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Backlinks Active isolation and damping of vibrations via stewart platform Active damping based on decoupled collocated control " />
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<h1 class="post-title">Active Damping</h1>
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<li><a href="/paper/hanieh03_activ_stewar/">Active isolation and damping of vibrations via stewart platform</a></li>
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<li><a href="/paper/holterman05_activ_dampin_based_decoup_colloc_contr/">Active damping based on decoupled collocated control</a></li>
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" /><meta name="description" content="Tags :
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How to choose the correct actuator for my application? For vibration isolation:
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In (Shingo Ito &amp; Georg Schitter, 2016), the effect of the actuator stiffness on the attainable vibration isolation is studied (Notes) Piezoelectric Suppliers Links Cedrat link PI link Piezo System link Noliac link A model of a multi-layer monolithic piezoelectric stack actuator is described in (Fleming, 2010) (Notes)." />
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<h1 class="post-title">Actuators</h1>
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<li><a href="#how-to-choose-the-correct-actuator-for-my-application">How to choose the correct actuator for my application?</a></li>
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<li><a href="#piezoelectric">Piezoelectric</a></li>
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<li><a href="#voice-coil">Voice Coil</a></li>
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<li><a href="#shaker">Shaker</a></li>
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<li><a href="#brush-less-dc-motor">Brush-less DC Motor</a></li>
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<h2 id="how-to-choose-the-correct-actuator-for-my-application">How to choose the correct actuator for my application?</h2>
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<p>For vibration isolation:</p>
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<ul>
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<li>In <sup id="aad53368e29e8a519e2f63857044fa46"><a href="#ito16_compar_class_high_precis_actuat" title="Shingo Ito \& Georg Schitter, Comparison and Classification of High-Precision Actuators Based on Stiffness Influencing Vibration Isolation, {IEEE/ASME Transactions on Mechatronics}, v(2), 1169-1178 (2016).">(Shingo Ito & Georg Schitter, 2016)</a></sup>, the effect of the actuator stiffness on the attainable vibration isolation is studied (<a href="/paper/ito16_compar_class_high_precis_actuat/">Notes</a>)</li>
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<h2 id="piezoelectric">Piezoelectric</h2>
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<td>Cedrat</td>
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<td><a href="http://www.cedrat-technologies.com/">link</a></td>
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</tr>
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<tr>
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<td>PI</td>
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<td><a href="https://www.physikinstrumente.com/en/">link</a></td>
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</tr>
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<tr>
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<td>Piezo System</td>
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<td><a href="https://www.piezosystem.com/products/piezo%5Factuators/stacktypeactuators/">link</a></td>
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</tr>
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<td>Noliac</td>
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<td><a href="http://www.noliac.com/">link</a></td>
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</table>
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<p>A model of a multi-layer monolithic piezoelectric stack actuator is described in <sup id="c823f68dd2a72b9667a61b3c046b4731"><a href="#fleming10_nanop_system_with_force_feedb" title="Fleming, Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control, {IEEE/ASME Transactions on Mechatronics}, v(3), 433-447 (2010).">(Fleming, 2010)</a></sup> (<a href="/paper/fleming10_nanop_system_with_force_feedb/">Notes</a>).</p>
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<td>Geeplus</td>
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<td><a href="https://www.geeplus.com/">link</a></td>
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</tr>
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<tr>
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<td>Maccon</td>
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<td><a href="https://www.maccon.de/en.html">link</a></td>
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<tr>
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<td>TDS PP</td>
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<td><a href="https://www.tds-pp.com/en/">link</a></td>
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<tr>
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<td>H2tech</td>
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<td><a href="https://www.h2wtech.com/">link</a></td>
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</tr>
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<tr>
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<td>PBA Systems</td>
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<td><a href="http://www.pbasystems.com.sg/">link</a></td>
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</tr>
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<tr>
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<td>Celera Motion</td>
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<td><a href="https://www.celeramotion.com/">link</a></td>
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</tr>
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<tr>
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<td>Beikimco</td>
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<td><a href="http://www.beikimco.com/">link</a></td>
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</tr>
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<tr>
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<td>Electromate</td>
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<td><a href="https://www.electromate.com/">link</a></td>
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</tr>
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<tr>
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<td>Magnetic Innovations</td>
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<td><a href="https://www.magneticinnovations.com/">link</a></td>
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</tr>
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</tbody>
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</table>
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<h2 id="shaker">Shaker</h2>
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<table>
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<tr>
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<td>BKSV</td>
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<td><a href="https://www.bksv.com/en/products/shakers-and-exciters">link</a></td>
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</tr>
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<tr>
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<td>Vibration Research</td>
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<td><a href="https://vibrationresearch.com/shakers/">link</a></td>
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</tr>
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<tr>
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<td>Sentek Dynamics</td>
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<td><a href="https://www.sentekdynamics.com/">link</a></td>
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</tr>
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||||
</tbody>
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||||
</table>
|
||||
<p><a href="https://www.bksv.com/en/products/shakers-and-exciters/LDS-shaker-systems/permanent-magnet-shakers/V201">https://www.bksv.com/en/products/shakers-and-exciters/LDS-shaker-systems/permanent-magnet-shakers/V201</a></p>
|
||||
<h2 id="brush-less-dc-motor">Brush-less DC Motor</h2>
|
||||
<ul>
|
||||
<li><sup id="d2e68d39d09d7e8e71ff08a6ebd45400"><a href="#yedamale03_brush_dc_bldc_motor_fundam" title="Yedamale, Brushless Dc (BLDC) Motor Fundamentals, {Microchip Technology Inc}, v(), 3--15 (2003).">(Yedamale, 2003)</a></sup></li>
|
||||
</ul>
|
||||
<p><a href="https://www.electricaltechnology.org/2016/05/bldc-brushless-dc-motor-construction-working-principle.html">https://www.electricaltechnology.org/2016/05/bldc-brushless-dc-motor-construction-working-principle.html</a></p>
|
||||
<h1 id="bibliography">Bibliography</h1>
|
||||
<p><a id="ito16_compar_class_high_precis_actuat"></a>Ito, S., & Schitter, G., <em>Comparison and classification of high-precision actuators based on stiffness influencing vibration isolation</em>, IEEE/ASME Transactions on Mechatronics, <em>21(2)</em>, 1169–1178 (2016). <a href="http://dx.doi.org/10.1109/tmech.2015.2478658">http://dx.doi.org/10.1109/tmech.2015.2478658</a> <a href="#aad53368e29e8a519e2f63857044fa46">↩</a></p>
|
||||
<p><a id="fleming10_nanop_system_with_force_feedb"></a>Fleming, A., <em>Nanopositioning system with force feedback for high-performance tracking and vibration control</em>, IEEE/ASME Transactions on Mechatronics, <em>15(3)</em>, 433–447 (2010). <a href="http://dx.doi.org/10.1109/tmech.2009.2028422">http://dx.doi.org/10.1109/tmech.2009.2028422</a> <a href="#c823f68dd2a72b9667a61b3c046b4731">↩</a></p>
|
||||
<p><a id="yedamale03_brush_dc_bldc_motor_fundam"></a>Yedamale, P., <em>Brushless dc (bldc) motor fundamentals</em>, Microchip Technology Inc, <em>20()</em>, 3–15 (2003). <a href="#d2e68d39d09d7e8e71ff08a6ebd45400">↩</a></p>
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Backlinks A six-axis single-stage active vibration isolator based on stewart platform Nanometre-cutting machine using a stewart-platform parallel mechanism Dynamic modeling and experimental analyses of stewart platform with flexible hinges Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods Investigation on active vibration isolation of a stewart platform with piezoelectric actuators Identification and decoupling control of flexure jointed hexapods " />
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<li><a href="/paper/preumont07_six_axis_singl_stage_activ/">A six-axis single-stage active vibration isolator based on stewart platform</a></li>
|
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<li><a href="/paper/furutani04_nanom_cuttin_machin_using_stewar/">Nanometre-cutting machine using a stewart-platform parallel mechanism</a></li>
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<li><a href="/paper/yang19_dynam_model_decoup_contr_flexib/">Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation</a></li>
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Suppliers PCB link Dynamics and Noise of a piezoelectric force sensor An analysis the dynamics and noise of a piezoelectric force sensor is done in (Fleming, 2010) (Notes).
