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+++ title = "Position control in lithographic equipment" author = ["Dehaeze Thomas"] draft = true +++
- Tags
- [Multivariable Control]({{< relref "multivariable_control.md" >}}), [Positioning Stations]({{< relref "positioning_stations.md" >}})
- Reference
- (Butler 2011)
- Author(s)
- Butler, H.
- Year
- 2011
Bibliography
Butler, Hans. 2011. “Position Control in Lithographic Equipment.” Ieee Control Systems 31 (5): 28–47. doi:10.1109/mcs.2011.941882.