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"http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd"> "http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd">
<html xmlns="http://www.w3.org/1999/xhtml" lang="en" xml:lang="en"> <html xmlns="http://www.w3.org/1999/xhtml" lang="en" xml:lang="en">
<head> <head>
<!-- 2021-02-19 ven. 11:13 --> <!-- 2021-02-19 ven. 11:20 -->
<meta http-equiv="Content-Type" content="text/html;charset=utf-8" /> <meta http-equiv="Content-Type" content="text/html;charset=utf-8" />
<title>NASS - Short Stroke Metrology</title> <title>NASS - Short Stroke Metrology</title>
<meta name="generator" content="Org mode" /> <meta name="generator" content="Org mode" />
@ -39,10 +39,10 @@
<h2>Table of Contents</h2> <h2>Table of Contents</h2>
<div id="text-table-of-contents"> <div id="text-table-of-contents">
<ul> <ul>
<li><a href="#orgbab5500">1. Measurement Principle</a></li> <li><a href="#org59912f6">1. Measurement Principle</a></li>
<li><a href="#org8f0a94b">2. X-Y-Z measurement</a></li> <li><a href="#orge0aedba">2. X-Y-Z measurement</a></li>
<li><a href="#orgda8f2a5">3. Tilt measurement</a></li> <li><a href="#orgdd43e82">3. Tilt measurement</a></li>
<li><a href="#org6ff8891">4. Conclusion</a></li> <li><a href="#orgbaaa145">4. Conclusion</a></li>
</ul> </ul>
</div> </div>
</div> </div>
@ -58,22 +58,22 @@ The goal of this document is to analyze the feasibility of a short stroke metrol
It is structured as follow: It is structured as follow:
</p> </p>
<ul class="org-ul"> <ul class="org-ul">
<li>Section <a href="#org81efe49">1</a>: the meaurement principle is described.</li> <li>Section <a href="#orgc196cb4">1</a>: the meaurement principle is described.</li>
<li>Section <a href="#orga41b53c">2</a>: the requirements for the interferometers measuring translations are described</li> <li>Section <a href="#org54a9efd">2</a>: the requirements for the interferometers measuring translations are described</li>
<li>Section <a href="#org8b209d1">3</a>: the same is done for the rotations</li> <li>Section <a href="#org55ec5cf">3</a>: the same is done for the rotations</li>
</ul> </ul>
<div id="outline-container-orgbab5500" class="outline-2"> <div id="outline-container-org59912f6" class="outline-2">
<h2 id="orgbab5500"><span class="section-number-2">1</span> Measurement Principle</h2> <h2 id="org59912f6"><span class="section-number-2">1</span> Measurement Principle</h2>
<div class="outline-text-2" id="text-1"> <div class="outline-text-2" id="text-1">
<p> <p>
<a id="org81efe49"></a> <a id="orgc196cb4"></a>
</p> </p>
<p> <p>
Here are the defined wanted displacement of the reflector that should be inside the measurement stroke of the metrology system. Here are the defined wanted displacement of the reflector that should be inside the measurement stroke of the metrology system.
The defined translations and rotations are defined with respect to the frame shown in Figure <a href="#org25ba32a">1</a>. The defined translations and rotations are defined with respect to the frame shown in Figure <a href="#orgbada069">1</a>.
