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+++ title = "Positioning Stations" author = ["Dehaeze Thomas"] draft = false category = "equipment" +++

Tags :

Review

Sensors

Actuators

Bandwidth

Rarely specificity. Usually slow, so that only drifts are compensated. Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators (Kelly et al. 2022; Geraldes et al. 2023).

Degrees of Freedom

Stroke:

Payload capabilities

Nano Positioning End-Station without online metrology

{{< figure src="/ox-hugo/endstation_id11.png" >}}

End-Station with integrated online metrology

Table 1: End-Station with integrated online metrology
Architecture Sensors and measured DoFs Metrology Use Stroke, DoF Samples Institute, BL Ref
Spindle / XYZ piezo stage / Spherical retroreflector / Sample 3 interferometers: \(YZ\) Characterization XYZ: 100um, Rz: 180 deg micron scale PETRA III, P06 (Schroer et al. 2017; Schropp et al. 2020)
Spindle / Metrology Ring / XYZ Stage / Sample 3 Capacitive: \(YZR_x\) Post processing micron scale NSLS, X8C (Wang et al. 2012)
XYZ piezo stage / Spindle / Metrology Ring / Sample 2 interferometers : \(YZ\) Detector triggering micron scale NSLS, HRX (Xu et al. 2023)

{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class="figure-number">Figure 1: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class="figure-number">Figure 2: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class="figure-number">Figure 3: Figure caption" >}}

End-Station with integrated feedback loops based on online metrology

Table 2: End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.
Architecture Sensors and measured DoFs Bandwidth Stroke, DoF Samples Institute, BL Ref
XYZ piezo motors / Mirrors / Sample 3 interferometers: \(XYZ\) 3 PID XYZ: 3mm light APS (Nazaretski et al. 2015)
Piezo Hexapod / Spindle / Metrology Ring / Sample 12 Capacitive: \(XYZR_xR_y\) 10Hz XYZ: 50um, Rx/Ry:500urad, Rz: 180deg light ESRF, ID16a (Villar et al. 2018)
Piezo Tripod / Spindle / Spherical Reference / Sample 5 Custom interferometers: \(YZR_x\) PID XYZ: 400um, Rz: 365 deg light PSI, OMNY (Holler et al. 2017, 2018)
Stacked XYZ linear motors / Spindle / XY / Cylindrical Reference 5 interferometers: \(XYZR_xR_y\) XYZ: 400um, Rz: 360 deg light Soleil, Nanoprobe (Stankevic et al. 2017; Engblom and others 2018)
XYZ piezo / Spindle / Metrology Ring / Sample 3 interferometers : \(XYZ\) XYZ: 100um, Rz: 360 deg up to 500g NSLS, SRX (Nazaretski et al. 2022)
Parallel XYZ voice coil stage / Sample 3 interferometers: \(XYZ\) 100Hz XYZ: 3mm up to 350g Diamond, I14 (Kelly et al. 2022)
Rz / Parallel XYZ voice coil stage / Sample 3 interferometers: \(XYZ\) 100Hz YZ: 3mm, Rz: +-110deg light LNLS, CARNAUBA (Geraldes et al. 2023)

{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class="figure-number">Figure 4: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class="figure-number">Figure 5: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class="figure-number">Figure 6: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class="figure-number">Figure 7: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class="figure-number">Figure 8: Figure caption" >}}

{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class="figure-number">Figure 9: Figure caption" >}}

