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@@ -3,7 +3,7 @@
"http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd">
<html xmlns="http://www.w3.org/1999/xhtml" lang="en" xml:lang="en">
<head>
<!-- 2021-02-02 mar. 18:46 -->
<!-- 2021-02-12 ven. 18:26 -->
<meta http-equiv="Content-Type" content="text/html;charset=utf-8" />
<title>Encoder Renishaw Vionic - Test Bench</title>
<meta name="generator" content="Org mode" />
@@ -39,23 +39,21 @@
<h2>Table of Contents</h2>
<div id="text-table-of-contents">
<ul>
<li><a href="#org3a55927">1. Encoder Model</a></li>
<li><a href="#orgde74ebc">2. Noise Measurement</a>
<li><a href="#orgfa3d11e">1. Expected Performances</a></li>
<li><a href="#orgf23b21b">2. Encoder Model</a></li>
<li><a href="#org9c17913">3. Noise Measurement</a>
<ul>
<li><a href="#org835e359">2.1. Test Bench</a></li>
<li><a href="#org52a3f6f">2.2. Results</a></li>
<li><a href="#orgb9429ef">3.1. Test Bench</a></li>
<li><a href="#orgd9c9c77">3.2. Thermal drifts</a></li>
<li><a href="#org8ec1ba2">3.3. Time Domain signals</a></li>
<li><a href="#org833451c">3.4. Noise Spectral Density</a></li>
<li><a href="#org71a7d07">3.5. Noise Model</a></li>
</ul>
</li>
<li><a href="#orge941dff">3. Linearity Measurement</a>
<li><a href="#org61522ff">4. Linearity Measurement</a>
<ul>
<li><a href="#orga2e857a">3.1. Test Bench</a></li>
<li><a href="#orgc7f59c3">3.2. Results</a></li>
</ul>
</li>
<li><a href="#org42e063d">4. Dynamical Measurement</a>
<ul>
<li><a href="#org4e0f29a">4.1. Test Bench</a></li>
<li><a href="#orgb2f1f77">4.2. Results</a></li>
<li><a href="#orge455e25">4.1. Test Bench</a></li>
<li><a href="#orgc6e5044">4.2. Results</a></li>
</ul>
</li>
</ul>
@@ -65,9 +63,9 @@
<p>This report is also available as a <a href="./test-bench-vionic.pdf">pdf</a>.</p>
<hr>
<div class="note" id="orgf92d65f">
<div class="note" id="orge01a92a">
<p>
You can find below the document of:
You can find below the documentation of:
</p>
<ul class="org-ul">
<li><a href="doc/L-9517-9678-05-A_Data_sheet_VIONiC_series_en.pdf">Vionic Encoder</a></li>
@@ -77,60 +75,81 @@ You can find below the document of:
</div>
<p>
We would like to characterize the encoder measurement system.
</p>
<p>
In this document, we wish to characterize the performances of the encoder measurement system.
In particular, we would like to measure:
</p>
<ul class="org-ul">
<li>Power Spectral Density of the measurement noise</li>
<li>Bandwidth of the sensor</li>
<li>Linearity of the sensor</li>
<li>the measurement noise</li>
<li>the linearity of the sensor</li>
<li>the bandwidth of the sensor</li>
</ul>
<p>
This document is structured as follow:
</p>
<ul class="org-ul">
<li>Section <a href="#org5ddac7d">1</a>: the expected performance of the Vionic encoder system are described</li>
<li>Section <a href="#org55cdc69">2</a>: a simple model of the encoder is developed</li>
<li>Section <a href="#orgb828c8d">3</a>: the noise of the encoder is measured and a model of the noise is identified</li>
<li>Section <a href="#org49975c3">4</a>: the linearity of the sensor is estimated</li>
</ul>
<div id="orgddb4738" class="figure">
<div id="outline-container-orgfa3d11e" class="outline-2">
<h2 id="orgfa3d11e"><span class="section-number-2">1</span> Expected Performances</h2>
<div class="outline-text-2" id="text-1">
<p>
<a id="org5ddac7d"></a>
</p>
<p>
The Vionic encoder is shown in Figure <a href="#orga0ecb6c">1</a>.
</p>
<div id="orga0ecb6c" class="figure">
<p><img src="figs/encoder_vionic.png" alt="encoder_vionic.png" />
</p>
<p><span class="figure-number">Figure 1: </span>Picture of the Vionic Encoder</p>
</div>
<div id="outline-container-org3a55927" class="outline-2">
<h2 id="org3a55927"><span class="section-number-2">1</span> Encoder Model</h2>
<div class="outline-text-2" id="text-1">
<p>
The Encoder is characterized by its dynamics \(G_m(s)\) from the &ldquo;true&rdquo; displacement \(y\) to measured displacement \(y_m\).
Ideally, this dynamics is constant over a wide frequency band with very small phase drop.
From the Renishaw <a href="https://www.renishaw.com/en/how-optical-encoders-work--36979">website</a>:
</p>
<blockquote>
<p>
The VIONiC encoder features the third generation of Renishaw&rsquo;s unique filtering optics that average the contributions from many scale periods and effectively filter out non-periodic features such as dirt.
The nominally square-wave scale pattern is also filtered to leave a pure sinusoidal fringe field at the detector.
Here, a multiple finger structure is employed, fine enough to produce photocurrents in the form of four symmetrically phased signals.
These are combined to remove DC components and produce sine and cosine signal outputs with high spectral purity and low offset while maintaining <b>bandwidth to beyond 500 kHz</b>.
</p>
<p>
It is also characterized by its measurement noise \(n\) that can be described by its Power Spectral Density (PSD).
Fully integrated advanced dynamic signal conditioning, Auto Gain , Auto Balance and Auto Offset Controls combine to ensure <b>ultra-low Sub-Divisional Error (SDE) of typically</b> \(<\pm 15\, nm\).
