 +02:00
-												Update Content - 2021-05-02

											
										
										
											2021-05-02 20:37:00 +02:00
-												Update all files with new citeproc-org package

											
										
										
											2020-08-17 23:00:20 +02:00
+								## Bibliography {#bibliography}
-												bibliography: => #+BIBLIOGRAPHY: here

											
										
										
											2021-05-02 22:18:30 +02:00
+								<a id="org338ffef"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.