Update Content - 2024-06-05

This commit is contained in:
Thomas Dehaeze 2024-06-05 13:08:36 +02:00
parent 7798c6a7f7
commit 61eeb53a1c
11 changed files with 110 additions and 7 deletions

View File

@ -9,17 +9,121 @@ Tags
:
## Linear Stage {#linear-stage}
## Review {#review}
## Spindle {#spindle}
### Sensors {#sensors}
<https://www.labmotionsystems.com/>
- Capacitive: <&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam>
- Fiber Interferometers Interferometers:
- Attocube FPS3010 Fabry-Pérot interferometers: <&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann>
- Attocube IDS3010 Fabry-Pérot interferometers: <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano>
- PicoScale SmarAct Michelson interferometers: <&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls>
## Stewart Platforms {#stewart-platforms}
### Actuators {#actuators}
See [Stewart Platforms]({{< relref "stewart_platforms.md" >}}).
- Piezoelectric: <&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann>
- 3-phase linear motor: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul>
- Voice Coil: <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>
### Bandwidth {#bandwidth}
Rarely specificity.
Usually slow, so that only drifts are compensated.
Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators <&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>.
### Degrees of Freedom {#degrees-of-freedom}
- Full rotation for tomography:
- Spindle bellow YZ stage: <&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls>
- Spindle above YZ stage: <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii>
- Only for mapping: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano>
**Stroke**:
- &gt; 1mm: <&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls>
### Payload capabilities {#payload-capabilities}
- Micron scale samples
- Samples up to 500g <&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano>
### Nano Positioning End-Station without online metrology {#nano-positioning-end-station-without-online-metrology}
{{< figure src="/ox-hugo/endstation_id11.png" >}}
### End-Station with integrated online metrology {#end-station-with-integrated-online-metrology}
<div class="table-caption">
<span class="table-number">Table 1:</span>
End-Station with integrated online metrology
</div>
| Architecture | Sensors and measured DoFs | Metrology Use | Stroke, DoF | Samples | Institute, BL | Ref |
|-------------------------------------------------------------------|------------------------------|---------------------|-------------------------|--------------|----------------|----------------------------------------|
| Spindle / **XYZ piezo stage** / Spherical retroreflector / Sample | 3 interferometers: \\(YZ\\) | Characterization | XYZ: 100um, Rz: 180 deg | micron scale | PETRA III, P06 | <&schroer17_ptynam;&schropp20_ptynam> |
| Spindle / Metrology Ring / **XYZ** Stage / Sample | 3 Capacitive: \\(YZR\_x\\) | Post processing | | micron scale | NSLS, X8C | <&wang12_autom_marker_full_field_hard> |
| **XYZ piezo stage** / Spindle / Metrology Ring / Sample | 2 interferometers : \\(YZ\\) | Detector triggering | | micron scale | NSLS, HRX | <&xu23_high_nsls_ii> |
<a id="figure--fig:endstation-schroer"></a>
{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class=\"figure-number\">Figure 1: </span>Figure caption" >}}
<a id="figure--fig:endstation-wang"></a>
{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class=\"figure-number\">Figure 2: </span>Figure caption" >}}
<a id="figure--fig:endstation-xu24"></a>
{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class=\"figure-number\">Figure 3: </span>Figure caption" >}}
### End-Station with integrated feedback loops based on online metrology {#end-station-with-integrated-feedback-loops-based-on-online-metrology}
<div class="table-caption">
<span class="table-number">Table 2:</span>
End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.
</div>
| Architecture | Sensors and measured DoFs | Bandwidth | Stroke, DoF | Samples | Institute, BL | Ref |
|----------------------------------------------------------------------|----------------------------------------|-----------|--------------------------------------|------------|-------------------|-------------------------------------------------------------------------------|
| **XYZ piezo motors** / Mirrors / Sample | 3 interferometers: \\(XYZ\\) | 3 PID | XYZ: 3mm | light | APS | <&nazaretski15_pushin_limit> |
| **Piezo Hexapod** / Spindle / Metrology Ring / Sample | 12 Capacitive: \\(XYZR\_xR\_y\\) | 10Hz | XYZ: 50um, Rx/Ry:500urad, Rz: 180deg | light | ESRF, ID16a | <&villar18_nanop_esrf_id16a_nano_imagin_beaml> |
| **Piezo Tripod** / Spindle / Spherical Reference / Sample | 5 Custom interferometers: \\(YZR\_x\\) | PID | XYZ: 400um, Rz: 365 deg | light | PSI, OMNY | <&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage> |
| **Stacked XYZ linear motors** / Spindle / XY / Cylindrical Reference | 5 interferometers: \\(XYZR\_xR\_y\\) | | XYZ: 400um, Rz: 360 deg | light | Soleil, Nanoprobe | <&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul> |
| **XYZ piezo** / Spindle / Metrology Ring / Sample | 3 interferometers : \\(XYZ\\) | | XYZ: 100um, Rz: 360 deg | up to 500g | NSLS, SRX | <&nazaretski22_new_kirkp_baez_based_scann> |
| **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | XYZ: 3mm | up to 350g | Diamond, I14 | <&kelly22_delta_robot_long_travel_nano> |
| Rz / **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | YZ: 3mm, Rz: +-110deg | light | LNLS, CARNAUBA | <&geraldes23_sapot_carnaub_sirius_lnls> |
<a id="figure--fig:endstation-nazaretski"></a>
{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class=\"figure-number\">Figure 4: </span>Figure caption" >}}
<a id="figure--fig:endstation-villar"></a>
{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class=\"figure-number\">Figure 5: </span>Figure caption" >}}
<a id="figure--fig:endstation-holler"></a>
{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class=\"figure-number\">Figure 6: </span>Figure caption" >}}
<a id="figure--fig:endstation-engblom"></a>
{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class=\"figure-number\">Figure 7: </span>Figure caption" >}}
<a id="figure--fig:endstation-kelly"></a>
{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class=\"figure-number\">Figure 8: </span>Figure caption" >}}
<a id="figure--fig:endstation-geraldes"></a>
{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class=\"figure-number\">Figure 9: </span>Figure caption" >}}
## Manufacturers {#manufacturers}
@ -35,5 +139,4 @@ See [Stewart Platforms]({{< relref "stewart_platforms.md" >}}).
## Bibliography {#bibliography}
<style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
</div>
<./biblio/references.bib>

Binary file not shown.

After

Width:  |  Height:  |  Size: 172 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 290 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 217 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 315 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 444 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 612 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 450 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 68 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 94 KiB

Binary file not shown.

After

Width:  |  Height:  |  Size: 113 KiB