</p>
<p>
The model of the encoder is shown in Figure <a href="#orga0a431c">2</a>.
This evolution of filtering optics, combined with carefully-selected electronics, provide incremental signals with wide bandwidth achieving a maximum speed of 12 m/s with the lowest positional jitter (noise) of any encoder in its class.
Interpolation is within the readhead, with fine resolution versions being further augmented by additional noise-reducing electronics to achieve <b>jitter of just 1.6 nm RMS</b>.
</p>
</blockquote>
<p>
The expected interpolation errors (non-linearity) is shown in Figure <a href="#orgc38e53f">2</a>.
</p>
<div id="orga0a431c" class="figure">
<p><img src="figs/encoder-model-schematic.png" alt="encoder-model-schematic.png" />
<div id="orgc38e53f" class="figure">
<p><img src="./figs/vionic_expected_noise.png" alt="vionic_expected_noise.png" />
</p>
<p><span class="figure-number">Figure 2: </span>Model of the Encoder</p>
<p><span class="figure-number">Figure 2: </span>Expected interpolation errors for the Vionic Encoder</p>
</div>
<p>
We can also use a transfer function \(G_n(s)\) to shape a noise \(\tilde{n}\) with unity ASD as shown in Figure <a href="#org70392dd">4</a>.
The characteristics as advertise in the manual as well as our specifications are shown in Table <a href="#org091f419">1</a>.
</p>
<div id="org27d4d98" class="figure">
<p><img src="figs/encoder-model-schematic-with-asd.png" alt="encoder-model-schematic-with-asd.png" />
</p>
</div>
<table id="org212ba69" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<caption class="t-above"><span class="table-number">Table 1:</span> Characteristics of the Vionic Encoder</caption>
<table id="org091f419" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<caption class="t-above"><span class="table-number">Table 1:</span> Characteristics of the Vionic compared with the specifications</caption>
<colgroup>
<col class="org-left" />
@@ -143,121 +162,313 @@ We can also use a transfer function \(G_n(s)\) to shape a noise \(\tilde{n}\) wi
<tr>
<th scope="col" class="org-left"><b>Characteristics</b></th>
<th scope="col" class="org-center"><b>Manual</b></th>
<th scope="col" class="org-center"><b>Specifications</b></th>
<th scope="col" class="org-center"><b>Specification</b></th>
</tr>
</thead>
<tbody>
<tr>
<td class="org-left">Range</td>
<td class="org-center">Ruler length</td>
<td class="org-center">&gt; 200 [um]</td>
</tr>
<tr>
<td class="org-left">Resolution</td>
<td class="org-center">2.5 [nm]</td>
<td class="org-center">&lt; 50 [nm rms]</td>
</tr>
<tr>
<td class="org-left">Sub-Divisional Error</td>
<td class="org-center">\(< \pm 15\,nm\)</td>
<td class="org-center">&#xa0;</td>
<td class="org-left">Time Delay</td>
<td class="org-center">&lt; 10 ns</td>
<td class="org-center">&lt; 0.5 ms</td>
</tr>
<tr>
<td class="org-left">Bandwidth</td>
<td class="org-center">To be checked</td>
<td class="org-center">&gt; 5 [kHz]</td>
<td class="org-center">&gt; 500 kHz</td>
<td class="org-center">&gt; 5 kHz</td>
</tr>
<tr>
<td class="org-left">Noise</td>
<td class="org-center">&lt; 1.6 nm rms</td>
<td class="org-center">&lt; 50 nm rms</td>
</tr>
<tr>
<td class="org-left">Linearity</td>
<td class="org-center">&lt; +/- 15 nm</td>
<td class="org-center">&#xa0;</td>
</tr>
<tr>
<td class="org-left">Range</td>
<td class="org-center">Ruler length</td>
<td class="org-center">&gt; 200 um</td>
</tr>
</tbody>
</table>
<div id="org70392dd" class="figure">
<p><img src="./figs/vionic_expected_noise.png" alt="vionic_expected_noise.png" />
</p>
<p><span class="figure-number">Figure 4: </span>Expected interpolation errors for the Vionic Encoder</p>
</div>
</div>
</div>
<div id="outline-container-orgde74ebc" class="outline-2">
<h2 id="orgde74ebc"><span class="section-number-2">2</span> Noise Measurement</h2>
<div id="outline-container-orgf23b21b" class="outline-2">
<h2 id="orgf23b21b"><span class="section-number-2">2</span> Encoder Model</h2>
<div class="outline-text-2" id="text-2">
<p>
<a id="orgcac09c5"></a>
<a id="org55cdc69"></a>
</p>
<p>
The Encoder is characterized by its dynamics \(G_m(s)\) from the &ldquo;true&rdquo; displacement \(y\) to measured displacement \(y_m\).
Ideally, this dynamics is constant over a wide frequency band with very small phase drop.
</p>
<p>
It is also characterized by its measurement noise \(n\) that can be described by its Power Spectral Density (PSD) \(\Gamma_n(\omega)\).
</p>
<p>
The model of the encoder is shown in Figure <a href="#org4fdb73a">3</a>.
</p>
<div id="org4fdb73a" class="figure">
<p><img src="figs/encoder-model-schematic.png" alt="encoder-model-schematic.png" />
</p>
<p><span class="figure-number">Figure 3: </span>Model of the Encoder</p>
</div>
<p>
We can also use a transfer function \(G_n(s)\) to shape a noise \(\tilde{n}\) with unity ASD as shown in Figure <a href="#orgc38e53f">2</a>.
