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Thomas Dehaeze
2020-10-15 21:36:53 +02:00
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content/article/butler11_posit_contr_lithog_equip.md
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@@ -8,7 +8,7 @@ Tags
: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})
Reference
: ([Butler 2011](#orgc5e178d))
: ([Butler 2011](#org79c48f7))
Author(s)
: Butler, H.
@@ -19,4 +19,4 @@ Year
## Bibliography {#bibliography}
<a id="orgc5e178d"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.
<a id="org79c48f7"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.