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Thomas Dehaeze
2021-02-19 11:20:05 +01:00
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short-stroke-metrology.html
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@@ -3,7 +3,7 @@
"http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd">
<html xmlns="http://www.w3.org/1999/xhtml" lang="en" xml:lang="en">
<head>
<!-- 2021-02-19 ven. 11:13 -->
<!-- 2021-02-19 ven. 11:20 -->
<meta http-equiv="Content-Type" content="text/html;charset=utf-8" />
<title>NASS - Short Stroke Metrology</title>
<meta name="generator" content="Org mode" />
@@ -39,10 +39,10 @@
<h2>Table of Contents</h2>
<div id="text-table-of-contents">
<ul>
<li><a href="#orgbab5500">1. Measurement Principle</a></li>
<li><a href="#org8f0a94b">2. X-Y-Z measurement</a></li>
<li><a href="#orgda8f2a5">3. Tilt measurement</a></li>
<li><a href="#org6ff8891">4. Conclusion</a></li>
<li><a href="#org59912f6">1. Measurement Principle</a></li>
<li><a href="#orge0aedba">2. X-Y-Z measurement</a></li>
<li><a href="#orgdd43e82">3. Tilt measurement</a></li>
<li><a href="#orgbaaa145">4. Conclusion</a></li>
</ul>
</div>
</div>
@@ -58,22 +58,22 @@ The goal of this document is to analyze the feasibility of a short stroke metrol
It is structured as follow:
</p>
<ul class="org-ul">
<li>Section <a href="#org81efe49">1</a>: the meaurement principle is described.</li>
<li>Section <a href="#orga41b53c">2</a>: the requirements for the interferometers measuring translations are described</li>
<li>Section <a href="#org8b209d1">3</a>: the same is done for the rotations</li>
<li>Section <a href="#orgc196cb4">1</a>: the meaurement principle is described.</li>
<li>Section <a href="#org54a9efd">2</a>: the requirements for the interferometers measuring translations are described</li>
<li>Section <a href="#org55ec5cf">3</a>: the same is done for the rotations</li>
</ul>
<div id="outline-container-orgbab5500" class="outline-2">
<h2 id="orgbab5500"><span class="section-number-2">1</span> Measurement Principle</h2>
<div id="outline-container-org59912f6" class="outline-2">
<h2 id="org59912f6"><span class="section-number-2">1</span> Measurement Principle</h2>
<div class="outline-text-2" id="text-1">
<p>
<a id="org81efe49"></a>
<a id="orgc196cb4"></a>
</p>
<p>
Here are the defined wanted displacement of the reflector that should be inside the measurement stroke of the metrology system.
The defined translations and rotations are defined with respect to the frame shown in Figure <a href="#org25ba32a">1</a>.
The defined translations and rotations are defined with respect to the frame shown in Figure <a href="#orgbada069">1</a>.
</p>
<div class="org-src-container">
<pre class="src src-matlab">d_x = 0; <span class="org-comment">% Wanted translation of the reflector in the x direction [m]</span>
@@ -85,14 +85,14 @@ R_y = 0; <span class="org-comment">% Wanted rotation of the reflector along
</div>
<div id="org25ba32a" class="figure">
<div id="orgbada069" class="figure">
<p><img src="figs/short_stroke_metrology_concept.png" alt="short_stroke_metrology_concept.png" />
</p>
<p><span class="figure-number">Figure 1: </span>Short Stroke Metrology - Concept. Blue interferometers are used to measure the X-Y-Z motion of the reflector. Red interferometers are used to measure tilt motion of the reflector.</p>
</div>
<p>
Here are the approximate dimensions shown in Figure <a href="#org25ba32a">1</a>:
Here are the approximate dimensions shown in Figure <a href="#orgbada069">1</a>:
</p>
<ul class="org-ul">
<li>\(d_0 \approx 10\,[mm]\)</li>
@@ -109,15 +109,15 @@ R = 250e<span class="org-type">-</span>3; <span class="org-comment">% [m]</span>
</div>
</div>
<div id="outline-container-org8f0a94b" class="outline-2">
<h2 id="org8f0a94b"><span class="section-number-2">2</span> X-Y-Z measurement</h2>
<div id="outline-container-orge0aedba" class="outline-2">
<h2 id="orge0aedba"><span class="section-number-2">2</span> X-Y-Z measurement</h2>
<div class="outline-text-2" id="text-2">
<p>
<a id="orga41b53c"></a>