</p>
<div id="org793433f" class="figure">
<p><img src="figs/encoder-model-schematic-with-asd.png" alt="encoder-model-schematic-with-asd.png" />
</p>
</div>
<div id="outline-container-org835e359" class="outline-3">
<h3 id="org835e359"><span class="section-number-3">2.1</span> Test Bench</h3>
<div class="outline-text-3" id="text-2-1">
</div>
</div>
<div id="outline-container-org9c17913" class="outline-2">
<h2 id="org9c17913"><span class="section-number-2">3</span> Noise Measurement</h2>
<div class="outline-text-2" id="text-3">
<p>
<a id="orgb828c8d"></a>
</p>
<p>
This part is structured as follow:
</p>
<ul class="org-ul">
<li>Section <a href="#org8cfb922">3.1</a>: the measurement bench is described</li>
<li>Section <a href="#orgfd5ce06">3.2</a>: long measurement is performed to estimate the low frequency drifts in the measurement</li>
<li>Section <a href="#org4df45c5">3.3</a>: high frequency measurements are performed to estimate the high frequency noise</li>
<li>Section <a href="#orgd464562">3.4</a>: the Spectral density of the measurement noise is estimated</li>
<li>Section <a href="#orgd6ec52a">3.5</a>: finally, the measured noise is modeled</li>
</ul>
</div>
<div id="outline-container-orgb9429ef" class="outline-3">
<h3 id="orgb9429ef"><span class="section-number-3">3.1</span> Test Bench</h3>
<div class="outline-text-3" id="text-3-1">
<p>
<a id="org8cfb922"></a>
</p>
<p>
To measure the noise \(n\) of the encoder, one can rigidly fix the head and the ruler together such that no motion should be measured.
Then, the measured signal \(y_m\) corresponds to the noise \(n\).
</p>
<p>
The measurement bench is shown in Figures <a href="#org4037996">5</a> and <a href="#org06e2754">6</a>.
Note that the bench is then covered with a &ldquo;plastic bubble sheet&rdquo; in order to keep disturbances as small as possible.
</p>
<div id="org4037996" class="figure">
<p><img src="figs/IMG_20210211_170554.jpg" alt="IMG_20210211_170554.jpg" />
</p>
<p><span class="figure-number">Figure 5: </span>Top view picture of the measurement bench</p>
</div>
<div id="org06e2754" class="figure">
<p><img src="figs/IMG_20210211_170607.jpg" alt="IMG_20210211_170607.jpg" />
</p>
<p><span class="figure-number">Figure 6: </span>Side view picture of the measurement bench</p>
</div>
</div>
</div>
<div id="outline-container-org52a3f6f" class="outline-3">
<h3 id="org52a3f6f"><span class="section-number-3">2.2</span> Results</h3>
<div class="outline-text-3" id="text-2-2">
<div id="outline-container-orgd9c9c77" class="outline-3">
<h3 id="orgd9c9c77"><span class="section-number-3">3.2</span> Thermal drifts</h3>
<div class="outline-text-3" id="text-3-2">
<p>
First we load the data.
<a id="orgfd5ce06"></a>
Measured displacement were recording during approximately 40 hours with a sample frequency of 100Hz.
A first order low pass filter with a corner frequency of 1Hz
</p>
<div class="org-src-container">
<pre class="src src-matlab">load(<span class="org-string">'noise_meas_100s_20kHz.mat'</span>, <span class="org-string">'t'</span>, <span class="org-string">'x'</span>);
x = x <span class="org-type">-</span> mean(x);
<pre class="src src-matlab">enc_l = load(<span class="org-string">'mat/noise_meas_40h_100Hz_1.mat'</span>, <span class="org-string">'t'</span>, <span class="org-string">'x'</span>);
</pre>
</div>
<p>
The time domain data are shown in Figure <a href="#orgc55250e">4</a>.
The measured time domain data are shown in Figure <a href="#org1454db4">7</a>.
</p>
<div id="org1454db4" class="figure">
<p><img src="figs/vionic_drifts_time.png" alt="vionic_drifts_time.png" />
</p>
<p><span class="figure-number">Figure 7: </span>Measured thermal drifts</p>
</div>
<p>
<img src="figs/vionic_noise_time.png" alt="vionic_noise_time.png" />
The amplitude spectral density is computed and shown in Figure <a href="#orgfb661b7">5</a>.
The measured data seems to experience a constant drift after approximately 20 hour.
Let&rsquo;s estimate this drift.
</p>
<pre class="example">
The mean drift is approximately 60.9 [nm/hour] or 1.0 [nm/min]
</pre>
<div id="orgfb661b7" class="figure">
<p>
Comparison between the data and the linear fit is shown in Figure <a href="#orgfbe5f53">8</a>.
</p>
<div id="orgfbe5f53" class="figure">
<p><img src="figs/vionic_drifts_linear_fit.png" alt="vionic_drifts_linear_fit.png" />
</p>
<p><span class="figure-number">Figure 8: </span>Measured drift and linear fit</p>
</div>
<p>
Let&rsquo;s now estimate the Power Spectral Density of the measured displacement.
The obtained low frequency ASD is shown in Figure <a href="#org42f3fad">9</a>.
</p>
<div id="org42f3fad" class="figure">
<p><img src="figs/vionic_noise_asd_low_freq.png" alt="vionic_noise_asd_low_freq.png" />
</p>
<p><span class="figure-number">Figure 9: </span>Amplitude Spectral density of the measured displacement</p>
</div>
</div>
</div>
<div id="outline-container-org8ec1ba2" class="outline-3">
<h3 id="org8ec1ba2"><span class="section-number-3">3.3</span> Time Domain signals</h3>
<div class="outline-text-3" id="text-3-3">
<p>
<a id="org4df45c5"></a>
</p>
<p>
Then, and for all the 7 encoders, we record the measured motion during 100s with a sampling frequency of 20kHz.