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<h2 id="dynamics-and-noise-of-a-piezoelectric-force-sensor">Dynamics and Noise of a piezoelectric force sensor</h2>
|
||||
<p>An analysis the dynamics and noise of a piezoelectric force sensor is done in <sup id="c823f68dd2a72b9667a61b3c046b4731"><a href="#fleming10_nanop_system_with_force_feedb" title="Fleming, Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control, {IEEE/ASME Transactions on Mechatronics}, v(3), 433-447 (2010).">(Fleming, 2010)</a></sup> (<a href="/paper/fleming10_nanop_system_with_force_feedb/">Notes</a>).</p>
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<h1 id="bibliography">Bibliography</h1>
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<p><a id="fleming10_nanop_system_with_force_feedb"></a>Fleming, A., <em>Nanopositioning system with force feedback for high-performance tracking and vibration control</em>, IEEE/ASME Transactions on Mechatronics, <em>15(3)</em>, 433–447 (2010). <a href="http://dx.doi.org/10.1109/tmech.2009.2028422">http://dx.doi.org/10.1109/tmech.2009.2028422</a> <a href="#c823f68dd2a72b9667a61b3c046b4731">↩</a></p>
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High-Authority Control/Low-Authority Control
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From (Andre Preumont, 2018):
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The HAC/LAC approach consist of combining the two approached in a dual-loop control as shown in Figure 1. The inner loop uses a set of collocated actuator/sensor pairs for decentralized active damping with guaranteed stability ; the outer loop consists of a non-collocated HAC based on a model of the actively damped structure. This approach has the following advantages:
|
||||
The active damping extends outside the bandwidth of the HAC and reduces the settling time of the modes which are outsite the bandwidth The active damping makes it easier to gain-stabilize the modes outside the bandwidth of the output loop (improved gain margin) The larger damping of the modes within the controller bandwidth makes them more robust to the parmetric uncertainty (improved phase margin)" />
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<p>From <sup id="454500a3af67ef66a7a754d1f2e1bd4a"><a href="#preumont18_vibrat_contr_activ_struc_fourt_edition" title="Andre Preumont, Vibration Control of Active Structures - Fourth Edition, Springer International Publishing (2018).">(Andre Preumont, 2018)</a></sup>:</p>
|
||||
<blockquote>
|
||||
<p>The HAC/LAC approach consist of combining the two approached in a dual-loop control as shown in Figure <a href="#org2e37874">1</a>. The inner loop uses a set of collocated actuator/sensor pairs for decentralized active damping with guaranteed stability ; the outer loop consists of a non-collocated HAC based on a model of the actively damped structure. This approach has the following advantages:</p>
|
||||
<ul>
|
||||
<li>The active damping extends outside the bandwidth of the HAC and reduces the settling time of the modes which are outsite the bandwidth</li>
|
||||
<li>The active damping makes it easier to gain-stabilize the modes outside the bandwidth of the output loop (improved gain margin)</li>
|
||||
<li>The larger damping of the modes within the controller bandwidth makes them more robust to the parmetric uncertainty (improved phase margin)</li>
|
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</ul>
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<figure>
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||||
<img src="/ox-hugo/hac_lac_control_architecture.png"
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||||
alt="Figure 1: HAC-LAC Control Architecture"/> <figcaption>
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||||
<p>Figure 1: HAC-LAC Control Architecture</p>
|
||||
</figcaption>
|
||||
</figure>
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||||
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||||
<h1 id="bibliography">Bibliography</h1>
|
||||
<p><a id="preumont18_vibrat_contr_activ_struc_fourt_edition"></a>Preumont, A., <em>Vibration control of active structures - fourth edition</em> (2018), : Springer International Publishing. <a href="#454500a3af67ef66a7a754d1f2e1bd4a">↩</a></p>
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Vibration Isolation
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<item>
|
||||
<title>Active Damping</title>
|
||||
<link>/zettels/active_damping/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
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||||
<guid>/zettels/active_damping/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Active isolation and damping of vibrations via stewart platform Active damping based on decoupled collocated control </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Actuators</title>
|
||||
<link>/zettels/actuators/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/actuators/</guid>
|
||||
<description>Tags :
|
||||
How to choose the correct actuator for my application? For vibration isolation:
|
||||
In (Shingo Ito &amp; Georg Schitter, 2016), the effect of the actuator stiffness on the attainable vibration isolation is studied (Notes) Piezoelectric Suppliers Links Cedrat link PI link Piezo System link Noliac link A model of a multi-layer monolithic piezoelectric stack actuator is described in (Fleming, 2010) (Notes).</description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Complementary Filters</title>
|
||||
<link>/zettels/complementary_filters/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/complementary_filters/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Advances in internal model control technique: a review and future prospects </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Cubic Architecture</title>
|
||||
<link>/zettels/cubic_architecture/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/cubic_architecture/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Sensors and control of a space-based six-axis vibration isolation system Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods </description>
|
||||
</item>
|
||||
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||||
<item>
|
||||
<title>Electronics</title>
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||||
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||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/electronics/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks The art of electronics - third edition </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Flexible Joints</title>
|
||||
<link>/zettels/flexible_joints/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/flexible_joints/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks A six-axis single-stage active vibration isolator based on stewart platform Nanometre-cutting machine using a stewart-platform parallel mechanism Dynamic modeling and experimental analyses of stewart platform with flexible hinges Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods Investigation on active vibration isolation of a stewart platform with piezoelectric actuators Identification and decoupling control of flexure jointed hexapods </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Force Sensors</title>
|
||||
<link>/zettels/force_sensors/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/force_sensors/</guid>
|
||||
<description>Tags :
|
||||
Suppliers PCB link Dynamics and Noise of a piezoelectric force sensor An analysis the dynamics and noise of a piezoelectric force sensor is done in (Fleming, 2010) (Notes).
