143 lines
8.8 KiB
Markdown
143 lines
8.8 KiB
Markdown
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title = "Positioning Stations"
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author = ["Dehaeze Thomas"]
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draft = false
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category = "equipment"
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Tags
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## Review {#review}
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### Sensors {#sensors}
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- Capacitive: <&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam>
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- Fiber Interferometers Interferometers:
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- Attocube FPS3010 Fabry-Pérot interferometers: <&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann>
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- Attocube IDS3010 Fabry-Pérot interferometers: <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano>
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- PicoScale SmarAct Michelson interferometers: <&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls>
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### Actuators {#actuators}
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- Piezoelectric: <&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann>
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- 3-phase linear motor: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>
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- Voice Coil: <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>
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### Bandwidth {#bandwidth}
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Rarely specificity.
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Usually slow, so that only drifts are compensated.
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Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>.
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### Degrees of Freedom {#degrees-of-freedom}
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- Full rotation for tomography:
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- Spindle bellow YZ stage: <&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls>
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- Spindle above YZ stage: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii>
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- Only for mapping: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano>
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**Stroke**:
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- > 1mm: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>
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### Payload capabilities {#payload-capabilities}
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- Micron scale samples
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- Samples up to 500g <&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano>
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### Nano Positioning End-Station without online metrology {#nano-positioning-end-station-without-online-metrology}
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{{< figure src="/ox-hugo/endstation_id11.png" >}}
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### End-Station with integrated online metrology {#end-station-with-integrated-online-metrology}
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<div class="table-caption">
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<span class="table-number">Table 1:</span>
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End-Station with integrated online metrology
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</div>
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| Architecture | Sensors and measured DoFs | Metrology Use | Stroke, DoF | Samples | Institute, BL | Ref |
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|-------------------------------------------------------------------|------------------------------|---------------------|-------------------------|--------------|----------------|----------------------------------------|
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| Spindle / **XYZ piezo stage** / Spherical retroreflector / Sample | 3 interferometers: \\(YZ\\) | Characterization | XYZ: 100um, Rz: 180 deg | micron scale | PETRA III, P06 | <&schroer17_ptynam;&schropp20_ptynam> |
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| Spindle / Metrology Ring / **XYZ** Stage / Sample | 3 Capacitive: \\(YZR\_x\\) | Post processing | | micron scale | NSLS, X8C | <&wang12_autom_marker_full_field_hard> |
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| **XYZ piezo stage** / Spindle / Metrology Ring / Sample | 2 interferometers : \\(YZ\\) | Detector triggering | | micron scale | NSLS, HRX | <&xu23_high_nsls_ii> |
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<a id="figure--fig:endstation-schroer"></a>
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{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class=\"figure-number\">Figure 1: </span>Figure caption" >}}
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<a id="figure--fig:endstation-wang"></a>
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{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class=\"figure-number\">Figure 2: </span>Figure caption" >}}
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<a id="figure--fig:endstation-xu24"></a>
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{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class=\"figure-number\">Figure 3: </span>Figure caption" >}}
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### End-Station with integrated feedback loops based on online metrology {#end-station-with-integrated-feedback-loops-based-on-online-metrology}
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<div class="table-caption">
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<span class="table-number">Table 2:</span>
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End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.
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</div>
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| Architecture | Sensors and measured DoFs | Bandwidth | Stroke, DoF | Samples | Institute, BL | Ref |
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|----------------------------------------------------------------------|----------------------------------------|-----------|--------------------------------------|------------|-------------------|-------------------------------------------------------------------------------|
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| **XYZ piezo motors** / Mirrors / Sample | 3 interferometers: \\(XYZ\\) | 3 PID | XYZ: 3mm | light | APS | <&nazaretski15_pushin_limit> |
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| **Piezo Hexapod** / Spindle / Metrology Ring / Sample | 12 Capacitive: \\(XYZR\_xR\_y\\) | 10Hz | XYZ: 50um, Rx/Ry:500urad, Rz: 180deg | light | ESRF, ID16a | <&villar18_nanop_esrf_id16a_nano_imagin_beaml> |
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| **Piezo Tripod** / Spindle / Spherical Reference / Sample | 5 Custom interferometers: \\(YZR\_x\\) | PID | XYZ: 400um, Rz: 365 deg | light | PSI, OMNY | <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage> |
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| **Stacked XYZ linear motors** / Spindle / XY / Cylindrical Reference | 5 interferometers: \\(XYZR\_xR\_y\\) | | XYZ: 400um, Rz: 360 deg | light | Soleil, Nanoprobe | <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul> |
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| **XYZ piezo** / Spindle / Metrology Ring / Sample | 3 interferometers : \\(XYZ\\) | | XYZ: 100um, Rz: 360 deg | up to 500g | NSLS, SRX | <&nazaretski22_new_kirkp_baez_based_scann> |
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| **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | XYZ: 3mm | up to 350g | Diamond, I14 | <&kelly22_delta_robot_long_travel_nano> |
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| Rz / **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | YZ: 3mm, Rz: +-110deg | light | LNLS, CARNAUBA | <&geraldes23_sapot_carnaub_sirius_lnls> |
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<a id="figure--fig:endstation-nazaretski"></a>
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{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class=\"figure-number\">Figure 4: </span>Figure caption" >}}
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<a id="figure--fig:endstation-villar"></a>
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{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class=\"figure-number\">Figure 5: </span>Figure caption" >}}
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<a id="figure--fig:endstation-holler"></a>
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{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class=\"figure-number\">Figure 6: </span>Figure caption" >}}
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<a id="figure--fig:endstation-engblom"></a>
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{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class=\"figure-number\">Figure 7: </span>Figure caption" >}}
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<a id="figure--fig:endstation-kelly"></a>
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{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class=\"figure-number\">Figure 8: </span>Figure caption" >}}
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<a id="figure--fig:endstation-geraldes"></a>
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{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class=\"figure-number\">Figure 9: </span>Figure caption" >}}
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## Manufacturers {#manufacturers}
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| Manufacturers | Country |
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|------------------------------------------------------------------|---------|
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| [Kohzu](https://www.kohzuprecision.com/i/) | Japan |
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| [PI](https://www.physikinstrumente.com/en/) | USA |
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| [Attocube](https://www.attocube.com/en/products/nanopositioners) | Germany |
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| [Newport](https://www.newport.com/c/manual-positioning) | |
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| [LAB](https://www.labmotionsystems.com/products/z-stages/) | Belgium |
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## Bibliography {#bibliography}
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<./biblio/references.bib>
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