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8.1 KiB
Markdown
116 lines
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title = "Position Sensors"
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author = ["Thomas Dehaeze"]
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draft = false
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Tags
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:
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## Reviews of position sensors {#reviews-of-position-sensors}
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- <sup id="0b0b67de6dddc4d28031ab2d3b28cd3d"><a href="#collette12_compar" title="Collette, Janssens, Mokrani, Fueyo-Roza, L, Artoos, Esposito, Fernandez-Carmona, , Guinchard \& Leuxe, Comparison of new absolute displacement sensors, in in: {International Conference on Noise and Vibration Engineering
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(ISMA)}, edited by (2012)">(Collette {\it et al.}, 2012)</a></sup>
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- <sup id="3fb5b61524290e36d639a4fac65703d0"><a href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)</a></sup>
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## Relative Position Sensors {#relative-position-sensors}
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<a id="orgf9f8137"></a>
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{{< figure src="/ox-hugo/position_sensor_characteristics_relative_sensor.png" caption="Figure 1: Characteristics of relative measurement sensors <sup id=\"642a18d86de4e062c6afb0f5f20501c4\"><a href=\"#collette11_review\" title=\"Collette, Artoos, Guinchard, Janssens, , Carmona Fernandez \& Hauviller, Review of sensors for low frequency seismic vibration measurement, cern, (2011).\">(Collette {\it et al.}, 2011)</a></sup>" >}}
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<a id="org4ac51f1"></a>
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{{< figure src="/ox-hugo/position_sensor_characteristics.png" caption="Figure 2: Position sensor characteristics <sup id=\"3fb5b61524290e36d639a4fac65703d0\"><a href=\"#fleming13_review_nanom_resol_posit_sensor\" title=\"Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).\">(Andrew Fleming, 2013)</a></sup>" >}}
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### Strain Gauge {#strain-gauge}
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### Capacitive Sensor {#capacitive-sensor}
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Description:
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- <http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html>
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- <https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors>
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|----------------|-------------------------------------------------------------------------------------------------|
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| Micro Sense | [link](http://www.microsense.net/products-position-sensors.htm) |
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| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/) |
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| PI | [link](https://www.physikinstrumente.com/en/technology/sensor-technologies/capacitive-sensors/) |
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| Unipulse | [link](https://www.unipulse.com/product/ps-ia/) |
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| Lion-Precision | [link](https://www.lionprecision.com/products/capacitive-sensors) |
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### Inductive Sensor (Eddy Current) {#inductive-sensor--eddy-current}
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|----------------|------------------------------------------------------------------------------------------|
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| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/) |
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| Lion Precision | [link](https://www.lionprecision.com/products/eddy-current-sensors) |
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### Inductive Sensor (LVDT) {#inductive-sensor--lvdt}
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|---------------|--------------------------------------------------------------------------------------------|
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| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/inductive-sensor-lvdt/) |
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| Keyence | [link](https://www.keyence.eu/products/measure/contact-distance-lvdt/gt2/index.jsp) |
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### Interferometers {#interferometers}
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|----------|----------------------------------------------------------------------------------------------------------|
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| Attocube | [link](http://www.attocube.com/) |
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| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) |
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| Smaract | [link](https://www.smaract.com/interferometry) |
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| Qutools | [link](https://www.qutools.com/qudis/) |
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| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) |
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| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) |
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| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) |
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<div class="table-caption">
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<span class="table-number">Table 1</span>:
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Characteristics of Environmental Units
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</div>
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| | Temperature (\\(\pm\ ^oC\\)) | Pressure (\\(\pm\ hPa\\)) | Humidity \\(\pm\ \% RH\\) | Wavelength Accuracy (\\(\pm\ \text{ppm}\\)) |
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|-----------|------------------------------|---------------------------|---------------------------|---------------------------------------------|
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| Attocube | 0.1 | 1 | 2 | 0.5 |
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| Renishaw | 0.2 | 1 | 6 | 1 |
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| Picoscale | 0.2 | 2 | 2 | 1 |
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Figure [3](#orgce716a4) is taken from
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<sup id="7658b1219a4458a62ae8c6f51b767542"><a href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \& Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
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Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang \& Seung-Woo Kim, 2017)</a></sup>.
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<a id="orgce716a4"></a>
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{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 3: Expected precision of interferometer as a function of measured distance" >}}
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### Fiber Optic Displacement Sensor {#fiber-optic-displacement-sensor}
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|----------|----------------------------------------------------|
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| Unipulse | [link](https://www.unipulse.com/product/atw200-2/) |
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# Bibliography
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<a id="collette12_compar"></a>Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, *Comparison of new absolute displacement sensors*, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . [↩](#0b0b67de6dddc4d28031ab2d3b28cd3d)
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<a id="fleming13_review_nanom_resol_posit_sensor"></a>Fleming, A. J., *A review of nanometer resolution position sensors: operation and performance*, Sensors and Actuators A: Physical, *190(nil)*, 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 [↩](#3fb5b61524290e36d639a4fac65703d0)
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<a id="collette11_review"></a>Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., *Review of sensors for low frequency seismic vibration measurement* (2011). [↩](#642a18d86de4e062c6afb0f5f20501c4)
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<a id="jang17_compen_refrac_index_air_laser"></a>Jang, Y., & Kim, S., *Compensation of the refractive index of air in laser interferometer for distance measurement: a review*, International Journal of Precision Engineering and Manufacturing, *18(12)*, 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y [↩](#7658b1219a4458a62ae8c6f51b767542)
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## Backlinks {#backlinks}
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- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
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- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
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