</p>
<p>
The raw measured data as well as the low pass filtered data (using a first order low pass filter with a cut-off at 10Hz) are shown in Figure <a href="#org28ad5da">10</a>.
</p>
<div id="org28ad5da" class="figure">
<p><img src="figs/vionic_noise_raw_lpf.png" alt="vionic_noise_raw_lpf.png" />
</p>
<p><span class="figure-number">Figure 10: </span>Time domain measurement (raw data and low pass filtered data with first order 10Hz LPF)</p>
</div>
<p>
The time domain data for all the encoders are compared in Figure <a href="#org1656541">11</a>.
</p>
<p>
We can see some drifts that are in the order of few nm to 20nm per minute.
As shown in Section <a href="#orgfd5ce06">3.2</a>, these drifts should diminish over time down to 1nm/min.
</p>
<div id="org1656541" class="figure">
<p><img src="figs/vionic_noise_time.png" alt="vionic_noise_time.png" />
</p>
<p><span class="figure-number">Figure 11: </span>Comparison of the time domain measurement</p>
</div>
</div>
</div>
<div id="outline-container-org833451c" class="outline-3">
<h3 id="org833451c"><span class="section-number-3">3.4</span> Noise Spectral Density</h3>
<div class="outline-text-3" id="text-3-4">
<p>
<a id="orgd464562"></a>
</p>
<p>
The amplitude spectral densities for all the encoder are computed and shown in Figure <a href="#org7e93bb1">12</a>.
</p>
<div id="org7e93bb1" class="figure">
<p><img src="figs/vionic_noise_asd.png" alt="vionic_noise_asd.png" />
</p>
<p><span class="figure-number">Figure 5: </span>Amplitude Spectral Density of the measured signal</p>
<p><span class="figure-number">Figure 12: </span>Amplitude Spectral Density of the measured signal</p>
</div>
<p>
We can combine these measurements with the low frequency noise computed in Section <a href="#orgfd5ce06">3.2</a>.
The obtained ASD is shown in Figure <a href="#org7e54160">13</a>.
</p>
<div id="org7e54160" class="figure">
<p><img src="figs/vionic_noise_asd_combined.png" alt="vionic_noise_asd_combined.png" />
</p>
<p><span class="figure-number">Figure 13: </span>Combined low frequency and high frequency noise measurements</p>
</div>
</div>
</div>
<div id="outline-container-org71a7d07" class="outline-3">
<h3 id="org71a7d07"><span class="section-number-3">3.5</span> Noise Model</h3>
<div class="outline-text-3" id="text-3-5">
<p>
<a id="orgd6ec52a"></a>
</p>
<p>
Let&rsquo;s create a transfer function that approximate the measured noise of the encoder.
</p>
<div class="org-src-container">
<pre class="src src-matlab">Gn_e = 1.8e<span class="org-type">-</span>11<span class="org-type">/</span>(1 <span class="org-type">+</span> s<span class="org-type">/</span>2<span class="org-type">/</span><span class="org-constant">pi</span><span class="org-type">/</span>5e3);
<pre class="src src-matlab">Gn_e = 1.8e<span class="org-type">-</span>11<span class="org-type">/</span>(1 <span class="org-type">+</span> s<span class="org-type">/</span>2<span class="org-type">/</span><span class="org-constant">pi</span><span class="org-type">/</span>1e4);
</pre>
</div>
<p>
The amplitude of the transfer function and the measured ASD are shown in Figure <a href="#org6d60818">6</a>.
The amplitude of the transfer function and the measured ASD are shown in Figure <a href="#org5d39757">14</a>.
</p>
<div id="org6d60818" class="figure">
<div id="org5d39757" class="figure">
<p><img src="figs/vionic_noise_asd_model.png" alt="vionic_noise_asd_model.png" />
</p>
<p><span class="figure-number">Figure 6: </span>Measured ASD of the noise and modelled one</p>
<p><span class="figure-number">Figure 14: </span>Measured ASD of the noise and modeled one</p>
</div>
</div>
</div>
</div>
<div id="outline-container-orge941dff" class="outline-2">
<h2 id="orge941dff"><span class="section-number-2">3</span> Linearity Measurement</h2>
<div class="outline-text-2" id="text-3">
<p>
<a id="org0c843ed"></a>
The cumulative amplitude spectrum is now computed and shown in Figure <a href="#org05b258c">15</a>.
</p>
<p>
We can see that the Root Mean Square value of the measurement noise is \(\approx 1.6 \, nm\) as advertise in the datasheet.
</p>
<div id="org05b258c" class="figure">
<p><img src="figs/vionic_noise_cas_model.png" alt="vionic_noise_cas_model.png" />
</p>
<p><span class="figure-number">Figure 15: </span>Meassured CAS of the noise and modeled one</p>
</div>
</div>
</div>
</div>
<div id="outline-container-org61522ff" class="outline-2">
<h2 id="org61522ff"><span class="section-number-2">4</span> Linearity Measurement</h2>
<div class="outline-text-2" id="text-4">
<p>
<a id="org49975c3"></a>
</p>
</div>
<div id="outline-container-orga2e857a" class="outline-3">
<h3 id="orga2e857a"><span class="section-number-3">3.1</span> Test Bench</h3>
<div class="outline-text-3" id="text-3-1">
<div id="outline-container-orge455e25" class="outline-3">
<h3 id="orge455e25"><span class="section-number-3">4.1</span> Test Bench</h3>
<div class="outline-text-3" id="text-4-1">
<p>
In order to measure the linearity, we have to compare the measured displacement with a reference sensor with a known linearity.
An interferometer or capacitive sensor should work fine.
@@ -265,7 +476,7 @@ An actuator should also be there so impose a displacement.
</p>
<p>
One idea is to use the test-bench shown in Figure <a href="#org793dd45">7</a>.
