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@@ -17,6 +17,8 @@ The goal is therefore to obtain a long stroke high precision stage.
## Review {#review} ## Review {#review}
(<a href="#citeproc_bib_item_9">Pahk, Lee, and Park 2001</a>)
<a id="table--tab:introduction-dual-stages"></a> <a id="table--tab:introduction-dual-stages"></a>
<div class="table-caption"> <div class="table-caption">
<span class="table-number"><a href="#table--tab:introduction-dual-stages">Table 1</a>:</span> <span class="table-number"><a href="#table--tab:introduction-dual-stages">Table 1</a>:</span>
@@ -24,21 +26,21 @@ The goal is therefore to obtain a long stroke high precision stage.
</div> </div>
| **DoF** | **Long Stroke** | **Short Stroke** | **Bandwidth** | **Metrology** | **References** | Fig | | **DoF** | **Long Stroke** | **Short Stroke** | **Bandwidth** | **Metrology** | **References** | Fig |
|---------|-----------------------------------------------------|----------------------------|-----------------------------|-----------------------|----------------------------------------------------------------------------|---------------------------------------| |---------|-----------------------------------------------------|----------------------------|-----------------------------|-----------------------|-----------------------------------------------------------------------------------------------------------------------------|----------------------------------------------|
| X | Servo motor, leadscrew, rotary encoder | PZT, flexure (10um) | n/a | Interferometer, X | <&pahk01_ultra_precis_posit_system_servo_motor> | | | X | Servo motor, leadscrew, rotary encoder | PZT, flexure (10um) | n/a | Interferometer, X | (<a href="#citeproc_bib_item_9">Pahk, Lee, and Park 2001</a>) | |
| X,Y | 2 axis, linear motor | 2 PZT, flexures | n/a | Interferometers, XY | <&chassagne07_nano_posit_system_with_sub> | | | X,Y | 2 axis, linear motor | 2 PZT, flexures | n/a | Interferometers, XY | (<a href="#citeproc_bib_item_2">Chassagne et al. 2007</a>) | |
| X,Y,Rz | X, linear motor, linear guides | 4 VCM (1mm), air bearing | 85Hz | Interferometers, XYRz | <&choi08_desig_contr_nanop_xy_theta_scann> | [2](#figure--fig:two-stage-choi08) | | X,Y,Rz | X, linear motor, linear guides | 4 VCM (1mm), air bearing | 85Hz | Interferometers, XYRz | (<a href="#citeproc_bib_item_3">Choi et al. 2008</a>) | [Figure 2](#figure--fig:two-stage-choi08) |
| X | 1 axis, DC motor, feedscrew, rotary encoder (25mm) | 1 PZT (17um), flexures | 2000Hz | Interferometer, X | <&buice09_desig_evaluat_singl_axis_precis> | [1](#figure--fig:two-stage-buice09) | | X | 1 axis, DC motor, feedscrew, rotary encoder (25mm) | 1 PZT (17um), flexures | 2000Hz | Interferometer, X | (<a href="#citeproc_bib_item_1">Buice et al. 2009</a>) | [Figure 1](#figure--fig:two-stage-buice09) |
| X,Y,Rz | 1 axis, ballscrew, rotary motor | 3 piezo, flexure | 3 PID, \\(\approx 1\\,Hz\\) | Interferometers, XYRz | <&liu10_desig_contr_long_travel_nano_posit_stage> | | | X,Y,Rz | 1 axis, ballscrew, rotary motor | 3 piezo, flexure | 3 PID, \\(\approx 1\\,Hz\\) | Interferometers, XYRz | (<a href="#citeproc_bib_item_7">Liu et al. 2010</a>) | |
| X | 1 axis, Servo motor, ball screw (300mm) | 1 VCM, air bearing (5mm) | n/a | Interferometer, X | <&shinno11_newly_devel_long_range_posit> | [4](#figure--fig:two-stage-shinno11) | | X | 1 axis, Servo motor, ball screw (300mm) | 1 VCM, air bearing (5mm) | n/a | Interferometer, X | (<a href="#citeproc_bib_item_11">Shinno, Yoshioka, and Sawano 2011</a>) | [Figure 4](#figure--fig:two-stage-shinno11) |
| X | 1 axis, VCM, flexure (10mm) | APA, flexure (15um) | PID, \\(\approx 1\\,Hz\\) | Interferometer, X | <&xu12_desig_devel_flexur_based_dual> | [7](#figure--fig:two-stage-xu12) | | X | 1 axis, VCM, flexure (10mm) | APA, flexure (15um) | PID, \\(\approx 1\\,Hz\\) | Interferometer, X | (<a href="#citeproc_bib_item_15">Xu 2012</a>) | [Figure 7](#figure--fig:two-stage-xu12) |
