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content/zettels/position_sensors.md
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### Backlinks {#backlinks}
- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
- [Inertial Sensors]({{< relref "inertial_sensors" >}})
- [Sensors]({{< relref "sensors" >}})
- [Collocated Control]({{< relref "collocated_control" >}})
Tags
: [Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}}), [Signal Conditioner]({{< relref "signal_conditioner" >}}), [Signal to Noise Ratio]({{< relref "signal_to_noise_ratio" >}})
## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#orgeaf4a0a)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#orgdd1b6d5)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
<a id="table--tab:characteristics-relative-sensor"></a>
<div class="table-caption">
@@ -30,7 +38,7 @@ Tags
<a id="table--tab:summary-position-sensors"></a>
<div class="table-caption">
<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a></span>:
Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) <a class='org-ref-reference' href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>
Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of 100um and a first order bandwidth of \(1 kHz\) <a class='org-ref-reference' href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>
</div>
| Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy |
@@ -108,9 +116,9 @@ Description:
| Renishaw | 0.2 | 1 | 6 | 1 |
| Picoscale | 0.2 | 2 | 2 | 1 |
([Jang and Kim 2017](#org5a2485c))
([Jang and Kim 2017](#orgbcf1569))
<a id="orgdc4dc3c"></a>
<a id="orgf2b5520"></a>
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
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## Bibliography {#bibliography}
<a id="orgeaf4a0a"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
<a id="orgdd1b6d5"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
<a id="org5a2485c"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.
## Backlinks {#backlinks}
- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
- [Inertial Sensors]({{< relref "inertial_sensors" >}})
- [Sensors]({{< relref "sensors" >}})
- [Collocated Control]({{< relref "collocated_control" >}})
<a id="orgbcf1569"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.