One idea is to use the test-bench shown in Figure <a href="#org177aa2c">16</a>.
</p>
<p>
@@ -278,38 +489,22 @@ As the interferometer has a very large bandwidth, we should be able to estimate
</p>
<div id="org793dd45" class="figure">
<div id="org177aa2c" class="figure">
<p><img src="figs/test_bench_encoder_calibration.png" alt="test_bench_encoder_calibration.png" />
</p>
<p><span class="figure-number">Figure 7: </span>Schematic of the test bench</p>
<p><span class="figure-number">Figure 16: </span>Schematic of the test bench</p>
</div>
</div>
</div>
<div id="outline-container-orgc7f59c3" class="outline-3">
<h3 id="orgc7f59c3"><span class="section-number-3">3.2</span> Results</h3>
</div>
</div>
<div id="outline-container-org42e063d" class="outline-2">
<h2 id="org42e063d"><span class="section-number-2">4</span> Dynamical Measurement</h2>
<div class="outline-text-2" id="text-4">
<p>
<a id="org2b52f4b"></a>
</p>
</div>
<div id="outline-container-org4e0f29a" class="outline-3">
<h3 id="org4e0f29a"><span class="section-number-3">4.1</span> Test Bench</h3>
</div>
<div id="outline-container-orgb2f1f77" class="outline-3">
<h3 id="orgb2f1f77"><span class="section-number-3">4.2</span> Results</h3>
<div id="outline-container-orgc6e5044" class="outline-3">
<h3 id="orgc6e5044"><span class="section-number-3">4.2</span> Results</h3>
</div>
</div>
</div>
<div id="postamble" class="status">
<p class="author">Author: Dehaeze Thomas</p>
<p class="date">Created: 2021-02-02 mar. 18:46</p>
<p class="date">Created: 2021-02-12 ven. 18:26</p>
</div>
</body>
</html>

View File

@@ -16,7 +16,6 @@
#+LaTeX_CLASS: scrreprt
#+LaTeX_CLASS_OPTIONS: [a4paper, 10pt, DIV=12, parskip=full]
#+LaTeX_HEADER_EXTRA: \input{preamble.tex}
#+EXPORT_FILE_NAME: test-bench-vionic.tex
#+PROPERTY: header-args:matlab :session *MATLAB*
#+PROPERTY: header-args:matlab+ :comments org
@@ -50,28 +49,75 @@
* Introduction :ignore:
#+begin_note
You can find below the document of:
You can find below the documentation of:
- [[file:doc/L-9517-9678-05-A_Data_sheet_VIONiC_series_en.pdf][Vionic Encoder]]
- [[file:doc/L-9517-9862-01-C_Data_sheet_RKLC_EN.pdf][Linear Scale]]
#+end_note
We would like to characterize the encoder measurement system.
In this document, we wish to characterize the performances of the encoder measurement system.
In particular, we would like to measure:
- Power Spectral Density of the measurement noise
- Bandwidth of the sensor
- Linearity of the sensor
- the measurement noise
- the linearity of the sensor
- the bandwidth of the sensor
This document is structured as follow:
- Section [[sec:vionic_expected_performances]]: the expected performance of the Vionic encoder system are described
- Section [[sec:encoder_model]]: a simple model of the encoder is developed
- Section [[sec:noise_measurement]]: the noise of the encoder is measured and a model of the noise is identified
- Section [[sec:linearity_measurement]]: the linearity of the sensor is estimated
* Expected Performances
<<sec:vionic_expected_performances>>
The Vionic encoder is shown in Figure [[fig:encoder_vionic]].
#+name: fig:encoder_vionic
#+caption: Picture of the Vionic Encoder
#+attr_latex: :width 0.6\linewidth
[[file:figs/encoder_vionic.png]]
From the Renishaw [[https://www.renishaw.com/en/how-optical-encoders-work--36979][website]]:
#+begin_quote
The VIONiC encoder features the third generation of Renishaw's unique filtering optics that average the contributions from many scale periods and effectively filter out non-periodic features such as dirt.
The nominally square-wave scale pattern is also filtered to leave a pure sinusoidal fringe field at the detector.
Here, a multiple finger structure is employed, fine enough to produce photocurrents in the form of four symmetrically phased signals.
These are combined to remove DC components and produce sine and cosine signal outputs with high spectral purity and low offset while maintaining *bandwidth to beyond 500 kHz*.
Fully integrated advanced dynamic signal conditioning, Auto Gain , Auto Balance and Auto Offset Controls combine to ensure *ultra-low Sub-Divisional Error (SDE) of typically* $<\pm 15\, nm$.
This evolution of filtering optics, combined with carefully-selected electronics, provide incremental signals with wide bandwidth achieving a maximum speed of 12 m/s with the lowest positional jitter (noise) of any encoder in its class.
Interpolation is within the readhead, with fine resolution versions being further augmented by additional noise-reducing electronics to achieve *jitter of just 1.6 nm RMS*.
#+end_quote
The expected interpolation errors (non-linearity) is shown in Figure [[fig:vionic_expected_noise]].
#+name: fig:vionic_expected_noise
#+attr_latex: :width \linewidth
#+caption: Expected interpolation errors for the Vionic Encoder
[[file:./figs/vionic_expected_noise.png]]
The characteristics as advertise in the manual as well as our specifications are shown in Table [[tab:vionic_characteristics]].