| X | 1 axis X, ballscrew, stepper | 1 piezo stack Y | n/a | Capacitive, Y | <&ting11_contr_desig_high_frequen_cuttin> | [5](#figure--fig:two-stage-ting11) | | X | 1 axis X, ballscrew, stepper | 1 piezo stack Y | n/a | Capacitive, Y | (<a href="#citeproc_bib_item_12">Ting, Li, and Lin 2011</a>) | [Figure 5](#figure--fig:two-stage-ting11) |
| X,Y | 2 axis, air bearing, linear motors (500mm), encoder | 4 VCM XYRz (3mm) | n/a | Interferometer, XYRz | <&okazaki12_dual_servo_mechan_stage_contin_posit> | [3](#figure--fig:two-stage-okazaki12) | | X,Y | 2 axis, air bearing, linear motors (500mm), encoder | 4 VCM XYRz (3mm) | n/a | Interferometer, XYRz | (<a href="#citeproc_bib_item_8">Okazaki, Asano, and Goto 2012</a>) | [Figure 3](#figure--fig:two-stage-okazaki12) |
| X | 1 axis, linear motor | 1 VCM | 800Hz | Interferometer, X | <&ito13_high_precis_posit_system_using;&ito15_low_stiff_dual_stage_actuat> | | | X | 1 axis, linear motor | 1 VCM | 800Hz | Interferometer, X | (<a href="#citeproc_bib_item_5">Ito et al. 2013</a>; <a href="#citeproc_bib_item_4">Ito, Steininger, and Schitter 2015</a>) | |
| X | stepper motor, ballscrew (300mm) | PZT (16um) | 70Hz | Linear Encoder, X | <&kim13_desig_contr_singl_stage_dual> | | | X | stepper motor, ballscrew (300mm) | PZT (16um) | 70Hz | Linear Encoder, X | (<a href="#citeproc_bib_item_6">Kim et al. 2013</a>) | |
| X,Y | 2 axis stepper (100mm), encoder | 4 PZT (130um) | \\(\approx 10\\,Hz\\) | Interferometers, XY | <&wu13_desig> | | | X,Y | 2 axis stepper (100mm), encoder | 4 PZT (130um) | \\(\approx 10\\,Hz\\) | Interferometers, XY | (<a href="#citeproc_bib_item_14">Wu et al. 2013</a>) | |
| X | 1 axis, linear motor (10mm), encoder | 1 VCM | 130 Hz | Interferometer, X | <&zhu17_flexur_based_paral_actuat_dual> | | | X | 1 axis, linear motor (10mm), encoder | 1 VCM | 130 Hz | Interferometer, X | (<a href="#citeproc_bib_item_16">Zhu, Pang, and Teo 2017</a>) | |
| X,Y | XY stepper motor (100mm), ballscrew, encoder | 2 PZT (100um) + capacitive | \\(\approx 10\\,Hz\\) | Combine both | <&wang17_devel_contr_long_strok_precis_stage> | [6](#figure--fig:two-stage-wang17) | | X,Y | XY stepper motor (100mm), ballscrew, encoder | 2 PZT (100um) + capacitive | \\(\approx 10\\,Hz\\) | Combine both | (<a href="#citeproc_bib_item_13">Wang, Peng, and Wang 2017</a>) | [Figure 6](#figure--fig:two-stage-wang17) |
<a id="figure--fig:two-stage-buice09"></a> <a id="figure--fig:two-stage-buice09"></a>
@@ -73,9 +75,26 @@ The goal is therefore to obtain a long stroke high precision stage.
Books and PhD: Books and PhD:
- <qingsong16_desig_implem_large_range_compl_microp_system> - (<a href="#citeproc_bib_item_10">Qingsong 2016</a>)
## Bibliography {#bibliography} ## Bibliography {#bibliography}
<./biblio/references.bib> <style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
<div class="csl-entry"><a id="citeproc_bib_item_1"></a>Buice, Eric S., David Otten, Raymond H. Yang, Stuart T. Smith, Robert J. Hocken, and David L. Trumper. 2009. “Design Evaluation of a Single-Axis Precision Controlled Positioning Stage.” <i>Precision Engineering</i> 33 (4): 418–24. doi:<a href="https://doi.org/10.1016/j.precisioneng.2008.11.001">10.1016/j.precisioneng.2008.11.001</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_2"></a>Chassagne, L, M Wakim, S Xu, S Topçu, P Ruaux, P Juncar, and Y Alayli. 2007. “A 2d Nano-Positioning System with Sub-Nanometric Repeatability over the Millimetre Displacement Range.” <i>Measurement Science and Technology</i> 18 (11). IOP Publishing: 3267–72. doi:<a href="https://doi.org/10.1088/0957-0233/18/11/001">10.1088/0957-0233/18/11/001</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_3"></a>Choi, Young-Man, Jung Jae Kim, Jinwoo Kim, and Dae-Gab Gweon. 2008. “Design and Control of a Nanoprecision XY$\THETA$ Scanner.” <i>Review of Scientific Instruments</i> 79 (4): 045109. doi:<a href="https://doi.org/10.1063/1.2902276">10.1063/1.2902276</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_4"></a>Ito, Shingo, Juergen Steininger, and Georg Schitter. 