33 lines
1015 B
Markdown
33 lines
1015 B
Markdown
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title = "A survey of control issues in nanopositioning"
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author = ["Thomas Dehaeze"]
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draft = false
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Tags
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:
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Reference
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: ([Devasia, Eleftheriou, and Moheimani 2007](#org4f17944))
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Author(s)
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: Devasia, S., Eleftheriou, E., & Moheimani, S. R.
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Year
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: 2007
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- Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
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- Piezoelectric actuators: Creep, Hysteresis, Vibrations, Modeling errors
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- Interesting analysis about Bandwidth-Precision-Range tradeoffs
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- Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls
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<a id="org47d33b5"></a>
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{{< figure src="/ox-hugo/devasia07_piezoelectric_tradeoff.png" caption="Figure 1: Tradeoffs between bandwidth, precision and range" >}}
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## Bibliography {#bibliography}
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<a id="org4f17944"></a>Devasia, Santosh, Evangelos Eleftheriou, and SO Reza Moheimani. 2007. “A Survey of Control Issues in Nanopositioning.” _IEEE Transactions on Control Systems Technology_ 15 (5). IEEE:802–23.
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