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121 lines
8.0 KiB
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title = "Piezoelectric Actuators"
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author = ["Thomas Dehaeze"]
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draft = false
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Tags
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: [Actuators]({{< relref "actuators" >}})
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## Piezoelectric Stack Actuators {#piezoelectric-stack-actuators}
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### Manufacturers {#manufacturers}
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| Manufacturers | Links |
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|---------------------|------------------------------------------------------------------------------------|
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| Cedrat | [link](http://www.cedrat-technologies.com/) |
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| PI | [link](https://www.physikinstrumente.com/en/) |
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| Piezo System | [link](https://www.piezosystem.com/products/piezo%5Factuators/stacktypeactuators/) |
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| Noliac | [link](http://www.noliac.com/) |
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| Thorlabs | [link](https://www.thorlabs.com/newgrouppage9.cfm?objectgroup%5Fid=8700) |
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| PiezoDrive | [link](https://www.piezodrive.com/actuators/) |
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| Mechano Transformer | [link](http://www.mechano-transformer.com/en/products/10.html) |
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| CoreMorrow | [link](http://www.coremorrow.com/en/pro-9-1.html) |
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### Model {#model}
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A model of a multi-layer monolithic piezoelectric stack actuator is described in <sup id="c823f68dd2a72b9667a61b3c046b4731"><a class="reference-link" href="#fleming10_nanop_system_with_force_feedb" title="Fleming, Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control, {IEEE/ASME Transactions on Mechatronics}, v(3), 433-447 (2010).">(Fleming, 2010)</a></sup> ([Notes]({{< relref "fleming10_nanop_system_with_force_feedb" >}})).
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### Specifications {#specifications}
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Typical specifications of piezoelectric stack actuators are usually in terms of:
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- Displacement/ Travel range \\([\mu m]\\)
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- Blocked force \\([N]\\)
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- Stiffness \\([N/\mu m]\\)
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- Resolution \\([nm]\\)
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- Length \\([mm]\\)
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#### Displacement and Length {#displacement-and-length}
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The maximum displacement specified is the displacement of the actuator when the maximum voltage is applied and when no load is added.
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Typical strain of Piezoelectric Stack Actuators is \\(0.1\%\\), the free displacement \\(d\\) is then related to the length of piezoelectric stack:
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\\[ d \approx \frac{L}{1000} \\]
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#### Blocked Force {#blocked-force}
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The blocked force is measured by first applying the maximum voltage to the piezoelectric stack without any load.
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Thus, the piezoelectric stack experiences its maximum displacement.
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A force is then applied to return the actuator to its original length.
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This force is measured and recorded as the blocking force.
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The blocking force is also the maximum force that can produce the piezoelectric stack in contact with an infinitely stiff environment.
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#### Stiffness {#stiffness}
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#### Resolution {#resolution}
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The resolution is limited by the noise in the voltage amplified.
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Typical [Signal to Noise Ratio]({{< relref "signal_to_noise_ratio" >}}) of voltage amplified is \\(100dB = 10^{5}\\).
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Thus, for a piezoelectric stack with a displacement \\(L\\), the resolution will be
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\begin{equation}
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r = \frac{L}{10^5}
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\end{equation}
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For a piezoelectric stack with a displacement of \\(100\,[\mu m]\\), the resolution will be \\(\approx 1\,[nm]\\).
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### Piezoelectric Stack experiencing a mass load {#piezoelectric-stack-experiencing-a-mass-load}
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### Piezoelectric Stack in contact with a spring load {#piezoelectric-stack-in-contact-with-a-spring-load}
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## Mechanically Amplified Piezoelectric actuators {#mechanically-amplified-piezoelectric-actuators}
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The Amplified Piezo Actuators principle is presented in <sup id="5decd2b31c4a9842b80c58b56f96590a"><a class="reference-link" href="#claeyssen07_amplif_piezoel_actuat" title="Frank Claeyssen, Le Letty, Barillot, \& Sosnicki, Amplified Piezoelectric Actuators: Static \& Dynamic Applications, {Ferroelectrics}, v(1), 3-14 (2007).">(Frank Claeyssen {\it et al.}, 2007)</a></sup>:
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> The displacement amplification effect is related in a first approximation to the ratio of the shell long axis length to the short axis height.
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> The flatter is the actuator, the higher is the amplification.
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A model of an amplified piezoelectric actuator is described in <sup id="849750850d9986ed326e74bd3c448d03"><a class="reference-link" href="#lucinskis16_dynam_charac" title="@misc{lucinskis16_dynam_charac,
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author = {R. Lucinskis and C. Mangeot},
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title = {Dynamic Characterization of an amplified piezoelectric
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actuator},
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year = 2016,
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}">(Lucinskis \& Mangeot, 2016)</a></sup>.
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| Manufacturers | Links |
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|---------------------|---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
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| Cedrat | [link](https://www.cedrat-technologies.com/en/products/actuators/amplified-piezo-actuators.html) |
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| PiezoDrive | [link](https://www.piezodrive.com/actuators/ap-series-amplified-piezoelectric-actuators/) |
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| Dynamic-Structures | [link](https://www.dynamic-structures.com/category/piezo-actuators-stages) |
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| Thorlabs | [link](https://www.thorlabs.com/newgrouppage9.cfm?objectgroup%5Fid=8700) |
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| Noliac | [link](http://www.noliac.com/products/actuators/amplified-actuators/) |
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| Mechano Transformer | [link](http://www.mechano-transformer.com/en/products/01a%5Factuator%5F5.html), [link](http://www.mechano-transformer.com/en/products/01a%5Factuator%5F3.html), [link](http://www.mechano-transformer.com/en/products/01a%5Factuator%5Fmtkk.html) |
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| CoreMorrow | [link](http://www.coremorrow.com/en/pro-13-1.html) |
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# Bibliography
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<a class="bibtex-entry" id="fleming10_nanop_system_with_force_feedb">Fleming, A., *Nanopositioning system with force feedback for high-performance tracking and vibration control*, IEEE/ASME Transactions on Mechatronics, *15(3)*, 433–447 (2010). http://dx.doi.org/10.1109/tmech.2009.2028422</a> [↩](#c823f68dd2a72b9667a61b3c046b4731)
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<a class="bibtex-entry" id="claeyssen07_amplif_piezoel_actuat">Claeyssen, F., Letty, R. L., Barillot, F., & Sosnicki, O., *Amplified piezoelectric actuators: static \& dynamic applications*, Ferroelectrics, *351(1)*, 3–14 (2007). http://dx.doi.org/10.1080/00150190701351865</a> [↩](#5decd2b31c4a9842b80c58b56f96590a)
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<a class="bibtex-entry" id="lucinskis16_dynam_charac">Lucinskis, R., & Mangeot, C. (2016). *Dynamic characterization of an amplified piezoelectric actuator*. Retrieved from [](). .</a> [↩](#849750850d9986ed326e74bd3c448d03)
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## Backlinks {#backlinks}
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- [Actuators]({{< relref "actuators" >}})
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