9.9 KiB
9.9 KiB
+++ title = "Position Sensors" author = ["Thomas Dehaeze"] draft = false +++
Backlinks:
- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
- [Sensors]({{< relref "sensors" >}})
- [Collocated Control]({{< relref "collocated_control" >}})
- [Inertial Sensors]({{< relref "inertial_sensors" >}})
- Tags
- [Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}}), [Signal Conditioner]({{< relref "signal_conditioner" >}}), [Signal to Noise Ratio]({{< relref "signal_to_noise_ratio" >}})
Reviews of Relative Position Sensors
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Fleming 2013) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
Table 1:
Characteristics of relative measurement sensors collette11_review
| Technology | Frequency | Resolution | Range | T Range |
|---|---|---|---|---|
| LVDT | DC-200 Hz | 10 nm rms | 1-10 mm | -50,100 °C |
| Eddy current | 5 kHz | 0.1-100 nm rms | 0.5-55 mm | -50,100 °C |
| Capacitive | DC-100 kHz | 0.05-50 nm rms | 50 nm - 1 cm | -40,100 °C |
| Interferometer | 300 kHz | 0.1 nm rms | 10 cm | -250,100 °C |
| Encoder | DC-1 MHz | 1 nm rms | 7-27 mm | 0,40 °C |
| Bragg Fibers | DC-150 Hz | 0.3 nm rms | 3.5 cm | -30,80 °C |
Table 2:
Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of 100um and a first order bandwidth of \(1 kHz\) fleming13_review_nanom_resol_posit_sensor
| Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy |
|---|---|---|---|---|---|
| Metal foil | \(10-500 \mu m\) | 230 ppm | 23 nm | 1-10 kHz | 1% FSR |
| Piezoresistive | \(1-500 \mu m\) | 5 ppm | 0.5 nm | >100 kHz | 1% FSR |
| Capacitive | \(10 \mu m\) to \(10 mm\) | 24 ppm | 2.4 nm | 100 kHz | 0.1% FSR |
| Electrothermal | \(10 \mu m\) to \(1 mm\) | 100 ppm | 10 nm | 10 kHz | 1% FSR |
| Eddy current | \(100 \mu m\) to \(80 mm\) | 10 ppm | 1 nm | 40 kHz | 0.1% FSR |
| LVDT | \(0.5-500 mm\) | 10 ppm | 5 nm | 1 kHz | 0.25% FSR |
| Interferometer | Meters | 0.5 nm | >100kHz | 1 ppm FSR | |
| Encoder | Meters | 6 nm | >100kHz | 5 ppm FSR |
Capacitive Sensors and Eddy-Current sensors are compare here.
Capacitive Sensor
Description:
- http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html
- https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors
| Manufacturers | Links | Country |
|---|---|---|
| Micro Sense | link | USA |
| Micro-Epsilon | link | Germany |
| PI | link | Germany |
| Unipulse | link | Japan |
| Lion-Precision | link | USA |
| Fogale | link | USA |
| Queensgate | link | UK |
| Capacitec | link | USA |
Inductive Sensor (Eddy Current)
| Manufacturers | Links | |
|---|---|---|
| Micro-Epsilon | link | Germany |
| Lion Precision | link | USA |
| Cedrat | link | France |
| Kaman | link | USA |
| Keyence | link | USA |
Inductive Sensor (LVDT)
| Manufacturers | Links | Country |
|---|---|---|
| Micro-Epsilon | link | Germany |
| Keyence | link | USA |
Interferometers
| Manufacturers | Links | Country |
|---|---|---|
| Attocube | link | Germany |
| Zygo | link | USA |
| Smaract | link | Germany |
| Qutools | link | Germany |
| Renishaw | link | UK |
| Sios | link | Germany |
| Keysight | link | USA |
Table 3:
Characteristics of Environmental Units
| Temperature (\(\pm\ ^oC\)) | Pressure (\(\pm\ hPa\)) | Humidity \(\pm\% RH\) | Wavelength Accuracy (\(\pm\ \text{ppm}\)) | |
|---|---|---|---|---|
| Attocube | 0.1 | 1 | 2 | 0.5 |
| Renishaw | 0.2 | 1 | 6 | 1 |
| Picoscale | 0.2 | 2 | 2 | 1 |
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
Linear Encoders
| Manufacturers | Links | Country |
|---|---|---|
| Heidenhain | link | Germany |
| MicroE Systems | link | USA |
| Renishaw | link | UK |
| Celera Motion | link | USA |
Bibliography
Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” Sensors and Actuators a: Physical 190 (nil):106–26. https://doi.org/10.1016/j.sna.2012.10.016.
Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” International Journal of Precision Engineering and Manufacturing 18 (12):1881–90. https://doi.org/10.1007/s12541-017-0217-y.