</p> </p>
<div class="org-src-container"> <div class="org-src-container">
<pre class="src src-matlab">d_x = 0; <span class="org-comment">% Wanted translation of the reflector in the x direction [m]</span> <pre class="src src-matlab">d_x = 0; <span class="org-comment">% Wanted translation of the reflector in the x direction [m]</span>
@ -85,14 +85,14 @@ R_y = 0; <span class="org-comment">% Wanted rotation of the reflector along
</div> </div>
<div id="org25ba32a" class="figure"> <div id="orgbada069" class="figure">
<p><img src="figs/short_stroke_metrology_concept.png" alt="short_stroke_metrology_concept.png" /> <p><img src="figs/short_stroke_metrology_concept.png" alt="short_stroke_metrology_concept.png" />
</p> </p>
<p><span class="figure-number">Figure 1: </span>Short Stroke Metrology - Concept. Blue interferometers are used to measure the X-Y-Z motion of the reflector. Red interferometers are used to measure tilt motion of the reflector.</p> <p><span class="figure-number">Figure 1: </span>Short Stroke Metrology - Concept. Blue interferometers are used to measure the X-Y-Z motion of the reflector. Red interferometers are used to measure tilt motion of the reflector.</p>
</div> </div>
<p> <p>
Here are the approximate dimensions shown in Figure <a href="#org25ba32a">1</a>: Here are the approximate dimensions shown in Figure <a href="#orgbada069">1</a>:
</p> </p>
<ul class="org-ul"> <ul class="org-ul">
<li>\(d_0 \approx 10\,[mm]\)</li> <li>\(d_0 \approx 10\,[mm]\)</li>
@ -109,15 +109,15 @@ R = 250e<span class="org-type">-</span>3; <span class="org-comment">% [m]</span>
</div> </div>
</div> </div>
<div id="outline-container-org8f0a94b" class="outline-2"> <div id="outline-container-orge0aedba" class="outline-2">
<h2 id="org8f0a94b"><span class="section-number-2">2</span> X-Y-Z measurement</h2> <h2 id="orge0aedba"><span class="section-number-2">2</span> X-Y-Z measurement</h2>
<div class="outline-text-2" id="text-2"> <div class="outline-text-2" id="text-2">
<p> <p>
<a id="orga41b53c"></a> <a id="org54a9efd"></a>
</p> </p>
<p> <p>
The geometry for the interferometers measuring translations is shown in Figure <a href="#org0718921">2</a>: The geometry for the interferometers measuring translations is shown in Figure <a href="#orgda75e82">2</a>:
</p> </p>
<ul class="org-ul"> <ul class="org-ul">
<li>\(R = 250\,[mm]\)</li> <li>\(R = 250\,[mm]\)</li>
@ -127,7 +127,7 @@ The geometry for the interferometers measuring translations is shown in Figure <
</ul> </ul>
<div id="org0718921" class="figure"> <div id="orgda75e82" class="figure">
<p><img src="figs/translation_interferometers.png" alt="translation_interferometers.png" /> <p><img src="figs/translation_interferometers.png" alt="translation_interferometers.png" />
</p> </p>
<p><span class="figure-number">Figure 2: </span>Interferometers that are measuring translation</p> <p><span class="figure-number">Figure 2: </span>Interferometers that are measuring translation</p>
@ -147,7 +147,7 @@ And we obtain:
\[ \theta \approx 8.0\,[mrad] \] \[ \theta \approx 8.0\,[mrad] \]
</p> </p>
<table id="org27e7f4b" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides"> <table id="orgbd49728" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<caption class="t-above"><span class="table-number">Table 1:</span> Specifications for the translation interferometers</caption> <caption class="t-above"><span class="table-number">Table 1:</span> Specifications for the translation interferometers</caption>
<colgroup> <colgroup>
@ -157,8 +157,8 @@ And we obtain:
</colgroup> </colgroup>
<thead> <thead>
<tr> <tr>
<th scope="col" class="org-left">Specification</th> <th scope="col" class="org-left"><b>Specification</b></th>
<th scope="col" class="org-left">Value</th> <th scope="col" class="org-left"><b>Value</b></th>
</tr> </tr>
</thead> </thead>
<tbody> <tbody>
@ -176,16 +176,21 @@ And we obtain:
<td class="org-left">Distance to target</td> <td class="org-left">Distance to target</td>
<td class="org-left">\(10\,[mm]\)</td> <td class="org-left">\(10\,[mm]\)</td>
</tr> </tr>
<tr>
<td class="org-left">Target</td>
<td class="org-left">Convex with \(R = 250\,[mm]\)</td>
</tr>
</tbody> </tbody>
</table> </table>
</div> </div>
</div> </div>
<div id="outline-container-orgda8f2a5" class="outline-2"> <div id="outline-container-orgdd43e82" class="outline-2">
<h2 id="orgda8f2a5"><span class="section-number-2">3</span> Tilt measurement</h2> <h2 id="orgdd43e82"><span class="section-number-2">3</span> Tilt measurement</h2>
<div class="outline-text-2" id="text-3"> <div class="outline-text-2" id="text-3">
<p> <p>
<a id="org8b209d1"></a> <a id="org55ec5cf"></a>
</p> </p>
<p> <p>
@ -204,7 +209,7 @@ And we obtain:
</p> </p>
<p> <p>
