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Thomas Dehaeze 2020-04-29 14:40:26 +02:00
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content/zettels/position_sensors.md
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@ -23,14 +23,14 @@ Tags
Characteristics of relative measurement sensors <a class='org-ref-reference' href="#collette11_review">collette11_review</a> Characteristics of relative measurement sensors <a class='org-ref-reference' href="#collette11_review">collette11_review</a>
</div> </div>
| Technology | Frequency (Hz) | Resolution [nm rms] | Range | Temperature Range [\\(^o \degree C\\)] | | Technology | Frequency | Resolution | Range | T Range |
|----------------|----------------------------|---------------------|--------------------------|----------------------------------------| |----------------|----------------------------|--------------------------|--------------------------|------------------------|
| LVDT | \\(\text{DC}-200\,[Hz]\\) | 10 | \\(1-10\,[mm]\\) | -50,100 | | LVDT | \\(\text{DC}-200\,[Hz]\\) | \\(10\,[nm\ rms]\\) | \\(1-10\,[mm]\\) | \\(-50,100\,[^o C]\\) |
| Eddy current | \\(5\,[kHz]\\) | 0.1-100 | \\(0.5-55\,[mm]\\) | -50,100 | | Eddy current | \\(5\,[kHz]\\) | \\(0.1-100\,[nm\ rms]\\) | \\(0.5-55\,[mm]\\) | \\(-50,100\,[^o C]\\) |
| Capacitive | \\(\text{DC}-100\,[kHz]\\) | 0.05-50 | \\(50\,[nm] - 1\,[cm]\\) | -40,100 | | Capacitive | \\(\text{DC}-100\,[kHz]\\) | \\(0.05-50\,[nm\ rms]\\) | \\(50\,[nm] - 1\,[cm]\\) | \\(-40,100\,[^o C]\\) |
| Interferometer | \\(300\,[kHz]\\) | 0.1 | \\(10\,[cm]\\) | -250,100 | | Interferometer | \\(300\,[kHz]\\) | \\(0.1\,[nm\ rms]\\) | \\(10\,[cm]\\) | \\(-250,100\,[^o C]\\) |
| Encoder | \\(\text{DC}-1\,[MHz]\\) | 1 | \\(7-27\,[mm]\\) | 0,40 | | Encoder | \\(\text{DC}-1\,[MHz]\\) | \\(1\,[nm\ rms]\\) | \\(7-27\,[mm]\\) | \\(0,40\,[^o C]\\) |
| Bragg Fibers | \\(\text{DC}-150\,[Hz]\\) | 0.3 | \\(3.5\,[cm]\\) | -30,80 | | Bragg Fibers | \\(\text{DC}-150\,[Hz]\\) | \\(0.3\,[nm\ rms]\\) | \\(3.5\,[cm]\\) | \\(-30,80\,[^o C]\\) |
<a id="table--tab:summary-position-sensors"></a> <a id="table--tab:summary-position-sensors"></a>
<div class="table-caption"> <div class="table-caption">
@ -108,11 +108,11 @@ Description:
| Renishaw | 0.2 | 1 | 6 | 1 | | Renishaw | 0.2 | 1 | 6 | 1 |
| Picoscale | 0.2 | 2 | 2 | 1 | | Picoscale | 0.2 | 2 | 2 | 1 |
Figure [1](#org1c8180d) is taken from Figure [1](#org35ec018) is taken from
<sup id="7658b1219a4458a62ae8c6f51b767542"><a href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \&amp; Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and <sup id="7658b1219a4458a62ae8c6f51b767542"><a href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \&amp; Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang \& Seung-Woo Kim, 2017)</a></sup>. Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang \& Seung-Woo Kim, 2017)</a></sup>.
<a id="org1c8180d"></a> <a id="org35ec018"></a>
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}} {{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}