Thomas Dehaeze
158dfe302f
PhDthesis were categorized as articles. Add "fron matter" to specify zettels category
24 lines
533 B
Markdown
24 lines
533 B
Markdown
+++
|
||
title = "Position control in lithographic equipment"
|
||
author = ["Thomas Dehaeze"]
|
||
draft = true
|
||
+++
|
||
|
||
Tags
|
||
: [Multivariable Control]({{<relref "multivariable_control.md#" >}}), [Positioning Stations]({{<relref "positioning_stations.md#" >}})
|
||
|
||
Reference
|
||
: ([Butler 2011](#org9e15931))
|
||
|
||
Author(s)
|
||
: Butler, H.
|
||
|
||
Year
|
||
: 2011
|
||
|
||
|
||
|
||
## Bibliography {#bibliography}
|
||
|
||
<a id="org9e15931"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.
|