diff --git a/short-stroke-metrology.html b/short-stroke-metrology.html index ffcefd3..9801952 100644 --- a/short-stroke-metrology.html +++ b/short-stroke-metrology.html @@ -3,7 +3,7 @@ "http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd"> - + NASS - Short Stroke Metrology @@ -39,10 +39,10 @@

Table of Contents

@@ -58,22 +58,22 @@ The goal of this document is to analyze the feasibility of a short stroke metrol It is structured as follow:

-
-

1 Measurement Principle

+
+

1 Measurement Principle

- +

Here are the defined wanted displacement of the reflector that should be inside the measurement stroke of the metrology system. -The defined translations and rotations are defined with respect to the frame shown in Figure 1. +The defined translations and rotations are defined with respect to the frame shown in Figure 1. 

d_x = 0;     % Wanted translation of the reflector in the x direction [m]
@@ -85,14 +85,14 @@ R_y = 0;     % Wanted rotation of the reflector along
-
+

short_stroke_metrology_concept.png

Figure 1: Short Stroke Metrology - Concept. Blue interferometers are used to measure the X-Y-Z motion of the reflector. Red interferometers are used to measure tilt motion of the reflector.

-Here are the approximate dimensions shown in Figure 1: +Here are the approximate dimensions shown in Figure 1:

  • \(d_0 \approx 10\,[mm]\)
    • @@ -109,15 +109,15 @@ R = 250e-3; % [m]
-
-

2 X-Y-Z measurement

+
+

2 X-Y-Z measurement

- +

-The geometry for the interferometers measuring translations is shown in Figure 2: +The geometry for the interferometers measuring translations is shown in Figure 2:

  • \(R = 250\,[mm]\)
    • @@ -127,7 +127,7 @@ The geometry for the interferometers measuring translations is shown in Figure <
-
+

translation_interferometers.png

Figure 2: Interferometers that are measuring translation

@@ -147,7 +147,7 @@ And we obtain: \[ \theta \approx 8.0\,[mrad] \]

- +
@@ -157,8 +157,8 @@ And we obtain: - - + + @@ -176,16 +176,21 @@ And we obtain: + + + + +
Table 1: Specifications for the translation interferometers
SpecificationValueSpecificationValue
Distance to target \(10\,[mm]\)
TargetConvex with \(R = 250\,[mm]\)
-
-

3 Tilt measurement

+
+

3 Tilt measurement

- +

@@ -204,7 +209,7 @@ And we obtain:

-The geometry for the interferometers measuring rotations is shown in Figure 3: +The geometry for the interferometers measuring rotations is shown in Figure 3:

-
-

4 Conclusion

+
+

4 Conclusion

Author: Dehaeze Thomas

-

Created: 2021-02-19 ven. 11:13

+

Created: 2021-02-19 ven. 11:20

diff --git a/short-stroke-metrology.org b/short-stroke-metrology.org index 7358d7a..c00e494 100644 --- a/short-stroke-metrology.org +++ b/short-stroke-metrology.org @@ -122,13 +122,14 @@ sprintf('\\[ \\theta \\approx %.1f\\,[mrad] \\]', 1e3*(2*d_y/R)) #+name: tab:spec_translation #+caption: Specifications for the translation interferometers -#+attr_latex: :environment tabularx :width 0.4\linewidth :align lc +#+attr_latex: :environment tabularx :width 0.6\linewidth :align Xc #+attr_latex: :center t :booktabs t :float t -| Specification | Value | -|--------------------+-----------------| -| Axial Acceptance | $\pm 1\,[mm]$ | -| Angular Acceptance | $\pm 8\,[mrad]$ | -| Distance to target | $10\,[mm]$ | +| *Specification* | *Value* | +|--------------------+-----------------------------| +| Axial Acceptance | $\pm 1\,[mm]$ | +| Angular Acceptance | $\pm 8\,[mrad]$ | +| Distance to target | $10\,[mm]$ | +| Target | Convex with $R = 250\,[mm]$ | * Tilt measurement <> @@ -158,12 +159,13 @@ The geometry for the interferometers measuring rotations is shown in Figure [[fi #+name: tab:spec_rotation #+caption: Specifications for the rotation interferometers -#+attr_latex: :environment tabularx :width 0.4\linewidth :align lc +#+attr_latex: :environment tabularx :width 0.4\linewidth :align Xc #+attr_latex: :center t :booktabs t :float t -| Specification | Value | +| *Specification* | *Value* | |--------------------+------------------| | Axial Acceptance | $\pm 2.5\,[mm]$ | | Angular Acceptance | $\pm 10\,[mrad]$ | | Distance to target | $10\,[mm]$ | +| Target | Flat mirror | * Conclusion diff --git a/short-stroke-metrology.pdf b/short-stroke-metrology.pdf index 98e0d42..02dec53 100644 Binary files a/short-stroke-metrology.pdf and b/short-stroke-metrology.pdf differ