|
||||
Bibliography Fleming, A., Nanopositioning system with force feedback for high-performance tracking and vibration control, IEEE/ASME Transactions on Mechatronics, 15(3), 433–447 (2010). http://dx.doi.org/10.1109/tmech.2009.2028422 ↩</description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>H Infinity Control</title>
|
||||
<link>/zettels/h_infinity_control/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/h_infinity_control/</guid>
|
||||
<description>Tags :
|
||||
Nice Citations From Rosenbrock, H. H. (1974). Computer-Aided Control System Design, Academic Press, New York:
|
||||
Solutions are constrained by so many requirements that it is virtually impossible to list them all. The designer finds himself threading a maze of such requirements, attempting to reconcile conflicting demands of cost, performance, easy maintenance, and so on. A good design usually has strong aesthetic appeal to those who are competent in the subject.</description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>HAC-HAC</title>
|
||||
<link>/zettels/hac_hac/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/hac_hac/</guid>
|
||||
<description>Tags :
|
||||
High-Authority Control/Low-Authority Control
|
||||
From (Andre Preumont, 2018):
|
||||
The HAC/LAC approach consist of combining the two approached in a dual-loop control as shown in Figure 1. The inner loop uses a set of collocated actuator/sensor pairs for decentralized active damping with guaranteed stability ; the outer loop consists of a non-collocated HAC based on a model of the actively damped structure. This approach has the following advantages:
|
||||
The active damping extends outside the bandwidth of the HAC and reduces the settling time of the modes which are outsite the bandwidth The active damping makes it easier to gain-stabilize the modes outside the bandwidth of the output loop (improved gain margin) The larger damping of the modes within the controller bandwidth makes them more robust to the parmetric uncertainty (improved phase margin)</description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Inertial Sensors</title>
|
||||
<link>/zettels/inertial_sensors/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/inertial_sensors/</guid>
|
||||
<description>Tags Position Sensors Reviews (Collette {\it et al.}, 2012) Accelerometers Micromega Dynamics link MMF link PCB link Wireless Accelerometers
|
||||
https://micromega-dynamics.com/products/recovib/miniature-vibration-recorder/
|
||||
Figure 1: Characteristics of commercially available accelerometers (Collette {it et al.}, 2011)
|
||||
Geophones Sercel link Wilcoxon link</description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Metrology</title>
|
||||
<link>/zettels/metrology/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/metrology/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Fundamental principles of engineering nanometrology </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Motion Control</title>
|
||||
<link>/zettels/motion_control/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/motion_control/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Advanced motion control for precision mechatronics: control, identification, and learning of complex systems </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Multivariable Control</title>
|
||||
<link>/zettels/multivariable_control/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/multivariable_control/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Position control in lithographic equipment Implementation challenges for multivariable control: what you did not learn in school! Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods Multivariable control systems: an engineering approach Multivariable feedback control: analysis and design </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Nano Active Stabilization System</title>
|
||||
<link>/zettels/nano_active_stabilization_system/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/nano_active_stabilization_system/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Interferometric characterization of rotation stages for x-ray nanotomography Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution An instrument for 3d x-ray nano-imaging </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Position Sensors</title>
|
||||
<link>/zettels/position_sensors/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/position_sensors/</guid>
|
||||
<description>Tags Inertial Sensors Reviews of position sensors (Collette {\it et al.}, 2012) Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Andrew Fleming, 2013) (Notes) Relative Position Sensors
|
||||
Table 1: Characteristics of relative measurement sensors collette11_review Technology Frequency Resolution Range T Range LVDT DC-200 Hz 10 nm rms 1-10 mm -50,100 °C Eddy current 5 kHz 0.</description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Positioning Stations</title>
|
||||
<link>/zettels/positioning_stations/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/positioning_stations/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Interferometric characterization of rotation stages for x-ray nanotomography Position control in lithographic equipment An instrument for 3d x-ray nano-imaging </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Precision Engineering</title>
|
||||
<link>/zettels/precision_engineering/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/precision_engineering/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Design for precision: current status and trends Basics of precision engineering - 1st edition </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Reference Books</title>
|
||||
<link>/zettels/reference_books/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/reference_books/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Modal testing: theory, practice and application The art of electronics - third edition Vibration Control of Active Structures - Fourth Edition Parallel robots : mechanics and control The design of high performance mechatronics - 2nd revised edition Multivariable feedback control: analysis and design </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Sensor Fusion</title>
|
||||
<link>/zettels/sensor_fusion/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/sensor_fusion/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Sensor fusion for active vibration isolation in precision equipment Vibration control of flexible structures using fusion of inertial sensors and hyper-stable actuator-sensor pairs Sensor fusion methods for high performance active vibration isolation systems Nanopositioning system with force feedback for high-performance tracking and vibration control Nanopositioning with multiple sensors: a case study in data storage </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Stewart Platforms</title>
|
||||
<link>/zettels/stewart_platforms/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/stewart_platforms/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Six dof active vibration control using stewart platform with non-cubic configuration Decentralized vibration control of a voice coil motor-based stewart parallel mechanism: simulation and experiments Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation Parallel robots : mechanics and control Investigation on active vibration isolation of a stewart platform with piezoelectric actuators Identification and decoupling control of flexure jointed hexapods The stewart platform manipulator: a review Modeling and control of vibration in mechanical systems Studies on stewart platform manipulator: a review Nanometre-cutting machine using a stewart-platform parallel mechanism An intelligent control system for multiple degree-of-freedom vibration isolation Active isolation and damping of vibrations via stewart platform Sensors and control of a space-based six-axis vibration isolation system Dynamic modeling and experimental analyses of stewart platform with flexible hinges Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods A new isotropic and decoupled 6-dof parallel manipulator Simultaneous vibration isolation and pointing control of flexure jointed hexapods A six-axis single-stage active vibration isolator based on stewart platform Vibration Control of Active Structures - Fourth Edition A soft 6-axis active vibration isolator </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>System Identification</title>
|
||||
<link>/zettels/system_identification/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
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<guid>/zettels/system_identification/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Modal testing: theory, practice and application </description>
|
||||
</item>
|
||||
|
||||
<item>
|
||||
<title>Test File</title>
|
||||
<link>/zettels/test/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
||||
<guid>/zettels/test/</guid>
|
||||
<description>This is a quote!
