35 lines
1.3 KiB
Markdown
35 lines
1.3 KiB
Markdown
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title = "A survey of control issues in nanopositioning"
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author = ["Dehaeze Thomas"]
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draft = false
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Tags
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:
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Reference
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: (<a href="#citeproc_bib_item_1">Devasia, Eleftheriou, and Moheimani 2007</a>)
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Author(s)
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: Devasia, S., Eleftheriou, E., & Moheimani, S. R.
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Year
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: 2007
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- Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
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- [Piezoelectric Actuators]({{< relref "piezoelectric_actuators.md" >}}): Creep, Hysteresis, Vibrations, Modeling errors
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- Interesting analysis about Bandwidth-Precision-Range tradeoffs
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- Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls
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<a id="figure--fig:devasia07-piezoelectric-tradeoff"></a>
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{{< figure src="/ox-hugo/devasia07_piezoelectric_tradeoff.png" caption="<span class=\"figure-number\">Figure 1: </span>Tradeoffs between bandwidth, precision and range" >}}
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## Bibliography {#bibliography}
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<style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
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<div class="csl-entry"><a id="citeproc_bib_item_1"></a>Devasia, Santosh, Evangelos Eleftheriou, and SO Reza Moheimani. 2007. “A Survey of Control Issues in Nanopositioning.” <i>Ieee Transactions on Control Systems Technology</i> 15 (5). IEEE: 802–23.</div>
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</div>
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