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Add notes about sensors/actuators

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Thomas Dehaeze
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content/zettels/position_sensors.md
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@@ -8,20 +8,9 @@ Tags
: [Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}})
## Absolute Position Sensors {#absolute-position-sensors}
## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
- Collette, C. et al., Review: inertial sensors for low-frequency seismic vibration measurement <sup id="dd5109075933cf543c7eba0979c0ba50"><a href="#collette12_review" title="Collette, Janssens, Fernandez-Carmona, , Artoos, Guinchard, Hauviller \&amp; Preumont, Review: Inertial Sensors for Low-Frequency Seismic Vibration Measurement, {Bulletin of the Seismological Society of America}, v(4), 1289-1300 (2012).">(Collette {\it et al.}, 2012)</a></sup>
- Collette, C. et al., Comparison of new absolute displacement sensors <sup id="0b0b67de6dddc4d28031ab2d3b28cd3d"><a href="#collette12_compar" title="Collette, Janssens, Mokrani, Fueyo-Roza, L, Artoos, Esposito, Fernandez-Carmona, , Guinchard \&amp; Leuxe, Comparison of new absolute displacement sensors, in in: {International Conference on Noise and Vibration Engineering
(ISMA)}, edited by (2012)">(Collette {\it et al.}, 2012)</a></sup>
<a id="org436fa72"></a>
{{< figure src="/ox-hugo/collette12_absolute_disp_sensors.png" caption="Figure 1: Dynamic range of several types of inertial sensors; Price versus resolution for several types of inertial sensors" >}}
## Relative Position Sensors {#relative-position-sensors}
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance <sup id="3fb5b61524290e36d639a4fac65703d0"><a href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)</a></sup> ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance <sup id="3fb5b61524290e36d639a4fac65703d0"><a class="reference-link" href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)</a></sup> ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
<a id="table--tab:characteristics-relative-sensor"></a>
<div class="table-caption">
@@ -56,17 +45,17 @@ Tags
| Encoder | Meters | | 6 nm | >100kHz | 5 ppm FSR |
### Strain Gauge {#strain-gauge}
## Strain Gauge {#strain-gauge}
### Capacitive Sensor {#capacitive-sensor}
## Capacitive Sensor {#capacitive-sensor}
Description:
- <http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html>
- <https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors>
| | |
| Manufacturers | Links |
|----------------|-------------------------------------------------------------------------------------------------|
| Micro Sense | [link](http://www.microsense.net/products-position-sensors.htm) |
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/) |
@@ -75,33 +64,33 @@ Description:
| Lion-Precision | [link](https://www.lionprecision.com/products/capacitive-sensors) |
### Inductive Sensor (Eddy Current) {#inductive-sensor--eddy-current}
## Inductive Sensor (Eddy Current) {#inductive-sensor--eddy-current}
| | |
| Manufacturers | Links |
|----------------|------------------------------------------------------------------------------------------|
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/) |
| Lion Precision | [link](https://www.lionprecision.com/products/eddy-current-sensors) |
### Inductive Sensor (LVDT) {#inductive-sensor--lvdt}
## Inductive Sensor (LVDT) {#inductive-sensor--lvdt}
| | |
| Manufacturers | Links |
|---------------|--------------------------------------------------------------------------------------------|
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/inductive-sensor-lvdt/) |
| Keyence | [link](https://www.keyence.eu/products/measure/contact-distance-lvdt/gt2/index.jsp) |
### Interferometers {#interferometers}
## Interferometers {#interferometers}
| | |
|----------|----------------------------------------------------------------------------------------------------------|
| Attocube | [link](http://www.attocube.com/) |
| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) |
| Smaract | [link](https://www.smaract.com/interferometry) |
| Qutools | [link](https://www.qutools.com/qudis/) |
| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) |
| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) |
| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) |
| Manufacturers | Links |
|---------------|----------------------------------------------------------------------------------------------------------|
| Attocube | [link](http://www.attocube.com/) |
| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) |
| Smaract | [link](https://www.smaract.com/interferometry) |
| Qutools | [link](https://www.qutools.com/qudis/) |
| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) |
| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) |
| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) |
<div class="table-caption">
<span class="table-number">Table 3</span>:
@@ -114,34 +103,31 @@ Description:
| Renishaw | 0.2 | 1 | 6 | 1 |
| Picoscale | 0.2 | 2 | 2 | 1 |
<sup id="7658b1219a4458a62ae8c6f51b767542"><a href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \&amp; Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
<sup id="7658b1219a4458a62ae8c6f51b767542"><a class="reference-link" href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \&amp; Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang \& Seung-Woo Kim, 2017)</a></sup>
<a id="orgb68b41e"></a>
<a id="org0399c13"></a>
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 2: Expected precision of interferometer as a function of measured distance" >}}
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
### Fiber Optic Displacement Sensor {#fiber-optic-displacement-sensor}
## Fiber Optic Displacement Sensor {#fiber-optic-displacement-sensor}
| | |
|----------|----------------------------------------------------|
| Unipulse | [link](https://www.unipulse.com/product/atw200-2/) |
| Manufacturers | Links |
|---------------|----------------------------------------------------|
| Unipulse | [link](https://www.unipulse.com/product/atw200-2/) |
# Bibliography
<a id="collette12_review"></a>Collette, C., Janssens, S., Fernandez-Carmona, P., Artoos, K., Guinchard, M., Hauviller, C., & Preumont, A., *Review: inertial sensors for low-frequency seismic vibration measurement*, Bulletin of the Seismological Society of America, *102(4)*, 1289–1300 (2012). http://dx.doi.org/10.1785/0120110223 [↩](#dd5109075933cf543c7eba0979c0ba50)
<a class="bibtex-entry" id="fleming13_review_nanom_resol_posit_sensor">Fleming, A. J., *A review of nanometer resolution position sensors: operation and performance*, Sensors and Actuators A: Physical, *190(nil)*, 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016</a> [↩](#3fb5b61524290e36d639a4fac65703d0)
<a id="collette12_compar"></a>Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, *Comparison of new absolute displacement sensors*, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . [↩](#0b0b67de6dddc4d28031ab2d3b28cd3d)
<a class="bibtex-entry" id="collette11_review">Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., *Review of sensors for low frequency seismic vibration measurement* (2011).</a> [↩](#642a18d86de4e062c6afb0f5f20501c4)
<a id="fleming13_review_nanom_resol_posit_sensor"></a>Fleming, A. J., *A review of nanometer resolution position sensors: operation and performance*, Sensors and Actuators A: Physical, *190(nil)*, 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 [↩](#3fb5b61524290e36d639a4fac65703d0)
<a id="collette11_review"></a>Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., *Review of sensors for low frequency seismic vibration measurement* (2011). [↩](#642a18d86de4e062c6afb0f5f20501c4)
<a id="jang17_compen_refrac_index_air_laser"></a>Jang, Y., & Kim, S., *Compensation of the refractive index of air in laser interferometer for distance measurement: a review*, International Journal of Precision Engineering and Manufacturing, *18(12)*, 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y [↩](#7658b1219a4458a62ae8c6f51b767542)
<a class="bibtex-entry" id="jang17_compen_refrac_index_air_laser">Jang, Y., & Kim, S., *Compensation of the refractive index of air in laser interferometer for distance measurement: a review*, International Journal of Precision Engineering and Manufacturing, *18(12)*, 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y</a> [↩](#7658b1219a4458a62ae8c6f51b767542)
## Backlinks {#backlinks}
- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
- [Collocated Control]({{< relref "collocated_control" >}})
- [Inertial Sensors]({{< relref "inertial_sensors" >}})