|
||||
1 2 a = 2; figure; This is an important part of the text.
|
||||
See Eq. eq:test1 and eq:test2.
|
||||
\begin{equation} a = 1 \end{equation}
|
||||
\begin{equation} a = 2 \label{eq:test2} \end{equation}
|
||||
Also look at 1 \eqref{eq:test2}.
|
||||
Some text.
|
||||
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|
||||
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|
||||
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||||
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|
||||
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|
||||
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|
||||
|
||||
<item>
|
||||
<title>Vibration Isolation</title>
|
||||
<link>/zettels/vibration_isolation/</link>
|
||||
<pubDate>Mon, 01 Jan 0001 00:00:00 +0000</pubDate>
|
||||
|
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<guid>/zettels/vibration_isolation/</guid>
|
||||
<description>Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Six dof active vibration control using stewart platform with non-cubic configuration Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation Investigation on active vibration isolation of a stewart platform with piezoelectric actuators Review of active vibration isolation strategies Vibration control of flexible structures using fusion of inertial sensors and hyper-stable actuator-sensor pairs Sensor fusion methods for high performance active vibration isolation systems Modeling and control of vibration in mechanical systems An intelligent control system for multiple degree-of-freedom vibration isolation Active isolation and damping of vibrations via stewart platform Sensors and control of a space-based six-axis vibration isolation system Comparison and classification of high-precision actuators based on stiffness influencing vibration isolation Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods Simultaneous vibration isolation and pointing control of flexure jointed hexapods An exploration of active hard mount vibration isolation for precision equipment Force feedback versus acceleration feedback in active vibration isolation A six-axis single-stage active vibration isolator based on stewart platform Vibration Control of Active Structures - Fourth Edition A soft 6-axis active vibration isolator Sensor fusion for active vibration isolation in precision equipment </description>
|
||||
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|
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|
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273
public/zettels/inertial_sensors/index.html
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—
|
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|
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|
||||
|
||||
" /><meta name="description" content="Tags Position Sensors Reviews (Collette {\it et al.}, 2012) Accelerometers Micromega Dynamics link MMF link PCB link Wireless Accelerometers
|
||||
https://micromega-dynamics.com/products/recovib/miniature-vibration-recorder/
|
||||
Figure 1: Characteristics of commercially available accelerometers (Collette {it et al.}, 2011)
|
||||
Geophones Sercel link Wilcoxon link" />
|
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<link rel="canonical" href="/zettels/inertial_sensors/" />
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<h1 class="post-title">Inertial Sensors</h1>
|
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<li><a href="#reviews">Reviews</a></li>
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<li><a href="#accelerometers">Accelerometers</a></li>
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<dt>Tags</dt>
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||||
<dd><a href="/zettels/position_sensors/">Position Sensors</a></dd>
|
||||
</dl>
|
||||
<h2 id="reviews">Reviews</h2>
|
||||
<ul>
|
||||
<li><sup id="dd5109075933cf543c7eba0979c0ba50"><a href="#collette12_review" title="Collette, Janssens, Fernandez-Carmona, , Artoos, Guinchard, Hauviller \& Preumont, Review: Inertial Sensors for Low-Frequency Seismic Vibration Measurement, {Bulletin of the Seismological Society of America}, v(4), 1289-1300 (2012).">(Collette {\it et al.}, 2012)</a></sup></li>
|
||||
</ul>
|
||||
<h2 id="accelerometers">Accelerometers</h2>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th></th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Micromega Dynamics</td>
|
||||
<td><a href="https://micromega-dynamics.com/products/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>MMF</td>
|
||||
<td><a href="https://www.mmf.de/seismic%5Faccelerometers.htm">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>PCB</td>
|
||||
<td><a href="https://www.pcb.com/products/productfinder.aspx?tx=14">link</a></td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<p>Wireless Accelerometers</p>
|
||||
<ul>
|
||||
<li><a href="https://micromega-dynamics.com/products/recovib/miniature-vibration-recorder/">https://micromega-dynamics.com/products/recovib/miniature-vibration-recorder/</a></li>
|
||||
</ul>
|
||||
<p><a id="orgdad9a09"></a></p>
|
||||
<figure>
|
||||
<img src="/ox-hugo/inertial_sensors_characteristics_accelerometers.png"
|
||||
alt="Figure 1: Characteristics of commercially available accelerometers (Collette {it et al.}, 2011)"/> <figcaption>
|
||||
<p>Figure 1: Characteristics of commercially available accelerometers <sup id="642a18d86de4e062c6afb0f5f20501c4"><a href="#collette11_review" title="Collette, Artoos, Guinchard, Janssens, , Carmona Fernandez & Hauviller, Review of sensors for low frequency seismic vibration measurement, cern, (2011).">(Collette {it et al.}, 2011)</a></sup></p>
|
||||
</figcaption>
|
||||
</figure>
|
||||
|
||||
<h2 id="geophones">Geophones</h2>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th></th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Sercel</td>
|
||||
<td><a href="http://www.sercel.com/products/Pages/seismometers.aspx">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Wilcoxon</td>
|
||||
<td><a href="https://wilcoxon.com/">link</a></td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<p><a id="org8c39d2f"></a></p>
|
||||
<figure>
|
||||
<img src="/ox-hugo/inertial_sensors_characteristics_geophone.png"
|
||||
alt="Figure 2: Characteristics of commercially available geophones (Collette {it et al.}, 2011)"/> <figcaption>
|
||||
<p>Figure 2: Characteristics of commercially available geophones <sup id="642a18d86de4e062c6afb0f5f20501c4"><a href="#collette11_review" title="Collette, Artoos, Guinchard, Janssens, , Carmona Fernandez & Hauviller, Review of sensors for low frequency seismic vibration measurement, cern, (2011).">(Collette {it et al.}, 2011)</a></sup></p>
|
||||
</figcaption>
|
||||
</figure>
|
||||
|
||||
<h1 id="bibliography">Bibliography</h1>
|
||||
