diff --git a/content/zettels/position_sensors.md b/content/zettels/position_sensors.md index f811329..82e05ac 100644 --- a/content/zettels/position_sensors.md +++ b/content/zettels/position_sensors.md @@ -23,14 +23,14 @@ Tags Characteristics of relative measurement sensors collette11_review -| Technology | Frequency (Hz) | Resolution [nm rms] | Range | Temperature Range [\\(^o \degree C\\)] | -|----------------|----------------------------|---------------------|--------------------------|----------------------------------------| -| LVDT | \\(\text{DC}-200\,[Hz]\\) | 10 | \\(1-10\,[mm]\\) | -50,100 | -| Eddy current | \\(5\,[kHz]\\) | 0.1-100 | \\(0.5-55\,[mm]\\) | -50,100 | -| Capacitive | \\(\text{DC}-100\,[kHz]\\) | 0.05-50 | \\(50\,[nm] - 1\,[cm]\\) | -40,100 | -| Interferometer | \\(300\,[kHz]\\) | 0.1 | \\(10\,[cm]\\) | -250,100 | -| Encoder | \\(\text{DC}-1\,[MHz]\\) | 1 | \\(7-27\,[mm]\\) | 0,40 | -| Bragg Fibers | \\(\text{DC}-150\,[Hz]\\) | 0.3 | \\(3.5\,[cm]\\) | -30,80 | +| Technology | Frequency | Resolution | Range | T Range | +|----------------|----------------------------|--------------------------|--------------------------|------------------------| +| LVDT | \\(\text{DC}-200\,[Hz]\\) | \\(10\,[nm\ rms]\\) | \\(1-10\,[mm]\\) | \\(-50,100\,[^o C]\\) | +| Eddy current | \\(5\,[kHz]\\) | \\(0.1-100\,[nm\ rms]\\) | \\(0.5-55\,[mm]\\) | \\(-50,100\,[^o C]\\) | +| Capacitive | \\(\text{DC}-100\,[kHz]\\) | \\(0.05-50\,[nm\ rms]\\) | \\(50\,[nm] - 1\,[cm]\\) | \\(-40,100\,[^o C]\\) | +| Interferometer | \\(300\,[kHz]\\) | \\(0.1\,[nm\ rms]\\) | \\(10\,[cm]\\) | \\(-250,100\,[^o C]\\) | +| Encoder | \\(\text{DC}-1\,[MHz]\\) | \\(1\,[nm\ rms]\\) | \\(7-27\,[mm]\\) | \\(0,40\,[^o C]\\) | +| Bragg Fibers | \\(\text{DC}-150\,[Hz]\\) | \\(0.3\,[nm\ rms]\\) | \\(3.5\,[cm]\\) | \\(-30,80\,[^o C]\\) |
@@ -108,11 +108,11 @@ Description: | Renishaw | 0.2 | 1 | 6 | 1 | | Picoscale | 0.2 | 2 | 2 | 1 | -Figure [1](#org1c8180d) is taken from +Figure [1](#org35ec018) is taken from (Yoon-Soo Jang \& Seung-Woo Kim, 2017). - + {{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}