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+++ title = "Control of wafer scanners: methods and developments" author = ["Thomas Dehaeze"] draft = true +++

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Reference
(Heertjes et al. 2020)
Author(s)
Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …
Year
2020

Bibliography

Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In 2020 American Control Conference (ACC), 3686–3703. IEEE.