<p><a id="collette12_review"></a>Collette, C., Janssens, S., Fernandez-Carmona, P., Artoos, K., Guinchard, M., Hauviller, C., & Preumont, A., <em>Review: inertial sensors for low-frequency seismic vibration measurement</em>, Bulletin of the Seismological Society of America, <em>102(4)</em>, 1289–1300 (2012). <a href="http://dx.doi.org/10.1785/0120110223">http://dx.doi.org/10.1785/0120110223</a> <a href="#dd5109075933cf543c7eba0979c0ba50">↩</a></p>
|
||||
<p><a id="collette11_review"></a>Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., <em>Review of sensors for low frequency seismic vibration measurement</em> (2011). <a href="#642a18d86de4e062c6afb0f5f20501c4">↩</a></p>
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Backlinks Position control in lithographic equipment Implementation challenges for multivariable control: what you did not learn in school! Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods Multivariable control systems: an engineering approach Multivariable feedback control: analysis and design " />
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|
||||
<h2 class="post-toc-title">Contents</h2>
|
||||
<div class="post-toc-content">
|
||||
<nav id="TableOfContents">
|
||||
<ul>
|
||||
<li><a href="#reviews-of-position-sensors">Reviews of position sensors</a></li>
|
||||
<li><a href="#relative-position-sensors">Relative Position Sensors</a>
|
||||
<ul>
|
||||
<li><a href="#strain-gauge">Strain Gauge</a></li>
|
||||
<li><a href="#capacitive-sensor">Capacitive Sensor</a></li>
|
||||
<li><a href="#inductive-sensor--eddy-current">Inductive Sensor (Eddy Current)</a></li>
|
||||
<li><a href="#inductive-sensor--lvdt">Inductive Sensor (LVDT)</a></li>
|
||||
<li><a href="#interferometers">Interferometers</a></li>
|
||||
<li><a href="#fiber-optic-displacement-sensor">Fiber Optic Displacement Sensor</a></li>
|
||||
</ul>
|
||||
</li>
|
||||
</ul>
|
||||
|
||||
<ul>
|
||||
<li><a href="#backlinks">Backlinks</a></li>
|
||||
</ul>
|
||||
</nav>
|
||||
</div>
|
||||
</div>
|
||||
<div class="post-content">
|
||||
<dl>
|
||||
<dt>Tags</dt>
|
||||
<dd><a href="/zettels/inertial_sensors/">Inertial Sensors</a></dd>
|
||||
</dl>
|
||||
<h2 id="reviews-of-position-sensors">Reviews of position sensors</h2>
|
||||
<ul>
|
||||
<li><sup id="0b0b67de6dddc4d28031ab2d3b28cd3d"><a href="#collette12_compar" title="Collette, Janssens, Mokrani, Fueyo-Roza, L, Artoos, Esposito, Fernandez-Carmona, , Guinchard \& Leuxe, Comparison of new absolute displacement sensors, in in: {International Conference on Noise and Vibration Engineering
|
||||
(ISMA)}, edited by (2012)">(Collette {\it et al.}, 2012)</a></sup></li>
|
||||
<li>Fleming, A. J., A review of nanometer resolution position sensors: operation and performance <sup id="3fb5b61524290e36d639a4fac65703d0"><a href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)</a></sup> (<a href="/paper/fleming13_review_nanom_resol_posit_sensor/">Notes</a>)</li>
|
||||
</ul>
|
||||
<h2 id="relative-position-sensors">Relative Position Sensors</h2>
|
||||
<p><a id="table--tab:characteristics-relative-sensor"></a></p>
|
||||
<div class="table-caption">
|
||||
<span class="table-number"><a href="#table--tab:characteristics-relative-sensor">Table 1</a></span>:
|
||||
Characteristics of relative measurement sensors <a class='org-ref-reference' href="#collette11_review">collette11_review</a>
|
||||
</div>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th>Technology</th>
|
||||
<th>Frequency</th>
|
||||
<th>Resolution</th>
|
||||
<th>Range</th>
|
||||
<th>T Range</th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>LVDT</td>
|
||||
<td>DC-200 Hz</td>
|
||||
<td>10 nm rms</td>
|
||||
<td>1-10 mm</td>
|
||||
<td>-50,100 °C</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Eddy current</td>
|
||||
<td>5 kHz</td>
|
||||
<td>0.1-100 nm rms</td>
|
||||
<td>0.5-55 mm</td>
|
||||
<td>-50,100 °C</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Capacitive</td>
|
||||
<td>DC-100 kHz</td>
|
||||
<td>0.05-50 nm rms</td>
|
||||
<td>50 nm - 1 cm</td>
|
||||
<td>-40,100 °C</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Interferometer</td>
|
||||
<td>300 kHz</td>
|
||||
<td>0.1 nm rms</td>
|
||||
<td>10 cm</td>
|
||||
<td>-250,100 °C</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Encoder</td>
|
||||
<td>DC-1 MHz</td>
|
||||
<td>1 nm rms</td>
|
||||
<td>7-27 mm</td>
|
||||
<td>0,40 °C</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Bragg Fibers</td>
|
||||
<td>DC-150 Hz</td>
|
||||
<td>0.3 nm rms</td>
|
||||
<td>3.5 cm</td>
|
||||
<td>-30,80 °C</td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<p><a id="table--tab:summary-position-sensors"></a></p>
|
||||
<div class="table-caption">
|
||||
<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a></span>:
|
||||
Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) <a class='org-ref-reference' href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>
|
||||
</div>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th>Sensor Type</th>
|
||||
<th>Range</th>
|
||||
<th>DNR</th>
|
||||
<th>Resolution</th>
|
||||
<th>Max. BW</th>
|
||||
<th>Accuracy</th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Metal foil</td>
|
||||
<td>\(10-500 \mu m\)</td>
|
||||
<td>230 ppm</td>
|
||||
<td>23 nm</td>
|
||||
<td>1-10 kHz</td>
|
||||
<td>1% FSR</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Piezoresistive</td>
|
||||
<td>\(1-500 \mu m\)</td>
|
||||
<td>5 ppm</td>
|
||||
<td>0.5 nm</td>
|
||||
<td>>100 kHz</td>
|
||||
<td>1% FSR</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Capacitive</td>
|
||||
<td>\(10 \mu m\) to \(10 mm\)</td>
|
||||
<td>24 ppm</td>
|
||||
<td>2.4 nm</td>
|
||||
<td>100 kHz</td>
|
||||
<td>0.1% FSR</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Electrothermal</td>
|
||||
<td>\(10 \mu m\) to \(1 mm\)</td>
|
||||
<td>100 ppm</td>
|
||||
<td>10 nm</td>
|
||||
<td>10 kHz</td>
|
||||
<td>1% FSR</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Eddy current</td>
|
||||
<td>\(100 \mu m\) to \(80 mm\)</td>
|
||||
<td>10 ppm</td>
|
||||
<td>1 nm</td>
|
||||
<td>40 kHz</td>
|
||||
<td>0.1% FSR</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>LVDT</td>
|
||||
<td>\(0.5-500 mm\)</td>
|
||||
<td>10 ppm</td>
|
||||
<td>5 nm</td>
|
||||
<td>1 kHz</td>
|
||||
<td>0.25% FSR</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Interferometer</td>
|
||||
<td>Meters</td>
|
||||
<td></td>
|
||||
<td>0.5 nm</td>
|
||||
<td>>100kHz</td>
|
||||
<td>1 ppm FSR</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Encoder</td>
|
||||
<td>Meters</td>
|
||||
<td></td>
|
||||
<td>6 nm</td>
|
||||
<td>>100kHz</td>
|
||||
<td>5 ppm FSR</td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<h3 id="strain-gauge">Strain Gauge</h3>
|
||||
<h3 id="capacitive-sensor">Capacitive Sensor</h3>
|
||||
<p>Description:</p>
|
||||
<ul>
|
||||
<li><a href="http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html">http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html</a></li>
