digital-brain/content/inproceedings/heertjes20_contr.md

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title = "Control of wafer scanners: methods and developments"
author = ["Thomas Dehaeze"]
draft = false
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Tags
:
Reference
: ([Heertjes et al. 2020](#org38a977c))
Author(s)
: Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …
Year
: 2020
## Bibliography {#bibliography}
<a id="org38a977c"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K OBrien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 36863703. IEEE.