8.8 KiB
+++ title = "Positioning Stations" author = ["Dehaeze Thomas"] draft = false category = "equipment" +++
Tags :
Review
Sensors
- Capacitive: <&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam>
- Fiber Interferometers Interferometers:
- Attocube FPS3010 Fabry-Pérot interferometers: <&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann>
- Attocube IDS3010 Fabry-Pérot interferometers: <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano>
- PicoScale SmarAct Michelson interferometers: <&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls>
Actuators
- Piezoelectric: <&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann>
- 3-phase linear motor: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>
- Voice Coil: <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>
Bandwidth
Rarely specificity. Usually slow, so that only drifts are compensated. Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>.
Degrees of Freedom
- Full rotation for tomography:
- Spindle bellow YZ stage: <&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls>
- Spindle above YZ stage: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii>
- Only for mapping: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano>
Stroke:
- > 1mm: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>
Payload capabilities
- Micron scale samples
- Samples up to 500g <&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano>
Nano Positioning End-Station without online metrology
{{< figure src="/ox-hugo/endstation_id11.png" >}}
End-Station with integrated online metrology
| Architecture | Sensors and measured DoFs | Metrology Use | Stroke, DoF | Samples | Institute, BL | Ref |
|---|---|---|---|---|---|---|
| Spindle / XYZ piezo stage / Spherical retroreflector / Sample | 3 interferometers: \(YZ\) | Characterization | XYZ: 100um, Rz: 180 deg | micron scale | PETRA III, P06 | <&schroer17_ptynam;&schropp20_ptynam> |
| Spindle / Metrology Ring / XYZ Stage / Sample | 3 Capacitive: \(YZR_x\) | Post processing | micron scale | NSLS, X8C | <&wang12_autom_marker_full_field_hard> | |
| XYZ piezo stage / Spindle / Metrology Ring / Sample | 2 interferometers : \(YZ\) | Detector triggering | micron scale | NSLS, HRX | <&xu23_high_nsls_ii> |
{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class="figure-number">Figure 1: Figure caption" >}}
{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class="figure-number">Figure 2: Figure caption" >}}
{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class="figure-number">Figure 3: Figure caption" >}}
End-Station with integrated feedback loops based on online metrology
| Architecture | Sensors and measured DoFs | Bandwidth | Stroke, DoF | Samples | Institute, BL | Ref |
|---|---|---|---|---|---|---|
| XYZ piezo motors / Mirrors / Sample | 3 interferometers: \(XYZ\) | 3 PID | XYZ: 3mm | light | APS | <&nazaretski15_pushin_limit> |
| Piezo Hexapod / Spindle / Metrology Ring / Sample | 12 Capacitive: \(XYZR_xR_y\) | 10Hz | XYZ: 50um, Rx/Ry:500urad, Rz: 180deg | light | ESRF, ID16a | <&villar18_nanop_esrf_id16a_nano_imagin_beaml> |
| Piezo Tripod / Spindle / Spherical Reference / Sample | 5 Custom interferometers: \(YZR_x\) | PID | XYZ: 400um, Rz: 365 deg | light | PSI, OMNY | <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage> |
| Stacked XYZ linear motors / Spindle / XY / Cylindrical Reference | 5 interferometers: \(XYZR_xR_y\) | XYZ: 400um, Rz: 360 deg | light | Soleil, Nanoprobe | <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul> | |
| XYZ piezo / Spindle / Metrology Ring / Sample | 3 interferometers : \(XYZ\) | XYZ: 100um, Rz: 360 deg | up to 500g | NSLS, SRX | <&nazaretski22_new_kirkp_baez_based_scann> | |
| Parallel XYZ voice coil stage / Sample | 3 interferometers: \(XYZ\) | 100Hz | XYZ: 3mm | up to 350g | Diamond, I14 | <&kelly22_delta_robot_long_travel_nano> |
| Rz / Parallel XYZ voice coil stage / Sample | 3 interferometers: \(XYZ\) | 100Hz | YZ: 3mm, Rz: +-110deg | light | LNLS, CARNAUBA | <&geraldes23_sapot_carnaub_sirius_lnls> |
{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class="figure-number">Figure 4: Figure caption" >}}
{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class="figure-number">Figure 5: Figure caption" >}}
{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class="figure-number">Figure 6: Figure caption" >}}
{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class="figure-number">Figure 7: Figure caption" >}}
{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class="figure-number">Figure 8: Figure caption" >}}
{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class="figure-number">Figure 9: Figure caption" >}}
Manufacturers
| Manufacturers | Country |
|---|---|
| Kohzu | Japan |
| PI | USA |
| Attocube | Germany |
| Newport | |
| LAB | Belgium |
Bibliography
<./biblio/references.bib>