#+name: tab:vionic_characteristics
#+caption: Characteristics of the Vionic compared with the specifications
#+attr_latex: :environment tabularx :width 0.6\linewidth :align lcc
#+attr_latex: :center t :booktabs t :float t
| <l> | <c> | <c> |
| *Characteristics* | *Manual* | *Specification* |
|-------------------+--------------+-----------------|
| Time Delay | < 10 ns | < 0.5 ms |
| Bandwidth | > 500 kHz | > 5 kHz |
| Noise | < 1.6 nm rms | < 50 nm rms |
| Linearity | < +/- 15 nm | |
| Range | Ruler length | > 200 um |
* Encoder Model
<<sec:encoder_model>>
The Encoder is characterized by its dynamics $G_m(s)$ from the "true" displacement $y$ to measured displacement $y_m$.
Ideally, this dynamics is constant over a wide frequency band with very small phase drop.
It is also characterized by its measurement noise $n$ that can be described by its Power Spectral Density (PSD).
It is also characterized by its measurement noise $n$ that can be described by its Power Spectral Density (PSD) $\Gamma_n(\omega)$.
The model of the encoder is shown in Figure [[fig:encoder-model-schematic]].
@@ -121,31 +167,37 @@ We can also use a transfer function $G_n(s)$ to shape a noise $\tilde{n}$ with u
#+RESULTS:
[[file:figs/encoder-model-schematic-with-asd.png]]
#+name: tab:vionic_characteristics_manual
#+caption: Characteristics of the Vionic Encoder
#+attr_latex: :environment tabularx :width \linewidth :align lXX
#+attr_latex: :center t :booktabs t :float t
| <l> | <c> | <c> |
| *Characteristics* | *Manual* | *Specifications* |
|----------------------+----------------+------------------|
| Range | Ruler length | > 200 [um] |
| Resolution | 2.5 [nm] | < 50 [nm rms] |
| Sub-Divisional Error | $< \pm 15\,nm$ | |
| Bandwidth | To be checked | > 5 [kHz] |
#+name: fig:vionic_expected_noise
#+attr_latex: :width \linewidth
#+caption: Expected interpolation errors for the Vionic Encoder
[[file:./figs/vionic_expected_noise.png]]
* Noise Measurement
<<sec:noise_measurement>>
** Introduction :ignore:
This part is structured as follow:
- Section [[sec:noise_bench]]: the measurement bench is described
- Section [[sec:thermal_drifts]]: long measurement is performed to estimate the low frequency drifts in the measurement
- Section [[sec:vionic_noise_time]]: high frequency measurements are performed to estimate the high frequency noise
- Section [[sec:noise_asd]]: the Spectral density of the measurement noise is estimated
- Section [[sec:vionic_noise_model]]: finally, the measured noise is modeled
** Test Bench
<<sec:noise_bench>>
To measure the noise $n$ of the encoder, one can rigidly fix the head and the ruler together such that no motion should be measured.
Then, the measured signal $y_m$ corresponds to the noise $n$.
The measurement bench is shown in Figures [[fig:meas_bench_top_view]] and [[fig:meas_bench_side_view]].
Note that the bench is then covered with a "plastic bubble sheet" in order to keep disturbances as small as possible.
#+name: fig:meas_bench_top_view
#+caption: Top view picture of the measurement bench
#+attr_latex: :width 0.8\linewidth
[[file:figs/IMG_20210211_170554.jpg]]
#+name: fig:meas_bench_side_view
#+caption: Side view picture of the measurement bench
#+attr_latex: :width 0.8\linewidth
[[file:figs/IMG_20210211_170607.jpg]]
** Matlab Init :noexport:ignore:
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
<<matlab-dir>>
@@ -164,23 +216,170 @@ addpath('./matlab/');
addpath('./mat/');
#+end_src
** Results
First we load the data.
** Thermal drifts
<<sec:thermal_drifts>>
Measured displacement were recording during approximately 40 hours with a sample frequency of 100Hz.
A first order low pass filter with a corner frequency of 1Hz
#+begin_src matlab
load('noise_meas_100s_20kHz.mat', 't', 'x');
x = x - mean(x);
enc_l = load('mat/noise_meas_40h_100Hz_1.mat', 't', 'x');
#+end_src
The measured time domain data are shown in Figure [[fig:vionic_drifts_time]].
#+begin_src matlab :exports none
enc_l.x = enc_l.x(enc_l.t > 5); % Remove first 5 seconds
enc_l.t = enc_l.t(enc_l.t > 5); % Remove first 5 seconds
enc_l.t = enc_l.t - enc_l.t(1); % Start at 0
enc_l.x = enc_l.x - mean(enc_l.x(enc_l.t < 1)); % Start at zero displacement
#+end_src
The time domain data are shown in Figure [[fig:vionic_noise_time]].
#+begin_src matlab :exports none
figure;
hold on;
plot(t, 1e9*x, '.', 'DisplayName', 'Raw');
plot(t, 1e9*lsim(1/(1 + s/2/pi/500), x, t), 'DisplayName', 'LPF - 500Hz')
plot(enc_l.t/3600, 1e9*enc_l.x, '-');
hold off;
xlabel('Time [h]');
ylabel('Displacement [nm]');
xlim([0, 40]);
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
exportFig('figs/vionic_drifts_time.pdf', 'width', 'wide', 'height', 'normal');
#+end_src
#+name: fig:vionic_drifts_time
#+caption: Measured thermal drifts
#+RESULTS:
[[file:figs/vionic_drifts_time.png]]
The measured data seems to experience a constant drift after approximately 20 hour.
Let's estimate this drift.
#+begin_src matlab :exports none
t0 = 20*3600; % Start time [s]
x_stab = enc_l.x(enc_l.t > t0);
x_stab = x_stab - x_stab(1);
t_stab = enc_l.t(enc_l.t > t0);
t_stab = t_stab - t_stab(1);
#+end_src
#+begin_src matlab :results value replace :exports results
sprintf('The mean drift is approximately %.1f [nm/hour] or %.1f [nm/min]', 3600*1e9*(t_stab\x_stab), 60*1e9*(t_stab\x_stab))
#+end_src
#+RESULTS:
: The mean drift is approximately 60.9 [nm/hour] or 1.0 [nm/min]
Comparison between the data and the linear fit is shown in Figure [[fig:vionic_drifts_linear_fit]].
