8.1 KiB
+++ title = "Position Sensors" author = ["Thomas Dehaeze"] draft = false +++
Tags :
Reviews of position sensors
Relative Position Sensors
{{< figure src="/ox-hugo/position_sensor_characteristics_relative_sensor.png" caption="Figure 1: Characteristics of relative measurement sensors <sup id="642a18d86de4e062c6afb0f5f20501c4"><a href="#collette11_review" title="Collette, Artoos, Guinchard, Janssens, , Carmona Fernandez & Hauviller, Review of sensors for low frequency seismic vibration measurement, cern, (2011).">(Collette {\it et al.}, 2011)" >}}
{{< figure src="/ox-hugo/position_sensor_characteristics.png" caption="Figure 2: Position sensor characteristics <sup id="3fb5b61524290e36d639a4fac65703d0"><a href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)" >}}
Strain Gauge
Capacitive Sensor
Description:
- http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html
- https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors
| Micro Sense | link |
| Micro-Epsilon | link |
| PI | link |
| Unipulse | link |
| Lion-Precision | link |
Inductive Sensor (Eddy Current)
| Micro-Epsilon | link |
| Lion Precision | link |
Inductive Sensor (LVDT)
| Micro-Epsilon | link |
| Keyence | link |
Interferometers
| Attocube | link |
| Zygo | link |
| Smaract | link |
| Qutools | link |
| Renishaw | link |
| Sios | link |
| Keysight | link |
| Temperature (\(\pm\ ^oC\)) | Pressure (\(\pm\ hPa\)) | Humidity \(\pm\ % RH\) | Wavelength Accuracy (\(\pm\ \text{ppm}\)) | |
|---|---|---|---|---|
| Attocube | 0.1 | 1 | 2 | 0.5 |
| Renishaw | 0.2 | 1 | 6 | 1 |
| Picoscale | 0.2 | 2 | 2 | 1 |
Figure 3 is taken from (Yoon-Soo Jang & Seung-Woo Kim, 2017).
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 3: Expected precision of interferometer as a function of measured distance" >}}
Fiber Optic Displacement Sensor
| Unipulse | link |
Bibliography
Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, Comparison of new absolute displacement sensors, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . ↩
Fleming, A. J., A review of nanometer resolution position sensors: operation and performance, Sensors and Actuators A: Physical, 190(nil), 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 ↩
Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., Review of sensors for low frequency seismic vibration measurement (2011). ↩
Jang, Y., & Kim, S., Compensation of the refractive index of air in laser interferometer for distance measurement: a review, International Journal of Precision Engineering and Manufacturing, 18(12), 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y ↩
Backlinks
- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})