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title = "Position Sensors"
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author = ["Thomas Dehaeze"]
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draft = false
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## Reviews of position sensors {#reviews-of-position-sensors}
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- <sup id="0b0b67de6dddc4d28031ab2d3b28cd3d"><a href="#collette12_compar" title="Collette, Janssens, Mokrani, Fueyo-Roza, L, Artoos, Esposito, Fernandez-Carmona, , Guinchard \& Leuxe, Comparison of new absolute displacement sensors, in in: {International Conference on Noise and Vibration Engineering
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(ISMA)}, edited by (2012)">(Collette {\it et al.}, 2012)</a></sup>
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- <sup id="3fb5b61524290e36d639a4fac65703d0"><a href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)</a></sup>
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## Relative Position Sensors {#relative-position-sensors}
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<a id="table--tab:characteristics-relative-sensor"></a>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:characteristics-relative-sensor">Table 1</a></span>:
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Characteristics of relative measurement sensors <a class='org-ref-reference' href="#collette11_review">collette11_review</a>
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</div>
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| Technology | Frequency (Hz) | Resolution [nm rms] | Range | Temperature Range [\\(^o \degree C\\)] |
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|----------------|----------------------------|---------------------|--------------------------|----------------------------------------|
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| LVDT | \\(\text{DC}-200\,[Hz]\\) | 10 | \\(1-10\,[mm]\\) | -50,100 |
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| Eddy current | \\(5\,[kHz]\\) | 0.1-100 | \\(0.5-55\,[mm]\\) | -50,100 |
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| Capacitive | \\(\text{DC}-100\,[kHz]\\) | 0.05-50 | \\(50\,[nm] - 1\,[cm]\\) | -40,100 |
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| Interferometer | \\(300\,[kHz]\\) | 0.1 | \\(10\,[cm]\\) | -250,100 |
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| Encoder | \\(\text{DC}-1\,[MHz]\\) | 1 | \\(7-27\,[mm]\\) | 0,40 |
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| Bragg Fibers | \\(\text{DC}-150\,[Hz]\\) | 0.3 | \\(3.5\,[cm]\\) | -30,80 |
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<a id="table--tab:summary-position-sensors"></a>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a></span>:
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Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100\,\mu m\) and a first order bandwidth of \(1\,kHz\) <a class='org-ref-reference' href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a> (<a href="fleming13_review_nanom_resol_posit_sensor.html">notes</a>)
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</div>
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| Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy |
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|----------------|----------------------------------|---------|------------|----------|-----------|
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| Metal foil | \\(10-500\,\mu m\\) | 230 ppm | 23 nm | 1-10 kHz | 1% FSR |
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| Piezoresistive | \\(1-500\,\mu m\\) | 5 ppm | 0.5 nm | >100 kHz | 1% FSR |
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| Capacitive | \\(10\,\mu m\\) to \\(10\,mm\\) | 24 ppm | 2.4 nm | 100 kHz | 0.1% FSR |
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| Electrothermal | \\(10\,\mu m\\) to \\(1\,mm\\) | 100 ppm | 10 nm | 10 kHz | 1% FSR |
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| Eddy current | \\(100\,\mu m\\) to \\(80\,mm\\) | 10 ppm | 1 nm | 40 kHz | 0.1% FSR |
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| LVDT | \\(0.5-500\,mm\\) | 10 ppm | 5 nm | 1 kHz | 0.25% FSR |
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| Interferometer | Meters | | 0.5 nm | >100kHz | 1 ppm FSR |
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| Encoder | Meters | | 6 nm | >100kHz | 5 ppm FSR |
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### Strain Gauge {#strain-gauge}
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### Capacitive Sensor {#capacitive-sensor}
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Description:
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- <http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html>
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- <https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors>
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| | |
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|----------------|-------------------------------------------------------------------------------------------------|
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| Micro Sense | [link](http://www.microsense.net/products-position-sensors.htm) |
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| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/) |
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| PI | [link](https://www.physikinstrumente.com/en/technology/sensor-technologies/capacitive-sensors/) |
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| Unipulse | [link](https://www.unipulse.com/product/ps-ia/) |
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| Lion-Precision | [link](https://www.lionprecision.com/products/capacitive-sensors) |
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### Inductive Sensor (Eddy Current) {#inductive-sensor--eddy-current}
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| | |
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|----------------|------------------------------------------------------------------------------------------|
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| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/) |
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| Lion Precision | [link](https://www.lionprecision.com/products/eddy-current-sensors) |
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### Inductive Sensor (LVDT) {#inductive-sensor--lvdt}
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| | |
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|---------------|--------------------------------------------------------------------------------------------|
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| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/inductive-sensor-lvdt/) |
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| Keyence | [link](https://www.keyence.eu/products/measure/contact-distance-lvdt/gt2/index.jsp) |
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### Interferometers {#interferometers}
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| | |
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|----------|----------------------------------------------------------------------------------------------------------|
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| Attocube | [link](http://www.attocube.com/) |
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| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) |
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| Smaract | [link](https://www.smaract.com/interferometry) |
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| Qutools | [link](https://www.qutools.com/qudis/) |
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| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) |
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| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) |
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| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) |
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<div class="table-caption">
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<span class="table-number">Table 3</span>:
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Characteristics of Environmental Units
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</div>
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| | Temperature (\\(\pm\ ^oC\\)) | Pressure (\\(\pm\ hPa\\)) | Humidity \\(\pm\ \% RH\\) | Wavelength Accuracy (\\(\pm\ \text{ppm}\\)) |
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|-----------|------------------------------|---------------------------|---------------------------|---------------------------------------------|
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| Attocube | 0.1 | 1 | 2 | 0.5 |
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| Renishaw | 0.2 | 1 | 6 | 1 |
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| Picoscale | 0.2 | 2 | 2 | 1 |
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Figure [1](#org1c8180d) is taken from
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<sup id="7658b1219a4458a62ae8c6f51b767542"><a href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \& Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
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Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang \& Seung-Woo Kim, 2017)</a></sup>.
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<a id="org1c8180d"></a>
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{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
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### Fiber Optic Displacement Sensor {#fiber-optic-displacement-sensor}
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|----------|----------------------------------------------------|
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| Unipulse | [link](https://www.unipulse.com/product/atw200-2/) |
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# Bibliography
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<a id="collette12_compar"></a>Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, *Comparison of new absolute displacement sensors*, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . [↩](#0b0b67de6dddc4d28031ab2d3b28cd3d)
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<a id="fleming13_review_nanom_resol_posit_sensor"></a>Fleming, A. J., *A review of nanometer resolution position sensors: operation and performance*, Sensors and Actuators A: Physical, *190(nil)*, 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 [↩](#3fb5b61524290e36d639a4fac65703d0)
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<a id="collette11_review"></a>Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., *Review of sensors for low frequency seismic vibration measurement* (2011). [↩](#642a18d86de4e062c6afb0f5f20501c4)
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<a id="jang17_compen_refrac_index_air_laser"></a>Jang, Y., & Kim, S., *Compensation of the refractive index of air in laser interferometer for distance measurement: a review*, International Journal of Precision Engineering and Manufacturing, *18(12)*, 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y [↩](#7658b1219a4458a62ae8c6f51b767542)
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## Backlinks {#backlinks}
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- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
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- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
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