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title = "A survey of control issues in nanopositioning"
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author = ["Dehaeze Thomas"]
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draft = false
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Tags
:
Reference
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: (< a href = "#citeproc_bib_item_1" > Devasia, Eleftheriou, and Moheimani 2007< / a > )
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Author(s)
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: Devasia, S., Eleftheriou, E., & Moheimani, S. R.
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Year
: 2007
- Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
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- [Piezoelectric Actuators ]({{< relref "piezoelectric_actuators.md" >}} ): Creep, Hysteresis, Vibrations, Modeling errors
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- Interesting analysis about Bandwidth-Precision-Range tradeoffs
- Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls
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< a id = "figure--fig:devasia07-piezoelectric-tradeoff" > < / a >
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{{< figure src = "/ox-hugo/devasia07_piezoelectric_tradeoff.png" caption = "<span class= \"figure-number \">Figure 1: </span>Tradeoffs between bandwidth, precision and range" > }}
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## Bibliography {#bibliography}
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< style > . csl-entry { text-indent : -1.5 em ; margin-left : 1.5 em ; } < / style > < div class = "csl-bib-body" >
< div class = "csl-entry" > < a id = "citeproc_bib_item_1" > < / a > Devasia, Santosh, Evangelos Eleftheriou, and SO Reza Moheimani. 2007. “A Survey of Control Issues in Nanopositioning.” < i > Ieee Transactions on Control Systems Technology< / i > 15 (5). IEEE: 802– 23.< / div >
< / div >