<a id="org54a9efd"></a>
</p>
<p>
The geometry for the interferometers measuring translations is shown in Figure <a href="#org0718921">2</a>:
The geometry for the interferometers measuring translations is shown in Figure <a href="#orgda75e82">2</a>:
</p>
<ul class="org-ul">
<li>\(R = 250\,[mm]\)</li>
@@ -127,7 +127,7 @@ The geometry for the interferometers measuring translations is shown in Figure <
</ul>
<div id="org0718921" class="figure">
<div id="orgda75e82" class="figure">
<p><img src="figs/translation_interferometers.png" alt="translation_interferometers.png" />
</p>
<p><span class="figure-number">Figure 2: </span>Interferometers that are measuring translation</p>
@@ -147,7 +147,7 @@ And we obtain:
\[ \theta \approx 8.0\,[mrad] \]
</p>
<table id="org27e7f4b" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<table id="orgbd49728" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<caption class="t-above"><span class="table-number">Table 1:</span> Specifications for the translation interferometers</caption>
<colgroup>
@@ -157,8 +157,8 @@ And we obtain:
</colgroup>
<thead>
<tr>
<th scope="col" class="org-left">Specification</th>
<th scope="col" class="org-left">Value</th>
<th scope="col" class="org-left"><b>Specification</b></th>
<th scope="col" class="org-left"><b>Value</b></th>
</tr>
</thead>
<tbody>
@@ -176,16 +176,21 @@ And we obtain:
<td class="org-left">Distance to target</td>
<td class="org-left">\(10\,[mm]\)</td>
</tr>
<tr>
<td class="org-left">Target</td>
<td class="org-left">Convex with \(R = 250\,[mm]\)</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-orgda8f2a5" class="outline-2">
<h2 id="orgda8f2a5"><span class="section-number-2">3</span> Tilt measurement</h2>
<div id="outline-container-orgdd43e82" class="outline-2">
<h2 id="orgdd43e82"><span class="section-number-2">3</span> Tilt measurement</h2>
<div class="outline-text-2" id="text-3">
<p>
<a id="org8b209d1"></a>
<a id="org55ec5cf"></a>
</p>
<p>
@@ -204,7 +209,7 @@ And we obtain:
</p>
<p>
The geometry for the interferometers measuring rotations is shown in Figure <a href="#org5e4c6eb">3</a>:
The geometry for the interferometers measuring rotations is shown in Figure <a href="#org8855462">3</a>:
</p>
<ul class="org-ul">
<li>\(d_0 > 10\,[mm]\)</li>
@@ -213,13 +218,13 @@ The geometry for the interferometers measuring rotations is shown in Figure <a h
</ul>
<div id="org5e4c6eb" class="figure">
<div id="org8855462" class="figure">
<p><img src="figs/rotation_interferometers.png" alt="rotation_interferometers.png" />
</p>
<p><span class="figure-number">Figure 3: </span>Interferometers that are measuring tilt</p>
</div>
<table id="org0d63b1d" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<table id="orgb2b4f70" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<caption class="t-above"><span class="table-number">Table 2:</span> Specifications for the rotation interferometers</caption>
<colgroup>
@@ -229,8 +234,8 @@ The geometry for the interferometers measuring rotations is shown in Figure <a h
</colgroup>
<thead>
<tr>
<th scope="col" class="org-left">Specification</th>
<th scope="col" class="org-left">Value</th>
<th scope="col" class="org-left"><b>Specification</b></th>
<th scope="col" class="org-left"><b>Value</b></th>
</tr>
</thead>
<tbody>
@@ -248,18 +253,23 @@ The geometry for the interferometers measuring rotations is shown in Figure <a h
<td class="org-left">Distance to target</td>
<td class="org-left">\(10\,[mm]\)</td>
</tr>
<tr>
<td class="org-left">Target</td>
<td class="org-left">Flat mirror</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-org6ff8891" class="outline-2">
<h2 id="org6ff8891"><span class="section-number-2">4</span> Conclusion</h2>
<div id="outline-container-orgbaaa145" class="outline-2">
<h2 id="orgbaaa145"><span class="section-number-2">4</span> Conclusion</h2>
</div>
</div>
<div id="postamble" class="status">
<p class="author">Author: Dehaeze Thomas</p>
<p class="date">Created: 2021-02-19 ven. 11:13</p>
<p class="date">Created: 2021-02-19 ven. 11:20</p>
</div>
</body>
</html>