Reviews of position sensors

^{(Collette {\it et al.}, 2012)}
^{(Andrew Fleming, 2013)}

Relative Position Sensors

Table 1: Characteristics of relative measurement sensors collette11_review

Technology	Frequency	Resolution	Range	T Range
LVDT	\(\text{DC}-200,[Hz]\)	\(10,[nm\ rms]\)	\(1-10,[mm]\)	\(-50,100,[^o C]\)
Eddy current	\(5,[kHz]\)	\(0.1-100,[nm\ rms]\)	\(0.5-55,[mm]\)	\(-50,100,[^o C]\)
Capacitive	\(\text{DC}-100,[kHz]\)	\(0.05-50,[nm\ rms]\)	\(50,[nm] - 1,[cm]\)	\(-40,100,[^o C]\)
Interferometer	\(300,[kHz]\)	\(0.1,[nm\ rms]\)	\(10,[cm]\)	\(-250,100,[^o C]\)
Encoder	\(\text{DC}-1,[MHz]\)	\(1,[nm\ rms]\)	\(7-27,[mm]\)	\(0,40,[^o C]\)
Bragg Fibers	\(\text{DC}-150,[Hz]\)	\(0.3,[nm\ rms]\)	\(3.5,[cm]\)	\(-30,80,[^o C]\)

Table 2: Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100\,\mu m\) and a first order bandwidth of \(1\,kHz\) fleming13_review_nanom_resol_posit_sensor (notes)

Sensor Type	Range	DNR	Resolution	Max. BW	Accuracy
Metal foil	\(10-500,\mu m\)	230 ppm	23 nm	1-10 kHz	1% FSR
Piezoresistive	\(1-500,\mu m\)	5 ppm	0.5 nm	>100 kHz	1% FSR
Capacitive	\(10,\mu m\) to \(10,mm\)	24 ppm	2.4 nm	100 kHz	0.1% FSR
Electrothermal	\(10,\mu m\) to \(1,mm\)	100 ppm	10 nm	10 kHz	1% FSR
Eddy current	\(100,\mu m\) to \(80,mm\)	10 ppm	1 nm	40 kHz	0.1% FSR
LVDT	\(0.5-500,mm\)	10 ppm	5 nm	1 kHz	0.25% FSR
Interferometer	Meters		0.5 nm	>100kHz	1 ppm FSR
Encoder	Meters		6 nm	>100kHz	5 ppm FSR

Strain Gauge

Capacitive Sensor

Description:


Micro Sense	link
Micro-Epsilon	link
PI	link
Unipulse	link
Lion-Precision	link

Inductive Sensor (Eddy Current)


Micro-Epsilon	link
Lion Precision	link

Inductive Sensor (LVDT)


Micro-Epsilon	link
Keyence	link

Interferometers


Attocube	link
Zygo	link
Smaract	link
Qutools	link
Renishaw	link
Sios	link
Keysight	link

Table 3: Characteristics of Environmental Units

	Temperature (\(\pm\ ^oC\))	Pressure (\(\pm\ hPa\))	Humidity \(\pm\ % RH\)	Wavelength Accuracy (\(\pm\ \text{ppm}\))
Attocube	0.1	1	2	0.5
Renishaw	0.2	1	6	1
Picoscale	0.2	2	2	1

Figure 1 is taken from ^{(Yoon-Soo Jang & Seung-Woo Kim, 2017)}.

{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}

Fiber Optic Displacement Sensor


Unipulse	link

Bibliography

Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, Comparison of new absolute displacement sensors, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . ↩

Fleming, A. J., A review of nanometer resolution position sensors: operation and performance, Sensors and Actuators A: Physical, 190(nil), 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 ↩

Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., Review of sensors for low frequency seismic vibration measurement (2011). ↩

Jang, Y., & Kim, S., Compensation of the refractive index of air in laser interferometer for distance measurement: a review, International Journal of Precision Engineering and Manufacturing, 18(12), 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y ↩

Backlinks

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