|
||||
<li><a href="https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors">https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors</a></li>
|
||||
</ul>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th></th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Micro Sense</td>
|
||||
<td><a href="http://www.microsense.net/products-position-sensors.htm">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Micro-Epsilon</td>
|
||||
<td><a href="https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>PI</td>
|
||||
<td><a href="https://www.physikinstrumente.com/en/technology/sensor-technologies/capacitive-sensors/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Unipulse</td>
|
||||
<td><a href="https://www.unipulse.com/product/ps-ia/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Lion-Precision</td>
|
||||
<td><a href="https://www.lionprecision.com/products/capacitive-sensors">link</a></td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<h3 id="inductive-sensor--eddy-current">Inductive Sensor (Eddy Current)</h3>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th></th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Micro-Epsilon</td>
|
||||
<td><a href="https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Lion Precision</td>
|
||||
<td><a href="https://www.lionprecision.com/products/eddy-current-sensors">link</a></td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<h3 id="inductive-sensor--lvdt">Inductive Sensor (LVDT)</h3>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th></th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Micro-Epsilon</td>
|
||||
<td><a href="https://www.micro-epsilon.com/displacement-position-sensors/inductive-sensor-lvdt/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Keyence</td>
|
||||
<td><a href="https://www.keyence.eu/products/measure/contact-distance-lvdt/gt2/index.jsp">link</a></td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<h3 id="interferometers">Interferometers</h3>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th></th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Attocube</td>
|
||||
<td><a href="http://www.attocube.com/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Zygo</td>
|
||||
<td><a href="https://www.zygo.com/?/met/markets/stageposition/zmi/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Smaract</td>
|
||||
<td><a href="https://www.smaract.com/interferometry">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Qutools</td>
|
||||
<td><a href="https://www.qutools.com/qudis/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Renishaw</td>
|
||||
<td><a href="https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Sios</td>
|
||||
<td><a href="https://sios-de.com/products/length-measurement/laser-interferometer/">link</a></td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Keysight</td>
|
||||
<td><a href="https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre">link</a></td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<div class="table-caption">
|
||||
<span class="table-number">Table 3</span>:
|
||||
Characteristics of Environmental Units
|
||||
</div>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th>Temperature (\(\pm\ ^oC\))</th>
|
||||
<th>Pressure (\(\pm\ hPa\))</th>
|
||||
<th>Humidity \(\pm\% RH\)</th>
|
||||
<th>Wavelength Accuracy (\(\pm\ \text{ppm}\))</th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Attocube</td>
|
||||
<td>0.1</td>
|
||||
<td>1</td>
|
||||
<td>2</td>
|
||||
<td>0.5</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Renishaw</td>
|
||||
<td>0.2</td>
|
||||
<td>1</td>
|
||||
<td>6</td>
|
||||
<td>1</td>
|
||||
</tr>
|
||||
<tr>
|
||||
<td>Picoscale</td>
|
||||
<td>0.2</td>
|
||||
<td>2</td>
|
||||
<td>2</td>
|
||||
<td>1</td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<p><sup id="7658b1219a4458a62ae8c6f51b767542"><a href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \& Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
|
||||
Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang & Seung-Woo Kim, 2017)</a></sup></p>
|
||||
<p><a id="orge1e204f"></a></p>
|
||||
<figure>
|
||||
<img src="/ox-hugo/position_sensor_interferometer_precision.png"
|
||||
alt="Figure 1: Expected precision of interferometer as a function of measured distance"/> <figcaption>
|
||||
<p>Figure 1: Expected precision of interferometer as a function of measured distance</p>
|
||||
</figcaption>
|
||||
</figure>
|
||||
|
||||
<h3 id="fiber-optic-displacement-sensor">Fiber Optic Displacement Sensor</h3>
|
||||
<table>
|
||||
<thead>
|
||||
<tr>
|
||||
<th></th>
|
||||
<th></th>
|
||||
</tr>
|
||||
</thead>
|
||||
<tbody>
|
||||
<tr>
|
||||
<td>Unipulse</td>
|
||||
<td><a href="https://www.unipulse.com/product/atw200-2/">link</a></td>
|
||||
</tr>
|
||||
</tbody>
|
||||
</table>
|
||||
<h1 id="bibliography">Bibliography</h1>
|
||||
<p><a id="collette12_compar"></a>Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, <em>Comparison of new absolute displacement sensors</em>, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . <a href="#0b0b67de6dddc4d28031ab2d3b28cd3d">↩</a></p>
|
||||
<p><a id="fleming13_review_nanom_resol_posit_sensor"></a>Fleming, A. J., <em>A review of nanometer resolution position sensors: operation and performance</em>, Sensors and Actuators A: Physical, <em>190(nil)</em>, 106–126 (2013). <a href="http://dx.doi.org/10.1016/j.sna.2012.10.016">http://dx.doi.org/10.1016/j.sna.2012.10.016</a> <a href="#3fb5b61524290e36d639a4fac65703d0">↩</a></p>
|
||||
<p><a id="collette11_review"></a>Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., <em>Review of sensors for low frequency seismic vibration measurement</em> (2011). <a href="#642a18d86de4e062c6afb0f5f20501c4">↩</a></p>
|
||||
<p><a id="jang17_compen_refrac_index_air_laser"></a>Jang, Y., & Kim, S., <em>Compensation of the refractive index of air in laser interferometer for distance measurement: a review</em>, International Journal of Precision Engineering and Manufacturing, <em>18(12)</em>, 1881–1890 (2017). <a href="http://dx.doi.org/10.1007/s12541-017-0217-y">http://dx.doi.org/10.1007/s12541-017-0217-y</a> <a href="#7658b1219a4458a62ae8c6f51b767542">↩</a></p>
|
||||
<h2 id="backlinks">Backlinks</h2>
|
||||
<ul>
|
||||
<li><a href="/paper/gao15_measur_techn_precis_posit/">Measurement technologies for precision positioning</a></li>
|
||||
<li><a href="/paper/fleming13_review_nanom_resol_posit_sensor/">A review of nanometer resolution position sensors: operation and performance</a></li>
|
||||
</ul>
|
||||
|
||||
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||||
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Backlinks Interferometric characterization of rotation stages for x-ray nanotomography Position control in lithographic equipment An instrument for 3d x-ray nano-imaging " />