2015. “Low-Stiffness Dual Stage Actuator for Long Rage Positioning with Nanometer Resolution.” <i>Mechatronics</i> 29: 46–56. doi:<a href="https://doi.org/10.1016/j.mechatronics.2015.05.007">10.1016/j.mechatronics.2015.05.007</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_5"></a>Ito, Shingo, Juergen Steininger, Peter I. Chang, and Georg Schitter. 2013. “High-Precision Positioning System Using a Low-Stiffness Dual Stage Actuator.” <i>IFAC Proceedings Volumes</i> 46 (5): 20–27. doi:<a href="https://doi.org/10.3182/20130410-3-cn-2034.00025">10.3182/20130410-3-cn-2034.00025</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_6"></a>Kim, Michael D., Kwang-Hee Lee, Kyung-Tae Nam, and Sang-Moo Lee. 2013. “Design and Control of a Single-Stage Dual-Actuator System for High-Precision Manufacturing.” <i>Microsystem Technologies</i> 20 (2). Springer Science and Business Media LLC: 175–83. doi:<a href="https://doi.org/10.1007/s00542-013-1979-5">10.1007/s00542-013-1979-5</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_7"></a>Liu, Chien-Hung, Wen-Yuh Jywe, Yeau-Ren Jeng, Tung-Hui Hsu, and Yi-tsung Li. 2010. “Design and Control of a Long-Traveling Nano-Positioning Stage.” <i>Precision Engineering</i> 34 (3): 497–506. doi:<a href="https://doi.org/10.1016/j.precisioneng.2010.01.003">10.1016/j.precisioneng.2010.01.003</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_8"></a>Okazaki, Yuichi, Shin Asano, and Takayuki Goto. 2012. “Dual-Servo Mechanical Stage for Continuous Positioning.” <i>International Journal of the Japan Society for Precision Engineering</i> 27 (2): 172–73.</div>
<div class="csl-entry"><a id="citeproc_bib_item_9"></a>Pahk, Heui Jae, Dong Sung Lee, and Jong Ho Park. 2001. “Ultra Precision Positioning System for Servo Motor–Piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation.” <i>International Journal of Machine Tools and Manufacture</i> 41 (1). Elsevier: 51–63.</div>
<div class="csl-entry"><a id="citeproc_bib_item_10"></a>Qingsong. 2016. <i>Design and Implementation of Large-Range Compliant Micropositioning Systems</i>. Singapore: Wiley.</div>
<div class="csl-entry"><a id="citeproc_bib_item_11"></a>Shinno, H., H. Yoshioka, and H. Sawano. 2011. “A Newly Developed Long Range Positioning Table System with a Sub-Nanometer Resolution.” <i>CIRP Annals</i> 60 (1): 403–6. doi:<a href="https://doi.org/10.1016/j.cirp.2011.03.027">10.1016/j.cirp.2011.03.027</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_12"></a>Ting, Y., C.C. Li, and C.M. Lin. 2011. “Controller Design for High-Frequency Cutting Using a Piezo-Driven Microstage.” <i>Precision Engineering</i> 35 (3). Elsevier BV: 455–63. doi:<a href="https://doi.org/10.1016/j.precisioneng.2011.02.004">10.1016/j.precisioneng.2011.02.004</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_13"></a>Wang, Kou-An, Yi-Kai Peng, and Fu-Cheng Wang. 2017. “The Development and Control of a Long-Stroke Precision Stage.” <i>Smart Science</i> 5 (2). Informa UK Limited: 85–93. doi:<a href="https://doi.org/10.1080/23080477.2017.1313693">10.1080/23080477.2017.1313693</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_14"></a>Wu, R.C., I.H. Tsai, F.C. Wang, and J.Y. Yen. 2013. “Design and Control of a Long-Stroke Nano-Positioning Stage.” In <i>Proceedings of the 2013 IEEE/SICE International Symposium on System Integration</i>. doi:<a href="https://doi.org/10.1109/sii.2013.6776643">10.1109/sii.2013.6776643</a>.</div>
<div class="csl-entry"><a id="citeproc_bib_item_15"></a>Xu, Qingsong. 2012. “Design and Development of a Flexure-Based Dual-Stage Nanopositioning System with Minimum Interference Behavior.” <i>IEEE Transactions on Automation Science and Engineering</i> 9 (3). IEEE: 554–63.</div>
<div class="csl-entry"><a id="citeproc_bib_item_16"></a>Zhu, Haiyue, Chee Khiang Pang, and Tat Joo Teo. 2017. “A Flexure-Based Parallel Actuation Dual-Stage System for Large-Stroke Nanopositioning.” <i>IEEE Transactions on Industrial Electronics</i> 64 (7): 5553–63. doi:<a href="https://doi.org/10.1109/tie.2017.2677306">10.1109/tie.2017.2677306</a>.</div>
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