#+begin_src matlab :exports none
figure;
hold on;
plot(t_stab/3600, 1e9*x_stab, '-');
plot(t_stab/3600, 1e9*t_stab*(t_stab\x_stab), 'k--');
hold off;
xlabel('Time [h]');
ylabel('Displacement [nm]');
xlim([0, 20]);
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
exportFig('figs/vionic_drifts_linear_fit.pdf', 'width', 'wide', 'height', 'normal');
#+end_src
#+name: fig:vionic_drifts_linear_fit
#+caption: Measured drift and linear fit
#+RESULTS:
[[file:figs/vionic_drifts_linear_fit.png]]
Let's now estimate the Power Spectral Density of the measured displacement.
The obtained low frequency ASD is shown in Figure [[fig:vionic_noise_asd_low_freq]].
#+begin_src matlab :exports none
% Compute sampling Frequency
Ts = (enc_l.t(end) - enc_l.t(1))/(length(enc_l.t)-1);
Fs = 1/Ts;
% Hannning Windows
win = hanning(ceil(60*10/Ts));
[pxx_l, f_l] = pwelch(x_stab, win, [], [], Fs);
#+end_src
#+begin_src matlab :exports none
figure;
hold on;
plot(f_l, sqrt(pxx_l))
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
xlabel('Frequency [Hz]'); ylabel('ASD [$m/\sqrt{Hz}$]');
xlim([1e-2, 1e0]);
ylim([1e-11, 1e-8]);
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
exportFig('figs/vionic_noise_asd_low_freq.pdf', 'width', 'side', 'height', 'normal');
#+end_src
#+name: fig:vionic_noise_asd_low_freq
#+caption: Amplitude Spectral density of the measured displacement
#+RESULTS:
[[file:figs/vionic_noise_asd_low_freq.png]]
** Time Domain signals
<<sec:vionic_noise_time>>
Then, and for all the 7 encoders, we record the measured motion during 100s with a sampling frequency of 20kHz.
#+begin_src matlab :exports none
%% Load all the measurements
enc = {};
for i = 1:7
enc(i) = {load(['mat/noise_meas_100s_20kHz_' num2str(i) '.mat'], 't', 'x')};
end
#+end_src
#+begin_src matlab :exports none
%% Remove initial offset
for i = 1:7
enc{i}.x = enc{i}.x - mean(enc{i}.x(1:1000));
end
#+end_src
The raw measured data as well as the low pass filtered data (using a first order low pass filter with a cut-off at 10Hz) are shown in Figure [[fig:vionic_noise_raw_lpf]].
#+begin_src matlab :exports none
figure;
hold on;
plot(enc{1}.t, 1e9*enc{1}.x, '.', 'DisplayName', 'Enc 1 - Raw');
plot(enc{1}.t, 1e9*lsim(1/(1 + s/2/pi/10), enc{1}.x, enc{1}.t), '-', 'DisplayName', 'Enc 1 - LPF');
hold off;
xlabel('Time [s]');
ylabel('Displacement [nm]');
legend('location', 'northeast');
legend('location', 'northwest');
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
exportFig('figs/vionic_noise_raw_lpf.pdf', 'width', 'wide', 'height', 'normal');
#+end_src
#+name: fig:vionic_noise_raw_lpf
#+caption: Time domain measurement (raw data and low pass filtered data with first order 10Hz LPF)
#+RESULTS:
[[file:figs/vionic_noise_raw_lpf.png]]
The time domain data for all the encoders are compared in Figure [[fig:vionic_noise_time]].
We can see some drifts that are in the order of few nm to 20nm per minute.
As shown in Section [[sec:thermal_drifts]], these drifts should diminish over time down to 1nm/min.
#+begin_src matlab :exports none
figure;
hold on;
for i=1:7
plot(enc{i}.t, 1e9*lsim(1/(1 + s/2/pi/10), enc{i}.x, enc{i}.t), '.', ...
'DisplayName', sprintf('Enc %i', i));
end
hold off;
xlabel('Time [s]');
ylabel('Displacement [nm]');
legend('location', 'northwest');
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
@@ -188,31 +387,43 @@ exportFig('figs/vionic_noise_time.pdf', 'width', 'wide', 'height', 'normal');
#+end_src
#+name: fig:vionic_noise_time
#+caption: Time domain measurement (raw data and low pass filtered data)
#+caption: Comparison of the time domain measurement
#+RESULTS:
[[file:figs/vionic_noise_time.png]]
The amplitude spectral density is computed and shown in Figure [[fig:vionic_noise_asd]].
** Noise Spectral Density
<<sec:noise_asd>>
The amplitude spectral densities for all the encoder are computed and shown in Figure [[fig:vionic_noise_asd]].
#+begin_src matlab :exports none
% Compute sampling Frequency
Ts = (t(end) - t(1))/(length(t)-1);
Ts = (enc{1}.t(end) - enc{1}.t(1))/(length(enc{1}.t)-1);
Fs = 1/Ts;
#+end_src
#+begin_src matlab :exports none
% Hannning Windows
win = hanning(ceil(0.5*Fs));
win = hanning(ceil(0.5/Ts));
[pxx, f] = pwelch(x, win, [], [], Fs);
[pxx, f] = pwelch(enc{1}.x, win, [], [], Fs);
enc{1}.pxx = pxx;
for i=2:7
[pxx, ~] = pwelch(enc{i}.x, win, [], [], Fs);
enc{i}.pxx = pxx;
end
#+end_src
#+begin_src matlab :exports none
figure;
plot(f, sqrt(pxx));
hold on;
for i=1:7
plot(f, sqrt(enc{i}.pxx), ...