Manufacturers

Manufacturers Country
Kohzu Japan
PI USA
Attocube Germany
Newport
LAB Belgium

Bibliography

Engblom, C., and others. 2018. “Nanoprobe Results: Metrology & Control in Stacked Closed-Loop Systems.” In Proc. Of International Conference on Accelerator and Large Experimental Control Systems (ICALEPCS’17). JACoW. doi:10.18429/JACoW-ICALEPCS2017-WEAPL04.
Geraldes, Renan R., Gabriel B. Z. L. Moreno, Francesco R. Lena, Erik O. Pereira, Matheus H. S. da Silva, Gabriel G. Basílio, Pedro P. R. Proença, et al. 2023. “The High-Dynamic Cryogenic Sample Stage for SAPOTI/CARNAÚBA at Sirius/LNLS.” In PROCEEDINGS of the 15TH INTERNATIONAL CONFERENCE on X-RAY MICROSCOPY - XRM2022, nil. doi:10.1063/5.0168438.
Holler, M., J. Raabe, A. Diaz, M. Guizar-Sicairos, R. Wepf, M. Odstrcil, F. R. Shaik, et al. 2018. “Omny-a Tomography Nano Cryo Stage.” Review of Scientific Instruments 89 (4): 043706. doi:10.1063/1.5020247.
Holler, M., J. Raabe, R. Wepf, S. H. Shahmoradian, A. Diaz, B. Sarafimov, T. Lachat, H. Walther, and M. Vitins. 2017. “Omny Pin-a Versatile Sample Holder for Tomographic Measurements at Room and Cryogenic Temperatures.” Review of Scientific Instruments 88 (11): 113701. doi:10.1063/1.4996092.
Kelly, Jon, Andrew Male, Nicholas Rubies, David Mahoney, Jessica M. Walker, Miguel A. Gomez-Gonzalez, Guy Wilkin, Julia E. Parker, and Paul D. Quinn. 2022. “The Delta Robot-a Long Travel Nano-Positioning Stage for Scanning X-Ray Microscopy.” Review of Scientific Instruments 93 (4): nil. doi:10.1063/5.0084806.
Nazaretski, E., D. S. Coburn, W. Xu, J. Ma, H. Xu, R. Smith, X. Huang, et al. 2022. “A New Kirkpatrick-Baez-Based Scanning Microscope for the Submicron Resolution X-Ray Spectroscopy (SRX) Beamline at Nsls-Ii.” Journal of Synchrotron Radiation 29 (5): 1284–91. doi:10.1107/s1600577522007056.
Nazaretski, E., K. Lauer, H. Yan, N. Bouet, J. Zhou, R. Conley, X. Huang, et al. 2015. “Pushing the Limits: An Instrument for Hard X-Ray Imaging below 20 Nm.” Journal of Synchrotron Radiation 22 (2): 336–41. doi:10.1107/s1600577514025715.
Schroer, Christian G., Martin Seyrich, Maik Kahnt, Stephan Botta, Ralph Döhrmann, Gerald Falkenberg, Jan Garrevoet, et al. 2017. “PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA III: Interferometrically Tracking Positions for 3D X-Ray Scanning Microscopy Using a Ball-Lens Retroreflector.” In X-Ray Nanoimaging: Instruments and Methods III. doi:10.1117/12.2273710.
Schropp, Andreas, Ralph Döhrmann, Stephan Botta, Dennis Brückner, Maik Kahnt, Mikhail Lyubomirskiy, Christina Ossig, et al. 2020. “Ptynami: Ptychographic Nano-Analytical Microscope.” Journal of Applied Crystallography 53 (4): 957–71. doi:10.1107/s1600576720008420.
Stankevic, Tomas, Christer Engblom, Florent Langlois, Filipe Alves, Alain Lestrade, Nicolas Jobert, Gilles Cauchon, Ulrich Vogt, and Stefan Kubsky. 2017. “Interferometric Characterization of Rotation Stages for X-Ray Nanotomography.” Review of Scientific Instruments 88 (5): 053703. doi:10.1063/1.4983405.
Villar, F., L. Andre, R. Baker, S. Bohic, J. C. da Silva, C. Guilloud, O. Hignette, et al. 2018. “Nanopositioning for the Esrf Id16a Nano-Imaging Beamline.” Synchrotron Radiation News 31 (5): 9–14. doi:10.1080/08940886.2018.1506234.
Wang, Jun, Yu-chen Karen Chen, Qingxi Yuan, Andrei Tkachuk, Can Erdonmez, Benjamin Hornberger, and Michael Feser. 2012. “Automated Markerless Full Field Hard X-Ray Microscopic Tomography at Sub-50 Nm 3-Dimension Spatial Resolution.” Applied Physics Letters 100 (14): 143107. doi:10.1063/1.3701579.
Xu, Weihe, Huijuan Xu, Dmitri Gavrilov, Xiaojing Huang, Hanfei Yan, Yong S. Chu, and Evgeny Nazaretski. 2023. “High-Speed Fly-Scan Capabilities for X-Ray Microscopy Systems at NSLS-II.” In X-Ray Nanoimaging: Instruments and Methods VI, nil. doi:10.1117/12.2675940.