digital-brain/content/zettels/position_sensors.md

+++ title = "Position Sensors" author = ["Dehaeze Thomas"] draft = false category = "equipment" +++

Tags

[Inertial Sensors]({{< relref "inertial_sensors.md" >}}), [Force Sensors]({{< relref "force_sensors.md" >}}), [Sensor Fusion]({{< relref "sensor_fusion.md" >}}), [Signal Conditioner]({{< relref "signal_conditioner.md" >}}), [Signal to Noise Ratio]({{< relref "signal_to_noise_ratio.md" >}})

Types of Positioning sensors

High precision positioning sensors include:

• [Interferometers]({{< relref "interferometers.md" >}})
• [Capacitive Sensors]({{< relref "capacitive_sensors.md" >}})
• [LVDT]({{< relref "linear_variable_differential_transformers.md" >}})
• [Eddy Current Sensors]({{< relref "eddy_current_sensors.md" >}})
• [Encoders]({{< relref "encoders.md" >}})
• [Quadrant Photodiodes]({{< relref "quadrant_photodiodes.md" >}})

Reviews of Relative Position Sensors

• Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Fleming 2013) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor.md" >}}))
• (Gao et al. 2015)

Table 1 is taken from (Collette et al. 2011).

Table 1: Characteristics of relative measurement sensors

Technology	Frequency	Resolution	Range	T Range
LVDT	DC-200 Hz	10 nm rms	1-10 mm	-50,100 °C
Eddy current	5 kHz	0.1-100 nm rms	0.5-55 mm	-50,100 °C
Capacitive	DC-100 kHz	0.05-50 nm rms	50 nm - 1 cm	-40,100 °C
Interferometer	300 kHz	0.1 nm rms	10 cm	-250,100 °C
Encoder	DC-1 MHz	1 nm rms	7-27 mm	0,40 °C
Bragg Fibers	DC-150 Hz	0.3 nm rms	3.5 cm	-30,80 °C

Table 2 it taken from (Fleming 2013).

Table 2: Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of 100um and a first order bandwidth of \(1 kHz\)

Sensor Type	Range	DNR	Resolution	Max. BW	Accuracy
Metal foil	\(10-500 \mu m\)	230 ppm	23 nm	1-10 kHz	1% FSR
Piezoresistive	\(1-500 \mu m\)	5 ppm	0.5 nm	>100 kHz	1% FSR
Capacitive	\(10 \mu m\) to \(10 mm\)	24 ppm	2.4 nm	100 kHz	0.1% FSR
Electrothermal	\(10 \mu m\) to \(1 mm\)	100 ppm	10 nm	10 kHz	1% FSR
Eddy current	\(100 \mu m\) to \(80 mm\)	10 ppm	1 nm	40 kHz	0.1% FSR
LVDT	\(0.5-500 mm\)	10 ppm	5 nm	1 kHz	0.25% FSR
Interferometer	Meters		0.5 nm	>100kHz	1 ppm FSR
Encoder	Meters		6 nm	>100kHz	5 ppm FSR

Capacitive Sensors and Eddy-Current sensors are compare here.

Figure 1 is taken from (Thurner et al. 2015).

{{< figure src="/ox-hugo/position_sensors_thurner15.png" caption="<span class="figure-number">Figure 1: Overview of range and precision of different position displacement sensors" >}}

Bibliography

Collette, C, K Artoos, M Guinchard, S Janssens, P Carmona Fernandez, and C Hauviller. 2011. “Review of Sensors for Low Frequency Seismic Vibration Measurement.” CERN.

Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” Sensors and Actuators a: Physical 190 (nil): 106–26. doi:10.1016/j.sna.2012.10.016.

Gao, W., S.W. Kim, H. Bosse, H. Haitjema, Y.L. Chen, X.D. Lu, W. Knapp, A. Weckenmann, W.T. Estler, and H. Kunzmann. 2015. “Measurement Technologies for Precision Positioning.” Cirp Annals 64 (2): 773–96. doi:10.1016/j.cirp.2015.05.009.

Thurner, Klaus, Francesca Paola Quacquarelli, Pierre-François Braun, Claudio Dal Savio, and Khaled Karrai. 2015. “Fiber-Based Distance Sensing Interferometry.” Applied Optics 54 (10). Optical Society of America: 3051–63.