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Thomas Dehaeze
2022-03-15 16:40:48 +01:00
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content/article/butler11_posit_contr_lithog_equip.md
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title = "Position control in lithographic equipment"
author = ["Thomas Dehaeze"]
author = ["Dehaeze Thomas"]
draft = true
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Tags
: [Multivariable Control]({{<relref "multivariable_control.md#" >}}), [Positioning Stations]({{<relref "positioning_stations.md#" >}})
: [Multivariable Control]({{< relref "multivariable_control.md" >}}), [Positioning Stations]({{< relref "positioning_stations.md" >}})
Reference
: ([Butler 2011](#org9e15931))
: (<a href="#citeproc_bib_item_1">Butler 2011</a>)
Author(s)
: Butler, H.
@@ -17,7 +17,8 @@ Year
: 2011
## Bibliography {#bibliography}
<a id="org9e15931"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.
<style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
<div class="csl-entry"><a id="citeproc_bib_item_1"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” <i>Ieee Control Systems</i> 31 (5): 28–47. doi:<a href="https://doi.org/10.1109/mcs.2011.941882">10.1109/mcs.2011.941882</a>.</div>
</div>