The geometry for the interferometers measuring rotations is shown in Figure <a href="#org5e4c6eb">3</a>: The geometry for the interferometers measuring rotations is shown in Figure <a href="#org8855462">3</a>:
</p> </p>
<ul class="org-ul"> <ul class="org-ul">
<li>\(d_0 > 10\,[mm]\)</li> <li>\(d_0 > 10\,[mm]\)</li>
@ -213,13 +218,13 @@ The geometry for the interferometers measuring rotations is shown in Figure <a h
</ul> </ul>
<div id="org5e4c6eb" class="figure"> <div id="org8855462" class="figure">
<p><img src="figs/rotation_interferometers.png" alt="rotation_interferometers.png" /> <p><img src="figs/rotation_interferometers.png" alt="rotation_interferometers.png" />
</p> </p>
<p><span class="figure-number">Figure 3: </span>Interferometers that are measuring tilt</p> <p><span class="figure-number">Figure 3: </span>Interferometers that are measuring tilt</p>
</div> </div>
<table id="org0d63b1d" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides"> <table id="orgb2b4f70" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<caption class="t-above"><span class="table-number">Table 2:</span> Specifications for the rotation interferometers</caption> <caption class="t-above"><span class="table-number">Table 2:</span> Specifications for the rotation interferometers</caption>
<colgroup> <colgroup>
@ -229,8 +234,8 @@ The geometry for the interferometers measuring rotations is shown in Figure <a h
</colgroup> </colgroup>
<thead> <thead>
<tr> <tr>
<th scope="col" class="org-left">Specification</th> <th scope="col" class="org-left"><b>Specification</b></th>
<th scope="col" class="org-left">Value</th> <th scope="col" class="org-left"><b>Value</b></th>
</tr> </tr>
</thead> </thead>
<tbody> <tbody>
@ -248,18 +253,23 @@ The geometry for the interferometers measuring rotations is shown in Figure <a h
<td class="org-left">Distance to target</td> <td class="org-left">Distance to target</td>
<td class="org-left">\(10\,[mm]\)</td> <td class="org-left">\(10\,[mm]\)</td>
</tr> </tr>
<tr>
<td class="org-left">Target</td>
<td class="org-left">Flat mirror</td>
</tr>
</tbody> </tbody>
</table> </table>
</div> </div>
</div> </div>
<div id="outline-container-org6ff8891" class="outline-2"> <div id="outline-container-orgbaaa145" class="outline-2">
<h2 id="org6ff8891"><span class="section-number-2">4</span> Conclusion</h2> <h2 id="orgbaaa145"><span class="section-number-2">4</span> Conclusion</h2>
</div> </div>
</div> </div>
<div id="postamble" class="status"> <div id="postamble" class="status">
<p class="author">Author: Dehaeze Thomas</p> <p class="author">Author: Dehaeze Thomas</p>
<p class="date">Created: 2021-02-19 ven. 11:13</p> <p class="date">Created: 2021-02-19 ven. 11:20</p>
</div> </div>
</body> </body>
</html> </html>

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@ -122,13 +122,14 @@ sprintf('\\[ \\theta \\approx %.1f\\,[mrad] \\]', 1e3*(2*d_y/R))
#+name: tab:spec_translation #+name: tab:spec_translation
#+caption: Specifications for the translation interferometers #+caption: Specifications for the translation interferometers
#+attr_latex: :environment tabularx :width 0.4\linewidth :align lc #+attr_latex: :environment tabularx :width 0.6\linewidth :align Xc
#+attr_latex: :center t :booktabs t :float t #+attr_latex: :center t :booktabs t :float t
| Specification | Value | | *Specification* | *Value* |
|--------------------+-----------------| |--------------------+-----------------------------|
| Axial Acceptance | $\pm 1\,[mm]$ | | Axial Acceptance | $\pm 1\,[mm]$ |
| Angular Acceptance | $\pm 8\,[mrad]$ | | Angular Acceptance | $\pm 8\,[mrad]$ |
| Distance to target | $10\,[mm]$ | | Distance to target | $10\,[mm]$ |
| Target | Convex with $R = 250\,[mm]$ |
* Tilt measurement * Tilt measurement
<<sec:rotation_interferometers>> <<sec:rotation_interferometers>>
@ -158,12 +159,13 @@ The geometry for the interferometers measuring rotations is shown in Figure [[fi
#+name: tab:spec_rotation #+name: tab:spec_rotation
#+caption: Specifications for the rotation interferometers #+caption: Specifications for the rotation interferometers
#+attr_latex: :environment tabularx :width 0.4\linewidth :align lc #+attr_latex: :environment tabularx :width 0.4\linewidth :align Xc
#+attr_latex: :center t :booktabs t :float t #+attr_latex: :center t :booktabs t :float t
| Specification | Value | | *Specification* | *Value* |
|--------------------+------------------| |--------------------+------------------|
| Axial Acceptance | $\pm 2.5\,[mm]$ | | Axial Acceptance | $\pm 2.5\,[mm]$ |
| Angular Acceptance | $\pm 10\,[mrad]$ | | Angular Acceptance | $\pm 10\,[mrad]$ |
| Distance to target | $10\,[mm]$ | | Distance to target | $10\,[mm]$ |
| Target | Flat mirror |
* Conclusion * Conclusion

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