Update many posts

content/article/butler11_posit_contr_lithog_equip.md

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+title = "Position control in lithographic equipment"
+author = ["Thomas Dehaeze"]
+draft = false
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+
+Tags
+: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})
+
+Reference
+: <sup id="6a014e3a2ee3e41d20bd0644654c56f0"><a class="reference-link" href="#butler11_posit_contr_lithog_equip" title="Hans Butler, Position Control in Lithographic Equipment, {IEEE Control Systems}, v(5), 28-47 (2011).">(Hans Butler, 2011)</a></sup>
+
+Author(s)
+: Butler, H.
+
+Year
+: 2011
+
+# Bibliography
+<a class="bibtex-entry" id="butler11_posit_contr_lithog_equip">Butler, H., *Position control in lithographic equipment*, IEEE Control Systems, *31(5)*, 28–47 (2011).  http://dx.doi.org/10.1109/mcs.2011.941882</a> [↩](#6a014e3a2ee3e41d20bd0644654c56f0)