'DisplayName', sprintf('Enc %i', i));
end
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
xlabel('Frequency [Hz]'); ylabel('ASD [$m/\sqrt{Hz}$]');
xlim([1, Fs/2]);
xlim([10, Fs/2]);
ylim([1e-11, 1e-9]);
legend('location', 'northeast');
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
@@ -224,9 +435,36 @@ exportFig('figs/vionic_noise_asd.pdf', 'width', 'wide', 'height', 'normal');
#+RESULTS:
[[file:figs/vionic_noise_asd.png]]
We can combine these measurements with the low frequency noise computed in Section [[sec:thermal_drifts]].
The obtained ASD is shown in Figure [[fig:vionic_noise_asd_combined]].
#+begin_src matlab :exports none
[pxx_h, f_h] = pwelch(enc{2}.x, hanning(ceil(10/Ts)), [], [], Fs);
figure;
hold on;
plot(f_h(f_h>0.6), sqrt(pxx_h(f_h>0.6)), 'k-');
plot(f_l(f_l<1), sqrt(pxx_l(f_l<1)), 'k-')
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
xlabel('Frequency [Hz]'); ylabel('ASD [$m/\sqrt{Hz}$]');
xlim([1e-2, Fs/2]);
ylim([1e-12, 1e-8]);
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
exportFig('figs/vionic_noise_asd_combined.pdf', 'width', 'wide', 'height', 'normal');
#+end_src
#+name: fig:vionic_noise_asd_combined
#+caption: Combined low frequency and high frequency noise measurements
#+RESULTS:
[[file:figs/vionic_noise_asd_combined.png]]
** Noise Model
<<sec:vionic_noise_model>>
Let's create a transfer function that approximate the measured noise of the encoder.
#+begin_src matlab
Gn_e = 1.8e-11/(1 + s/2/pi/5e3);
Gn_e = 1.8e-11/(1 + s/2/pi/1e4);
#+end_src
The amplitude of the transfer function and the measured ASD are shown in Figure [[fig:vionic_noise_asd_model]].
@@ -234,13 +472,18 @@ The amplitude of the transfer function and the measured ASD are shown in Figure
#+begin_src matlab :exports none
figure;
hold on;
plot(f, sqrt(pxx));
plot(f, abs(squeeze(freqresp(Gn_e, f, 'Hz'))), 'k--');
plot(f, sqrt(enc{1}.pxx), 'color', [0, 0, 0, 0.5], 'DisplayName', '$\Gamma_n(\omega)$');
for i=2:7
plot(f, sqrt(enc{i}.pxx), 'color', [0, 0, 0, 0.5], ...
'HandleVisibility', 'off');
end
plot(f, abs(squeeze(freqresp(Gn_e, f, 'Hz'))), 'r-', 'DisplayName', '$|G_n(j\omega)|$');
hold off;
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
xlabel('Frequency [Hz]'); ylabel('ASD [$m/\sqrt{Hz}$]');
xlim([1, Fs/2]);
ylim([1e-11, 1e-9]);
xlim([10, Fs/2]);
ylim([1e-11, 1e-10]);
legend('location', 'northeast');
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
@@ -248,9 +491,47 @@ exportFig('figs/vionic_noise_asd_model.pdf', 'width', 'wide', 'height', 'normal'
#+end_src
#+name: fig:vionic_noise_asd_model
#+caption: Measured ASD of the noise and modelled one
#+caption: Measured ASD of the noise and modeled one
#+RESULTS:
[[file:figs/vionic_noise_asd_model.png]]
The cumulative amplitude spectrum is now computed and shown in Figure [[fig:vionic_noise_cas_model]].
We can see that the Root Mean Square value of the measurement noise is $\approx 1.6 \, nm$ as advertise in the datasheet.
#+begin_src matlab :exports none
for i = 1:7
enc{i}.CPS = flip(-cumtrapz(flip(f), flip(enc{i}.pxx)));
end
CAS_Gn = flip(-cumtrapz(flip(f), flip(abs(squeeze(freqresp(Gn_e, f, 'Hz'))).^2)));
#+end_src
#+begin_src matlab :exports none
figure;
hold on;
plot(f, sqrt(enc{1}.CPS), 'color', [0, 0, 0, 0.5], 'DisplayName', '$CAS_n(\omega)$');
for i=2:7
plot(f, sqrt(enc{i}.CPS), 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off');
end
plot(f, sqrt(CAS_Gn), 'r-', 'DisplayName', 'model');
hold off;
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
xlabel('Frequency [Hz]'); ylabel('CPS [$m$]');
xlim([10, Fs/2]);
ylim([1e-10, 1e-8]);
legend('location', 'northeast');
#+end_src
#+begin_src matlab :tangle no :exports results :results file replace
exportFig('figs/vionic_noise_cas_model.pdf', 'width', 'wide', 'height', 'normal');
#+end_src
#+name: fig:vionic_noise_cas_model
#+caption: Meassured CAS of the noise and modeled one
#+RESULTS:
[[file:figs/vionic_noise_cas_model.png]]
* Linearity Measurement
<<sec:linearity_measurement>>
** Test Bench
@@ -289,26 +570,3 @@ addpath('./mat/');
** Results
* Dynamical Measurement
<<sec:dynamical_measurement>>
** Test Bench
** Matlab Init :noexport:ignore:
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
<<matlab-dir>>
#+end_src
#+begin_src matlab :exports none :results silent :noweb yes
<<matlab-init>>
#+end_src
#+begin_src matlab :tangle no
addpath('./matlab/mat/');
addpath('./matlab/');
#+end_src
#+begin_src matlab :eval no
addpath('./mat/');
#+end_src
** Results

Binary file not shown.