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<li><a href="/paper/butler11_posit_contr_lithog_equip/">Position control in lithographic equipment</a></li>
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Backlinks Modal testing: theory, practice and application The art of electronics - third edition Vibration Control of Active Structures - Fourth Edition Parallel robots : mechanics and control The design of high performance mechatronics - 2nd revised edition Multivariable feedback control: analysis and design " />
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<li><a href="/book/ewins00_modal/">Modal testing: theory, practice and application</a></li>
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<li><a href="/book/horowitz15_art_of_elect_third_edition/">The art of electronics - third edition</a></li>
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Backlinks Sensor fusion for active vibration isolation in precision equipment Vibration control of flexible structures using fusion of inertial sensors and hyper-stable actuator-sensor pairs Sensor fusion methods for high performance active vibration isolation systems Nanopositioning system with force feedback for high-performance tracking and vibration control Nanopositioning with multiple sensors: a case study in data storage " />
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<li><a href="/paper/tjepkema12_sensor_fusion_activ_vibrat_isolat_precis_equip/">Sensor fusion for active vibration isolation in precision equipment</a></li>
|
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<li><a href="/paper/collette14_vibrat/">Vibration control of flexible structures using fusion of inertial sensors and hyper-stable actuator-sensor pairs</a></li>
|
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<li><a href="/paper/collette15_sensor_fusion_method_high_perfor/">Sensor fusion methods for high performance active vibration isolation systems</a></li>
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" /><meta name="description" content="Tags :
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&lt;./biblio/references.bib&gt;
|
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Backlinks Six dof active vibration control using stewart platform with non-cubic configuration Decentralized vibration control of a voice coil motor-based stewart parallel mechanism: simulation and experiments Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation Parallel robots : mechanics and control Investigation on active vibration isolation of a stewart platform with piezoelectric actuators Identification and decoupling control of flexure jointed hexapods The stewart platform manipulator: a review Modeling and control of vibration in mechanical systems Studies on stewart platform manipulator: a review Nanometre-cutting machine using a stewart-platform parallel mechanism An intelligent control system for multiple degree-of-freedom vibration isolation Active isolation and damping of vibrations via stewart platform Sensors and control of a space-based six-axis vibration isolation system Dynamic modeling and experimental analyses of stewart platform with flexible hinges Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods A new isotropic and decoupled 6-dof parallel manipulator Simultaneous vibration isolation and pointing control of flexure jointed hexapods A six-axis single-stage active vibration isolator based on stewart platform Vibration Control of Active Structures - Fourth Edition A soft 6-axis active vibration isolator " />
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<h1 class="post-title">Stewart Platforms</h1>
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<p><./biblio/references.bib></p>
|
||||
<h2 id="backlinks">Backlinks</h2>
|
||||
<ul>
|
||||
<li><a href="/paper/zhang11_six_dof/">Six dof active vibration control using stewart platform with non-cubic configuration</a></li>
|
||||
<li><a href="/paper/tang18_decen_vibrat_contr_voice_coil/">Decentralized vibration control of a voice coil motor-based stewart parallel mechanism: simulation and experiments</a></li>
|
||||
<li><a href="/paper/yang19_dynam_model_decoup_contr_flexib/">Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation</a></li>
|
||||
<li><a href="/book/taghirad13_paral/">Parallel robots : mechanics and control</a></li>
|
||||
<li><a href="/paper/wang16_inves_activ_vibrat_isolat_stewar/">Investigation on active vibration isolation of a stewart platform with piezoelectric actuators</a></li>
|
||||
<li><a href="/paper/chen00_ident_decoup_contr_flexur_joint_hexap/">Identification and decoupling control of flexure jointed hexapods</a></li>
|
||||
<li><a href="/paper/dasgupta00_stewar_platf_manip/">The stewart platform manipulator: a review</a></li>
|
||||
<li><a href="/book/du10_model_contr_vibrat_mechan_system/">Modeling and control of vibration in mechanical systems</a></li>
|
||||
<li><a href="/paper/furqan17_studies_stewar_platf_manip/">Studies on stewart platform manipulator: a review</a></li>
|
||||
<li><a href="/paper/furutani04_nanom_cuttin_machin_using_stewar/">Nanometre-cutting machine using a stewart-platform parallel mechanism</a></li>
|
||||
<li><a href="/paper/geng95_intel_contr_system_multip_degree/">An intelligent control system for multiple degree-of-freedom vibration isolation</a></li>
|
||||
<li><a href="/paper/hanieh03_activ_stewar/">Active isolation and damping of vibrations via stewart platform</a></li>
|
||||
<li><a href="/paper/hauge04_sensor_contr_space_based_six/">Sensors and control of a space-based six-axis vibration isolation system</a></li>
|
||||
<li><a href="/paper/jiao18_dynam_model_exper_analy_stewar/">Dynamic modeling and experimental analyses of stewart platform with flexible hinges</a></li>
|
||||
<li><a href="/paper/li01_simul_fault_vibrat_isolat_point/">Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods</a></li>
|
||||
<li><a href="/paper/legnani12_new_isotr_decoup_paral_manip/">A new isotropic and decoupled 6-dof parallel manipulator</a></li>
|
||||
<li><a href="/paper/li01_simul_vibrat_isolat_point_contr/">Simultaneous vibration isolation and pointing control of flexure jointed hexapods</a></li>
|
||||
<li><a href="/paper/preumont07_six_axis_singl_stage_activ/">A six-axis single-stage active vibration isolator based on stewart platform</a></li>
|
||||
<li><a href="/book/preumont18_vibrat_contr_activ_struc_fourt_edition/">Vibration Control of Active Structures - Fourth Edition</a></li>
|
||||
<li><a href="/paper/spanos95_soft_activ_vibrat_isolat/">A soft 6-axis active vibration isolator</a></li>
|
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Backlinks Modal testing: theory, practice and application " />
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|
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" /><meta name="description" content="This is a quote!
