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4.5 KiB
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76 lines
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title = "Position Sensors"
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author = ["Thomas Dehaeze"]
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draft = false
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Backlinks:
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- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
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- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
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- [Inertial Sensors]({{< relref "inertial_sensors" >}})
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- [Sensors]({{< relref "sensors" >}})
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- [Collocated Control]({{< relref "collocated_control" >}})
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- [Encoders]({{< relref "encoders" >}})
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- [Eddy Current Sensors]({{< relref "eddy_current_sensors" >}})
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- [Linear variable differential transformers]({{< relref "linear_variable_differential_transformers" >}})
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- [Interferometers]({{< relref "interferometers" >}})
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- [Capacitive Sensors]({{< relref "capacitive_sensors" >}})
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Tags
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: [Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}}), [Signal Conditioner]({{< relref "signal_conditioner" >}}), [Signal to Noise Ratio]({{< relref "signal_to_noise_ratio" >}})
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## Types of Positioning sensors {#types-of-positioning-sensors}
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High precision positioning sensors include:
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- [Interferometers]({{< relref "interferometers" >}})
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- [Capacitive Sensors]({{< relref "capacitive_sensors" >}})
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- [LVDT]({{< relref "linear_variable_differential_transformers" >}})
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- [Eddy Current Sensors]({{< relref "eddy_current_sensors" >}})
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## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
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- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#orge209c43)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
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<a id="table--tab:characteristics-relative-sensor"></a>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:characteristics-relative-sensor">Table 1</a></span>:
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Characteristics of relative measurement sensors <a class='org-ref-reference' href="#collette11_review">collette11_review</a>
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</div>
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| Technology | Frequency | Resolution | Range | T Range |
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|----------------|------------|----------------|--------------|-------------|
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| LVDT | DC-200 Hz | 10 nm rms | 1-10 mm | -50,100 °C |
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| Eddy current | 5 kHz | 0.1-100 nm rms | 0.5-55 mm | -50,100 °C |
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| Capacitive | DC-100 kHz | 0.05-50 nm rms | 50 nm - 1 cm | -40,100 °C |
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| Interferometer | 300 kHz | 0.1 nm rms | 10 cm | -250,100 °C |
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| Encoder | DC-1 MHz | 1 nm rms | 7-27 mm | 0,40 °C |
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| Bragg Fibers | DC-150 Hz | 0.3 nm rms | 3.5 cm | -30,80 °C |
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<a id="table--tab:summary-position-sensors"></a>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a></span>:
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Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of 100um and a first order bandwidth of \(1 kHz\) <a class='org-ref-reference' href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>
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</div>
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| Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy |
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|----------------|--------------------------------|---------|------------|----------|-----------|
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| Metal foil | \\(10-500 \mu m\\) | 230 ppm | 23 nm | 1-10 kHz | 1% FSR |
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| Piezoresistive | \\(1-500 \mu m\\) | 5 ppm | 0.5 nm | >100 kHz | 1% FSR |
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| Capacitive | \\(10 \mu m\\) to \\(10 mm\\) | 24 ppm | 2.4 nm | 100 kHz | 0.1% FSR |
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| Electrothermal | \\(10 \mu m\\) to \\(1 mm\\) | 100 ppm | 10 nm | 10 kHz | 1% FSR |
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| Eddy current | \\(100 \mu m\\) to \\(80 mm\\) | 10 ppm | 1 nm | 40 kHz | 0.1% FSR |
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| LVDT | \\(0.5-500 mm\\) | 10 ppm | 5 nm | 1 kHz | 0.25% FSR |
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| Interferometer | Meters | | 0.5 nm | >100kHz | 1 ppm FSR |
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| Encoder | Meters | | 6 nm | >100kHz | 5 ppm FSR |
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Capacitive Sensors and Eddy-Current sensors are compare [here](https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors/).
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## Bibliography {#bibliography}
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<a id="orge209c43"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
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