digital-brain/content/article/butler11_posit_contr_lithog_equip.md

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+++ title = "Position control in lithographic equipment" author = ["Thomas Dehaeze"] draft = false +++

Tags
[Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})
Reference
(Butler 2011)
Author(s)
Butler, H.
Year
2011

Bibliography

Butler, Hans. 2011. “Position Control in Lithographic Equipment.” IEEE Control Systems 31 (5):2847. https://doi.org/10.1109/mcs.2011.941882.