|
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1 2 a = 2; figure; This is an important part of the text.
|
||||
See Eq. eq:test1 and eq:test2.
|
||||
\begin{equation} a = 1 \end{equation}
|
||||
\begin{equation} a = 2 \label{eq:test2} \end{equation}
|
||||
Also look at 1 \eqref{eq:test2}.
|
||||
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|
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|
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<pre class="chroma"><code><span class="lnt">1
|
||||
</span><span class="lnt">2
|
||||
</span></code></pre></td>
|
||||
<td class="lntd">
|
||||
<pre class="chroma"><code class="language-matlab" data-lang="matlab"><span class="n">a</span> <span class="p">=</span> <span class="mi">2</span><span class="p">;</span>
|
||||
<span class="n">figure</span><span class="p">;</span>
|
||||
</code></pre></td></tr></table>
|
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</div>
|
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</div><div class="important">
|
||||
<div></div>
|
||||
<p>This is an important part of the text.</p>
|
||||
</div>
|
||||
<p>See Eq. <a href="#eq:test1">eq:test1</a> and <a href="#eq:test2">eq:test2</a>.</p>
|
||||
<p>\begin{equation}
|
||||
a = 1
|
||||
\end{equation}</p>
|
||||
<p>\begin{equation}
|
||||
a = 2 \label{eq:test2}
|
||||
\end{equation}</p>
|
||||
<p>Also look at <a href="#org7280632">1</a> \eqref{eq:test2}.</p>
|
||||
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|
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public/zettels/vibration_isolation/index.html
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218
public/zettels/vibration_isolation/index.html
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—
|
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Thomas Dehaeze
|
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|
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|
||||
" /><meta name="description" content="Tags :
|
||||
&lt;./biblio/references.bib&gt;
|
||||
Backlinks Six dof active vibration control using stewart platform with non-cubic configuration Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation Investigation on active vibration isolation of a stewart platform with piezoelectric actuators Review of active vibration isolation strategies Vibration control of flexible structures using fusion of inertial sensors and hyper-stable actuator-sensor pairs Sensor fusion methods for high performance active vibration isolation systems Modeling and control of vibration in mechanical systems An intelligent control system for multiple degree-of-freedom vibration isolation Active isolation and damping of vibrations via stewart platform Sensors and control of a space-based six-axis vibration isolation system Comparison and classification of high-precision actuators based on stiffness influencing vibration isolation Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods Simultaneous vibration isolation and pointing control of flexure jointed hexapods An exploration of active hard mount vibration isolation for precision equipment Force feedback versus acceleration feedback in active vibration isolation A six-axis single-stage active vibration isolator based on stewart platform Vibration Control of Active Structures - Fourth Edition A soft 6-axis active vibration isolator Sensor fusion for active vibration isolation in precision equipment " />
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<ul>
|
||||
<li><a href="/paper/zhang11_six_dof/">Six dof active vibration control using stewart platform with non-cubic configuration</a></li>
|
||||
<li><a href="/paper/yang19_dynam_model_decoup_contr_flexib/">Dynamic modeling and decoupled control of a flexible stewart platform for vibration isolation</a></li>
|
||||
<li><a href="/paper/wang16_inves_activ_vibrat_isolat_stewar/">Investigation on active vibration isolation of a stewart platform with piezoelectric actuators</a></li>
|
||||
<li><a href="/paper/collette11_review_activ_vibrat_isolat_strat/">Review of active vibration isolation strategies</a></li>
|
||||
<li><a href="/paper/collette14_vibrat/">Vibration control of flexible structures using fusion of inertial sensors and hyper-stable actuator-sensor pairs</a></li>
|
||||
<li><a href="/paper/collette15_sensor_fusion_method_high_perfor/">Sensor fusion methods for high performance active vibration isolation systems</a></li>
|
||||
<li><a href="/book/du10_model_contr_vibrat_mechan_system/">Modeling and control of vibration in mechanical systems</a></li>
|
||||
<li><a href="/paper/geng95_intel_contr_system_multip_degree/">An intelligent control system for multiple degree-of-freedom vibration isolation</a></li>
|
||||
<li><a href="/paper/hanieh03_activ_stewar/">Active isolation and damping of vibrations via stewart platform</a></li>
|
||||
<li><a href="/paper/hauge04_sensor_contr_space_based_six/">Sensors and control of a space-based six-axis vibration isolation system</a></li>
|
||||
<li><a href="/paper/ito16_compar_class_high_precis_actuat/">Comparison and classification of high-precision actuators based on stiffness influencing vibration isolation</a></li>
|
||||
<li><a href="/paper/li01_simul_fault_vibrat_isolat_point/">Simultaneous, fault-tolerant vibration isolation and pointing control of flexure jointed hexapods</a></li>
|
||||
<li><a href="/paper/li01_simul_vibrat_isolat_point_contr/">Simultaneous vibration isolation and pointing control of flexure jointed hexapods</a></li>
|
||||
<li><a href="/paper/poel10_explor_activ_hard_mount_vibrat/">An exploration of active hard mount vibration isolation for precision equipment</a></li>
|
||||
<li><a href="/paper/preumont02_force_feedb_versus_accel_feedb/">Force feedback versus acceleration feedback in active vibration isolation</a></li>
|
||||
<li><a href="/paper/preumont07_six_axis_singl_stage_activ/">A six-axis single-stage active vibration isolator based on stewart platform</a></li>
|
||||
<li><a href="/book/preumont18_vibrat_contr_activ_struc_fourt_edition/">Vibration Control of Active Structures - Fourth Edition</a></li>
|
||||
<li><a href="/paper/spanos95_soft_activ_vibrat_isolat/">A soft 6-axis active vibration isolator</a></li>
|
||||
<li><a href="/paper/tjepkema12_sensor_fusion_activ_vibrat_isolat_precis_equip/">Sensor fusion for active vibration isolation in precision equipment</a></li>
|
||||
</ul>
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2020
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